ULTRAPURE-WATER PRODUCTION SYSTEM
    1.
    发明申请

    公开(公告)号:US20200171436A1

    公开(公告)日:2020-06-04

    申请号:US16087398

    申请日:2017-03-24

    摘要: The ultrapure-water production system includes an auxiliary treatment apparatus and a dead-end filtration apparatus. The auxiliary treatment apparatus treats water such that the number of microparticles present in water treated by the auxiliary treatment apparatus is 800 to 1200 particles/mL. The dead-end filtration apparatus includes a filtration membrane that is a microfiltration membrane having pores formed in the surface of the membrane at an opening ratio of 50% to 90% with a size of 0.05 to 1 μm, and having a thickness of 0.1 to 1 mm, or an ultrafiltration membrane having pores formed in the surface of the membrane with a size of 0.005 to 0.05 μm, the number of the pores being 1E13 to 1E15 pores/m2, the ultrafiltration membrane having a thickness of 0.1 to 1 mm and a transmembrane pressure of 0.02 to 0.10 MPa at a permeation flux of 10 m3/m2/d.