公开(公告)号：US20190005629A1

公开(公告)日：2019-01-03

申请号：US16019422

申请日：2018-06-26

申请人： KLA-Tencor Corporation

发明人： Saurabh Sharma ,  Amitoz Singh Dandiana ,  Mohan Mahadevan ,  Chao Fang ,  Amir Azordegan ,  Brian Duffy

IPC分类号： G06T5/00

CPC分类号： G06T5/007 ,  G06T3/4053 ,  G06T2207/20084 ,  G06T2207/20208

摘要： Methods and systems for generating a high resolution image for a specimen from a low resolution image of the specimen are provided. One system includes one or more computer subsystems configured for acquiring a low resolution image of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a deep convolutional neural network that includes one or more first layers configured for generating a representation of the low resolution image. The deep convolutional neural network also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the low resolution image. The second layer(s) include a final layer configured to output the high resolution image and configured as a sub-pixel convolutional layer.

公开(公告)号：US10769761B2

公开(公告)日：2020-09-08

申请号：US16019422

申请日：2018-06-26

申请人： KLA-Tencor Corporation

发明人： Saurabh Sharma ,  Amitoz Singh Dandiana ,  Mohan Mahadevan ,  Chao Fang ,  Amir Azordegan ,  Brian Duffy

IPC分类号： G06T5/00 ,  G06T3/40

摘要： Methods and systems for generating a high resolution image for a specimen from a low resolution image of the specimen are provided. One system includes one or more computer subsystems configured for acquiring a low resolution image of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a deep convolutional neural network that includes one or more first layers configured for generating a representation of the low resolution image. The deep convolutional neural network also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the low resolution image. The second layer(s) include a final layer configured to output the high resolution image and configured as a sub-pixel convolutional layer.