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公开(公告)号：US11016024B2
公开(公告)日：2021-05-25
申请号：US16279395
申请日：2019-02-19
Applicant: KLA-Tencor Corporation
Abstract: An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.
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公开(公告)号：US20190137411A1
公开(公告)日：2019-05-09
申请号：US15828938
申请日：2017-12-01
Applicant: KLA-Tencor Corporation
Inventor： Donald Pettibone , Daniel Ivanov Kavaldjiev , Chuanyong Huang , Qing Li , Frank Li , Zhiwei Xu
Abstract: Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.
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公开(公告)号：US20200264099A1
公开(公告)日：2020-08-20
申请号：US16279395
申请日：2019-02-19
Applicant: KLA-Tencor Corporation
Abstract: An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.
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4.发明申请Image Intensifier Tube Design for Aberration Correction and Ion Damage Reduction 有权图像增强管设计用于畸变校正和离子损伤减少公开(公告)号：US20140063502A1
公开(公告)日：2014-03-06
申请号：US13957890
申请日：2013-08-02
Applicant: KLA-Tencor Corporation
Inventor： Ximan Jiang , Qing Li , Stephen Biellak
IPC: H01J40/16
Abstract: The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes defining an acceleration path from a photocathode to a scintillating screen are configured to provide higher acceleration for off-axis electrons along at least a portion of the acceleration path. Off-axis electrons and on-axis electrons are accordingly focused on the scintillating screen with substantial uniformity to prevent or reduce field curvature aberration. In some embodiments, the electrodes are configured to generate a repulsive electric field near the scintillating screen to prevent secondary electrons emitted or deflected by the scintillating screen from flowing towards the photocathode and forming damaging ions.
Abstract translation: 本发明涉及用于场曲率像差校正和离子损伤降低的图像增强管设计。 在一些实施例中，限定从光电阴极到闪烁屏幕的加速路径的电极被配置为沿着加速路径的至少一部分为离轴电子提供更高的加速度。 因此，离轴电子和轴上电子聚焦在闪烁屏上，具有大致均匀性以防止或减小场曲率像差。 在一些实施例中，电极被配置为在闪烁屏幕附近产生排斥电场，以防止由闪烁屏幕发射或偏转的二次电子朝向光电阴极流动并形成有害离子。
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公开(公告)号：US10739276B2
公开(公告)日：2020-08-11
申请号：US15828938
申请日：2017-12-01
Applicant: KLA-Tencor Corporation
Inventor： Donald Pettibone , Daniel Ivanov Kavaldjiev , Chuanyong Huang , Qing Li , Frank Li , Zhiwei Xu
Abstract: Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.
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Patent Agency Ranking
公开(公告)号：US09666419B2
公开(公告)日：2017-05-30
申请号：US13957890
申请日：2013-08-02
Applicant: KLA-Tencor Corporation
Inventor： Ximan Jiang , Qing Li , Stephen Biellak
Abstract: The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes defining an acceleration path from a photocathode to a scintillating screen are configured to provide higher acceleration for off-axis electrons along at least a portion of the acceleration path. Off-axis electrons and on-axis electrons are accordingly focused on the scintillating screen with substantial uniformity to prevent or reduce field curvature aberration. In some embodiments, the electrodes are configured to generate a repulsive electric field near the scintillating screen to prevent secondary electrons emitted or deflected by the scintillating screen from flowing towards the photocathode and forming damaging ions.
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7.发明申请公开(公告)号：US20160025645A1
公开(公告)日：2016-01-28
申请号：US14804296
申请日：2015-07-20
Applicant: KLA-Tencor Corporation
Inventor： Chuanyong Huang , Qing Li , Donald Pettibone , Buzz Graves
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2021/8825
Abstract: An inspection apparatus for simultaneous dark field (DF) and differential interference contrast (DIC) inspection includes an illumination source and a sample stage configured to secure a sample. The inspection apparatus includes a first sensor, a second sensor and an optical sub-system. The optical sub-system includes an objective, one or more optical elements arranged to direct, through the objective, illumination from the one or more illumination sources to a surface of the sample. The objective is configured to collect a signal from the surface of the sample, wherein the collected signal includes a scattering-based signal and/or a phase-based signal from the sample. The inspection apparatus includes one or more separation optical elements arranged to spatially separate the collected signal into a DF signal and a DIC signal by directing the DF signal and the DIC signal along a DF path and DIC path respectively.
Abstract translation: 用于同时暗场（DF）和差分干涉对比（DIC）检查的检查装置包括照明源和被配置为固定样品的样品台。 检查装置包括第一传感器，第二传感器和光子系统。 光学子系统包括物镜，一个或多个光学元件，被布置成通过物镜引导从一个或多个照明源到样品表面的照明。 该目的被配置为从样品的表面收集信号，其中所收集的信号包括来自样品的基于散射的信号和/或基于相位的信号。 检查装置包括一个或多个分离光学元件，其被布置为通过分别沿DF路径和DIC路径引导DF信号和DIC信号来将收集的信号空间分离成DF信号和DIC信号。
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公开(公告)号：US10732424B2
公开(公告)日：2020-08-04
申请号：US16258543
申请日：2019-01-26
Applicant: KLA-Tencor Corporation
Inventor： Zhiwei Xu , Chunsheng Huang , Qing Li
Abstract: A beam shaper for an optical inspection tool includes a focal lens to focus an optical beam onto a target at an oblique angle of incidence and a phase modulator to substantially flatten a top of the optical beam in the plane of the target when the optical beam is focused onto the target at the oblique angle of incidence.
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公开(公告)号：US20190250414A1
公开(公告)日：2019-08-15
申请号：US16258543
申请日：2019-01-26
Applicant: KLA-Tencor Corporation
Inventor： Zhiwei Xu , Chunsheng Huang , Qing Li
Abstract: A beam shaper for an optical inspection tool includes a focal lens to focus an optical beam onto a target at an oblique angle of incidence and a phase modulator to substantially flatten a top of the optical beam in the plane of the target when the optical beam is focused onto the target at the oblique angle of incidence.
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公开(公告)号：US09726615B2
公开(公告)日：2017-08-08
申请号：US14804296
申请日：2015-07-20
Applicant: KLA-Tencor Corporation
Inventor： Chuanyong Huang , Qing Li , Donald Pettibone , Buzz Graves
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2021/8825
Abstract: An inspection apparatus for simultaneous dark field (DF) and differential interference contrast (DIC) inspection includes an illumination source and a sample stage configured to secure a sample. The inspection apparatus includes a first sensor, a second sensor and an optical sub-system. The optical sub-system includes an objective, one or more optical elements arranged to direct, through the objective, illumination from the one or more illumination sources to a surface of the sample. The objective is configured to collect a signal from the surface of the sample, wherein the collected signal includes a scattering-based signal and/or a phase-based signal from the sample. The inspection apparatus includes one or more separation optical elements arranged to spatially separate the collected signal into a DF signal and a DIC signal by directing the DF signal and the DIC signal along a DF path and DIC path respectively.
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