公开(公告)号：US08555920B2

公开(公告)日：2013-10-15

申请号：US12303841

申请日：2007-06-13

申请人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F17D1/04

CPC分类号： G05D7/0664 ,  Y10T137/85938 ,  Y10T137/87314 ,  Y10T137/87539

摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.

摘要翻译： 流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室， 并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上的开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值 通过调节流通孔的总开口面积来分流通道。

公开(公告)号：US20100229976A1

公开(公告)日：2010-09-16

申请号：US12303841

申请日：2007-06-13

申请人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16L41/00 ,  G01F1/42

CPC分类号： G05D7/0664 ,  Y10T137/85938 ,  Y10T137/87314 ,  Y10T137/87539

摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.

摘要翻译： 流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室， 并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上，开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值 通过调节流通孔的总开口面积来分流通道。

公开(公告)号：US20130319551A1

公开(公告)日：2013-12-05

申请号：US13988836

申请日：2011-11-17

申请人： Ryousuke Dohi ,  Atsuo Tomita ,  Kouji Nishino ,  Yohei Sawada ,  Nobukazu Ikeda

发明人： Ryousuke Dohi ,  Atsuo Tomita ,  Kouji Nishino ,  Yohei Sawada ,  Nobukazu Ikeda

IPC分类号： F16K37/00

CPC分类号： F16K37/0041 ,  F16K31/1221 ,  F16K37/00 ,  F16K37/0083 ,  Y10T137/8158 ,  Y10T137/8242

摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.

摘要翻译： 为了提供易于组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀 。 开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上， 并且传感器支撑构件21通过引导装置支撑在基板4上。

公开(公告)号：US09638560B2

公开(公告)日：2017-05-02

申请号：US13813219

申请日：2011-06-28

申请人： Masaaki Nagase ,  Nobukazu Ikeda ,  Yohei Sawada ,  Tooru Hirai ,  Kazuyuki Morisaki ,  Kouji Nishino ,  Ryousuke Dohi

发明人： Masaaki Nagase ,  Nobukazu Ikeda ,  Yohei Sawada ,  Tooru Hirai ,  Kazuyuki Morisaki ,  Kouji Nishino ,  Ryousuke Dohi

IPC分类号： G01F1/34 ,  G01F7/00 ,  G01F15/00 ,  G01F25/00 ,  G05D7/06

CPC分类号： G01F7/005 ,  G01F1/34 ,  G01F15/002 ,  G01F15/005 ,  G01F25/0053 ,  G05D7/0652 ,  Y10T137/0324

摘要： In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.

公开(公告)号：US20120223265A1

公开(公告)日：2012-09-06

申请号：US13389671

申请日：2010-11-05

申请人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/524 ,  F16K31/04 ,  F16K7/16

CPC分类号： F16K7/16 ,  F16K31/047 ,  F16K31/52408

摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.

摘要翻译： 凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用 在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压 支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分 的支撑框架并拧入电机支架。

公开(公告)号：US08561966B2

公开(公告)日：2013-10-22

申请号：US12439572

申请日：2007-08-21

申请人： Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Yohei Sawada

发明人： Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Yohei Sawada

IPC分类号： F16K31/44 ,  F16K31/02

CPC分类号： F16K31/04 ,  F16K7/16 ,  F16K31/52491

摘要： In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.

摘要翻译： 在步进马达驱动的凸轮阀中，杆在具有流入通道，​​流出通道，阀室和阀座的主体内自由上升和下降。 杆由致动器下降，该致动器由位于杆上方的位置的步进电动机和凸轮机构组成，其将步进电动机的旋转运动改变为线性运动，并将线性运动传递到杆。 阀室内的隔膜或阀杆的下端部的阀体位于阀座上。 支撑致动器自由上升和下降的提升支撑机构布置在覆盖阀室的发动机罩上。 布置在升降支撑机构处的高度精细调节机构，精细地调节致动器相对于杆的高度，以便执行阀的零点调节。

公开(公告)号：US20130186471A1

公开(公告)日：2013-07-25

申请号：US13813219

申请日：2011-06-28

申请人： Masaaki Nagase ,  Nobukazu Ikeda ,  Yohei Sawada ,  Tooru Hirai ,  Kazuyuki Morisaki ,  Kouji Nishino ,  Ryousuke Dohi

发明人： Masaaki Nagase ,  Nobukazu Ikeda ,  Yohei Sawada ,  Tooru Hirai ,  Kazuyuki Morisaki ,  Kouji Nishino ,  Ryousuke Dohi

IPC分类号： G01F7/00

CPC分类号： G01F7/005 ,  G01F1/34 ,  G01F15/002 ,  G01F15/005 ,  G01F25/0053 ,  G05D7/0652 ,  Y10T137/0324

摘要： In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.

摘要翻译： 在通过许多流量控制器向气体使用部分供应许多不同气体的气体供应装置中，流量控制器校准单元包括具有内部容积的积聚罐，入口侧开关阀和出口侧开关 阀的阀V2，以及气罐内的气体的气体压力检测器和气体温度检测器，以分支形式连接到气体供给管线，阀V2连接到真空。 校准单元用于基于对罐内的气体温度和压力进行第一次测量，然后将气体积聚到罐中，然后对气体温度和压力进行第二次测量，并从 各个测量值，计算气体流量Q，并通过比较设定的气体流量和计算出的气体流量Q进行流量校准。

公开(公告)号：US09038663B2

公开(公告)日：2015-05-26

申请号：US13988836

申请日：2011-11-17

申请人： Ryousuke Dohi ,  Atsuo Tomita ,  Kouji Nishino ,  Yohei Sawada ,  Nobukazu Ikeda

发明人： Ryousuke Dohi ,  Atsuo Tomita ,  Kouji Nishino ,  Yohei Sawada ,  Nobukazu Ikeda

IPC分类号： F16K37/00 ,  F16K31/122

CPC分类号： F16K37/0041 ,  F16K31/1221 ,  F16K37/00 ,  F16K37/0083 ,  Y10T137/8158 ,  Y10T137/8242

摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.

摘要翻译： 为了提供容易组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀 。 开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上， 并且传感器支撑构件21通过引导装置支撑在基板4上。

公开(公告)号：US08833730B2

公开(公告)日：2014-09-16

申请号：US13389671

申请日：2010-11-05

申请人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02 ,  F16K25/00 ,  F16K31/44 ,  F16K31/00 ,  H02K5/00 ,  F16K31/04 ,  F16K7/16 ,  F16K31/524

CPC分类号： F16K7/16 ,  F16K31/047 ,  F16K31/52408

摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.

摘要翻译： 凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用 在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压 支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分 的支撑框架并拧入电机支架。

公开(公告)号：US08162286B2

公开(公告)日：2012-04-24

申请号：US12593580

申请日：2008-03-13

申请人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14

摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.

摘要翻译： 即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件 ，设置在分离基座和压电致动器之间。