公开(公告)号：US5956058A

公开(公告)日：1999-09-21

申请号：US336060

申请日：1994-11-04

申请人： Kaoru Momose ,  Takahiro Katakura ,  Kazumi Kamoi ,  Kazunaga Suzuki ,  Takahiro Naka ,  Kazuhiko Miura ,  Tatsuo Furuta ,  Shinri Sakai

发明人： Kaoru Momose ,  Takahiro Katakura ,  Kazumi Kamoi ,  Kazunaga Suzuki ,  Takahiro Naka ,  Kazuhiko Miura ,  Tatsuo Furuta ,  Shinri Sakai

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/14362 ,  B41J2002/14387 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/11

摘要： An ink jet printer head includes a spacer including pressure generating chambers continuous to nozzle openings, ink supply paths, and reservoirs, a cover member for covering the pressure generating chambers in a sealing fashion, and pressure generating means for generating pressure in the pressure generating chambers in accordance with print data. In processing a silicon single-crystal substrate vertically oriented in (110) by anisotropic etching process, one of the walls of a path hole for forming a pressure generating chamber is aligned with one of the walls of a path hole for forming a reservoir. Walls defining the path hole for forming a pressure generating chamber, which are located in the vicinity of a nozzle opening, are connected to each other at an obtuse angle. As a result, the ink supply path serving as a narrow path for ink flow and the pressure generating chamber are formed as smooth flow paths. The walls in an area in the vicinity of the nozzle opening where ink tends to stay are substantially equally distanced from the nozzle opening. A smooth flow of ink is ensured.

摘要翻译： 喷墨打印机头包括间隔件，其包括与喷嘴开口连续的压力产生室，供墨路径和储存器，用于以密封方式覆盖压力发生室的盖构件和用于在压力发生室中产生压力的压力产生装置 按照打印数据。 在通过各向异性蚀刻工艺处理在（110）中垂直定向的硅单晶衬底时，用于形成压力发生室的通路孔的一个壁与用于形成储存器的通路孔的一个壁对准。 限定用于形成位于喷嘴开口附近的压力发生室的路径孔的壁以钝角彼此连接。 结果，用作油墨流动的窄路径的供墨路径和压力发生室形成为平滑的流动路径。 在喷嘴开口附近的油墨容易停留的区域中的壁与喷嘴开口基本相等。 确保油墨的平稳流动。

公开(公告)号：US5723053A

公开(公告)日：1998-03-03

申请号：US682883

申请日：1996-07-12

申请人： Kaoru Momose ,  Takahiro Katakura ,  Kazumi Kamoi ,  Kazunaga Suzuki ,  Takahiro Naka ,  Kazuhiko Miura ,  Tatsuo Furuta ,  Shinri Sakai

发明人： Kaoru Momose ,  Takahiro Katakura ,  Kazumi Kamoi ,  Kazunaga Suzuki ,  Takahiro Naka ,  Kazuhiko Miura ,  Tatsuo Furuta ,  Shinri Sakai

IPC分类号： B41J2/14 ,  B41J2/16 ,  H01L21/00

CPC分类号： B41J2/1629 ,  B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/14362 ,  B41J2002/14387 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/11

摘要： An ink jet printer head includes a spacer including pressure generating chambers continuous to nozzle openings, ink supply paths, and reservoirs, a cover member for covering the pressure generating chambers in a sealing fashion, and pressure generating means for generating pressure in the pressure generating chambers in accordance with print data. In processing a silicon single-crystal substrate vertically oriented in (110) by anisotropic etching process, one of the walls of a path hole for forming a pressure generating chamber is aligned with one of the walls of a path hole for forming a reservoir. Walls defining the path hole for forming a pressure generating chamber, which are located in the vicinity of a nozzle opening, are connected to each other at an obtuse angle. As a result, the ink supply path serving as a narrow path for ink flow and the pressure generating chamber are formed as smooth flow paths. The walls in an area in the vicinity of the nozzle opening where ink tends to stay are substantially equally distanced from the nozzle opening. A smooth flow of ink is ensured.

摘要翻译： 喷墨打印机头包括间隔件，其包括与喷嘴开口连续的压力产生室，供墨路径和储存器，用于以密封方式覆盖压力发生室的盖构件和用于在压力发生室中产生压力的压力产生装置 按照打印数据。 在通过各向异性蚀刻工艺处理在（110）中垂直定向的硅单晶衬底时，用于形成压力发生室的通路孔的一个壁与用于形成储存器的通路孔的一个壁对准。 限定用于形成位于喷嘴开口附近的压力发生室的路径孔的壁以钝角彼此连接。 结果，作为油墨流动的窄路径的供墨路径和压力发生室形成为平滑的流动路径。 在喷嘴开口附近的油墨容易停留的区域中的壁与喷嘴开口基本相等。 确保油墨的平稳流动。

公开(公告)号：US5748214A

公开(公告)日：1998-05-05

申请号：US510996

申请日：1995-08-03

申请人： Minoru Usui ,  Kazuhiko Hara ,  Yoshio Miyazawa ,  Yuji Tanaka ,  Fujio Akahane ,  Takahiro Katakura ,  Shinri Sakai ,  Yasushi Kishida ,  Tomoaki Abe ,  Toshiki Usui ,  Takeo Seino ,  Yoshikatsu Yamamoto

发明人： Minoru Usui ,  Kazuhiko Hara ,  Yoshio Miyazawa ,  Yuji Tanaka ,  Fujio Akahane ,  Takahiro Katakura ,  Shinri Sakai ,  Yasushi Kishida ,  Tomoaki Abe ,  Toshiki Usui ,  Takeo Seino ,  Yoshikatsu Yamamoto

IPC分类号： B41J2/14 ,  B41J2/45

CPC分类号： B41J2/14233 ,  B41J2002/14419 ,  B41J2202/07

摘要： An ink supply communication path is formed so that one end thereof is arranged outside a region confronting a pressure producing chamber at a region confronting a reservoir chamber; and an ink supply constricted port is arranged at a portion of the ink supply communication path, the portion being remotest from the pressure producing chamber. Since the pressure producing chamber is connected to the ink supply constricted port through the elongated ink supply communication path, a jet flow from the ink supply constricted port grows into a large flow along the ink supply communication path, which in turn allows air bubbles susceptible to stagnation in the vicinity of the ink supply constricted port to be discharged by such large flow.

摘要翻译： 形成供墨连通路径，使其一端配置在面对储存室的区域的与压力产生室相对的区域的外侧; 在供墨连通路径的一部分设置供墨收缩口，该部分与压力产生室最远。 由于压力产生室通过细长的供墨连通路径连接到供墨收缩端口，所以来自供墨收缩端口的喷射流沿着供墨连通路径增长成大流量，这又允许气泡易受 由于这样大的流量，墨水供应收缩口附近的滞留被排出。

公开(公告)号：US06309057B1

公开(公告)日：2001-10-30

申请号：US09235401

申请日：1999-01-22

申请人： Atsushi Kobayashi ,  Tatsuo Furuta ,  Fumiyuki Kanai ,  Shinri Sakai ,  Hiroshi Hosokawa

发明人： Atsushi Kobayashi ,  Tatsuo Furuta ,  Fumiyuki Kanai ,  Shinri Sakai ,  Hiroshi Hosokawa

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14419

摘要： In an ink-jet type recording head including a nozzle plate provided with nozzle openings, a spacer provided with partitions for partitioning pressure generating chambers, ink supply ports and reservoirs, and a plate member sandwiched and fixed together. Displacement of the plate member is produced by piezoelectric vibrators to thereby generate ink droplets. The spacer is formed by anisotropic etching of a silicon single crystal substrate so that the pressure generating chambers, the ink supply ports and the reservoirs are formed as through-holes communicated with each other. Accordingly, etching conditions for the respective through-holes are made equal to each other. Particularly, through-holes small in sectional area such as the pressure generating chambers and the ink supply ports can be formed with a high accuracy.

摘要翻译： 在包括具有喷嘴开口的喷嘴板的喷墨型记录头中，设置有用于分隔压力产生室，供墨口和储存器的隔板的间隔件和夹在其中并固定在一起的板构件。 板构件的位移由压电振动器产生，从而产生墨滴。 通过硅单晶基板的各向异性蚀刻形成间隔物，使得压力发生室，供墨口和储存器形成为彼此连通的通孔。 因此，使各个通孔的蚀刻条件相等。 特别地，可以高精度地形成诸如压力发生室和供墨口的截面积小的通孔。

公开(公告)号：US5896150A

公开(公告)日：1999-04-20

申请号：US156909

申请日：1993-11-24

申请人： Atsushi Kobayashi ,  Tatsuo Furuta ,  Fumiyuki Kanai ,  Shinri Sakai ,  Hiroshi Hosokawa

发明人： Atsushi Kobayashi ,  Tatsuo Furuta ,  Fumiyuki Kanai ,  Shinri Sakai ,  Hiroshi Hosokawa

IPC分类号： B41J2/16 ,  B41J2/045 ,  B41J2/04

CPC分类号： B41J2/1629 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14419

摘要： In an ink-jet type recording head including a nozzle plate provided with nozzle openings, a spacer provided with partitions for partitioning pressure generating chambers, ink supply ports and reservoirs, and a plate member sandwiched and fixed together. Displacement of the plate member is produced by piezoelectric vibrators to thereby generate ink droplets. The spacer is formed by anisotropic etching of a silicon single crystal substrate so that the pressure generating chambers, the ink supply ports and the reservoirs are formed as through-holes communicated with each other. Accordingly, etching conditions for the respective through-holes are made equal to each other. In different embodiments, the spacer includes chamfered portions or a plurality of fine planes and steps along which adhesive spreads during assembly of the head. In a further embodiment, the spacer includes different length partitions are between the pressure generating chambers.

摘要翻译： 在包括具有喷嘴开口的喷嘴板的喷墨型记录头中，设置有用于分隔压力产生室，供墨口和储存器的隔板的间隔件和夹在其中并固定在一起的板构件。 板构件的位移由压电振动器产生，从而产生墨滴。 通过硅单晶基板的各向异性蚀刻形成间隔物，使得压力发生室，供墨口和储存器形成为彼此连通的通孔。 因此，使各个通孔的蚀刻条件相等。 在不同的实施例中，间隔件包括倒角部分或多个精细平面和台阶，在组装头部期间粘合剂沿着该平面和台阶延伸。 在另一个实施例中，间隔件包括在压力产生室之间的不同长度的隔板。

公开(公告)号：US5424769A

公开(公告)日：1995-06-13

申请号：US70903

申请日：1993-06-04

申请人： Shinri Sakai ,  Atsushi Kobayashi ,  Takahiro Naka ,  Shuji Yonekubo ,  Toyohiko Mitsuzawa ,  Satoshi Shinada

发明人： Shinri Sakai ,  Atsushi Kobayashi ,  Takahiro Naka ,  Shuji Yonekubo ,  Toyohiko Mitsuzawa ,  Satoshi Shinada

IPC分类号： B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1623 ,  B41J2/1612 ,  B41J2/1618 ,  B41J2/1625 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2002/14379 ,  B41J2002/14387

摘要： An ink jet recording head having a spacer including a pressure generating chamber, a reservoir, and an ink supply port connecting them, a nozzle plate, hermetically fixed on a first side of the spacer, for generating ink droplets when receiving an ink pressure from the pressure generating chamber, a vibrating plate, hermetically fixed on a second side of the spacer, for pressing the pressure generating chamber, and piezoelectric vibrators for pressing the vibrating plate, wherein the vibrating plate has thin portions each occupying a large area so that the compliance of a regional area closer to the nozzle openings is larger than a regional area closer to the ink supply port.

摘要翻译： 一种喷墨记录头，其具有包括压力产生室，储存器和连接它们的供墨口的间隔件，气密地固定在间隔件的第一侧上的喷嘴板，用于当从所述间隔件的第一侧接收墨水压力时产生墨滴 压力发生室，气密地固定在间隔件的第二侧上的用于按压压力发生室的振动板，以及用于按压振动板的压电振动器，其中振动板具有薄的部分，每个占据大面积，使得柔性 更靠近喷嘴开口的区域区域大于靠近供墨口的区域区域。

公开(公告)号：US08188465B2

公开(公告)日：2012-05-29

申请号：US12858081

申请日：2010-08-17

申请人： Takeo Kawase ,  Shinri Sakai

发明人： Takeo Kawase ,  Shinri Sakai

IPC分类号： H01L51/00

CPC分类号： H01L51/0022

摘要： A method of manufacturing a semiconductor device includes: forming a plurality of regions extending in a predetermined direction on a substrate; and ejecting a liquid material on the plurality of regions to form an electrically conductive film, wherein the electrically conductive film extends in the same direction as the plurality of regions so as to overlap the plurality of regions.

摘要翻译： 一种制造半导体器件的方法包括：在基板上形成沿预定方向延伸的多个区域; 以及在所述多个区域喷射液体材料以形成导电膜，其中所述导电膜沿与所述多个区域相同的方向延伸以与所述多个区域重叠。

公开(公告)号：US20100308318A1

公开(公告)日：2010-12-09

申请号：US12858081

申请日：2010-08-17

申请人： Takeo KAWASE ,  Shinri Sakai

发明人： Takeo KAWASE ,  Shinri Sakai

IPC分类号： H01L51/10

CPC分类号： H01L51/0022

摘要： A method of manufacturing a semiconductor device includes: forming a plurality of regions extending in a predetermined direction on a substrate; and ejecting a liquid material on the plurality of regions to form an electrically conductive film, wherein the electrically conductive film extends in the same direction as the plurality of regions so as to overlap the plurality of regions.

摘要翻译： 一种制造半导体器件的方法包括：在基板上形成沿预定方向延伸的多个区域; 以及在所述多个区域喷射液体材料以形成导电膜，其中所述导电膜沿与所述多个区域相同的方向延伸以与所述多个区域重叠。

公开(公告)号：US07678411B2

公开(公告)日：2010-03-16

申请号：US11206802

申请日：2005-08-19

申请人： Toshimitsu Hirai ,  Shinri Sakai

发明人： Toshimitsu Hirai ,  Shinri Sakai

IPC分类号： B05D5/12

CPC分类号： H01L51/0022 ,  C23C24/00 ,  H01L51/055 ,  H05K3/125 ,  H05K2201/09727 ,  H05K2201/09909 ,  H05K2203/013

摘要： The invention provides a method of forming a wiring pattern in which a conductive material layer is formed in a pattern formation region having a first region, which is bordered by a bank pattern and has a first width, and a second region, which touches the first region and has a second width smaller than the first width, on a substrate, by discharging a droplet of a conductive material in a liquid phase using a droplet discharge device. The method includes forming the conductive material layer to cover the first region and the second region, by discharging the droplet having a diameter smaller than the first width and greater than the second width toward the first region. In this case, the droplet is discharged such that the droplet lands at a position that faces a boundary line between the first region and the second region.

摘要翻译： 本发明提供一种形成布线图案的方法，其中在具有第一区域的图案形成区域中形成导电材料层，所述第一区域由堤形图案界定并具有第一宽度，第二区域与第一区域接触， 并且在基板上通过使用液滴喷射装置以液相排出导电材料的液滴而具有小于第一宽度的第二宽度。 该方法包括通过将具有小于第一宽度的直径小于第二宽度的墨滴排出第一区域，形成覆盖第一区域和第二区域的导电材料层。 在这种情况下，液滴被排出，使得液滴在面对第一区域和第二区域之间的边界线的位置处着落。

公开(公告)号：US07667232B2

公开(公告)日：2010-02-23

申请号：US11223015

申请日：2005-09-12

申请人： Toshimitsu Hirai ,  Shinri Sakai

发明人： Toshimitsu Hirai ,  Shinri Sakai

IPC分类号： H01L29/04 ,  H01L21/00

CPC分类号： H01L27/12 ,  H01L27/1292 ,  H01L27/3211 ,  H01L27/3244 ,  H01L27/3295 ,  H01L2224/18 ,  H05K3/1241

摘要： A bank structure in which a recess corresponding to a pattern formed of a functional liquid is provided includes first recess provided corresponding to a first pattern, and a second recess provided on part of the first recess and corresponding to a second pattern. The second recess has a shape that has a width larger than a width of the first recess and has a circular arc in at least part of an outer circumference of the second recess.

摘要翻译： 设置有与由功能性液体形成的图案相对应的凹部的堤结构包括与第一图案对应地设置的第一凹部和设置在第一凹部的一部分上并对应于第二图案的第二凹部。 第二凹部具有宽度大于第一凹部的宽度的形状，并且在第二凹部的外周的至少一部分中具有圆弧。