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31 条记录 (耗时 0.024 秒)

    Resist compositions
    2.
    发明授权
    Resist compositions 失效
    抗蚀剂组合物

    公开(公告)号：US5352564A

    公开(公告)日：1994-10-04

    申请号：US184171

    申请日：1994-01-19

    申请人： Yoshihumi Takeda ,  Toshinobu Ishihara ,  Ken'ichi Itoh ,  Kazumasa Maruyama

    发明人： Yoshihumi Takeda ,  Toshinobu Ishihara ,  Ken'ichi Itoh ,  Kazumasa Maruyama

    IPC分类号： G03F7/039 ,  G03F7/075 ,  G03C1/492

    CPC分类号： G03F7/0758 ,  G03F7/039 ,  Y10S430/11

    摘要： A resist composition comprising a base resin, an acid release agent, and a dissolution inhibitor is improved in sensitivity and resolution when the base resin is typically selected from poly-t-butoxystyrene/poly-hydroxystyrene, poly-t-butoxystyrene/poly-p-methoxymethoxystyrene/polyhydroxystyrene, and poly-t-butoxystyrene/poly-p-methoxystyrene/polyhydroxystyrene copolymers. The composition forms a resist useful for the manufacture of LSI.

    摘要翻译： 当基础树脂通常选自聚 - 丁氧基苯乙烯/聚 - 羟基苯乙烯，聚-t-丁氧基苯乙烯/多聚磷酸酯时，包含基础树脂，酸脱模剂和溶解抑制剂的抗蚀剂组合物的灵敏度和分辨率提高 聚甲氧基苯乙烯/聚羟基苯乙烯和聚-t-丁氧基苯乙烯/聚对甲氧基苯乙烯/聚羟基苯乙烯共聚物。 该组合物形成用于制造LSI的抗蚀剂。

    Method for preparing partially tert-butoxylated poly(p-hydroxystyrene)
    5.
    发明授权
    Method for preparing partially tert-butoxylated poly(p-hydroxystyrene) 失效
    部分叔丁氧基化聚（对羟基苯乙烯）

    公开(公告)号：US5580936A

    公开(公告)日：1996-12-03

    申请号：US536119

    申请日：1995-09-29

    申请人： Junji Tsuchiya ,  Katsuya Takemura ,  Osamu Watanabe ,  Yoshihumi Takeda ,  Toshinobu Ishihara

    发明人： Junji Tsuchiya ,  Katsuya Takemura ,  Osamu Watanabe ,  Yoshihumi Takeda ,  Toshinobu Ishihara

    IPC分类号： C08F8/00 ,  C08F8/14 ,  C08F12/00 ,  C08F212/14 ,  G03F7/027

    CPC分类号： C08F8/12 ,  C08F2800/20

    摘要： A partially tert-butoxylated poly(p-hydroxystyrene) is prepared by subjecting poly(p-tert-butoxystyrene) to reaction of eliminating some of the tert-butoxy groups in an organic solvent at a temperature of 30.degree.-100.degree. C. in the presence of an acid catalyst at a molar ratio of acid catalyst/t-BuO group of from 0.050 to 2.0. During the elimination reaction, a change of solubility of the resulting partially tert-butoxylated poly(p-hydroxystyrene) is determined to calculate a degree of elimination of tert-butoxy groups. The reaction is terminated when a desired degree of elimination is reached. Through a simple process, partially tert-butoxylated poly(p-hydroxystyrene) having a well controlled t-BuO content is produced in high yields.

    摘要翻译： 通过使聚（对叔丁氧基苯乙烯）在有机溶剂中在30℃-100℃的温度下除去一些叔丁氧基进行反应来制备部分叔丁氧基化的聚（对羟基苯乙烯） 酸催化剂/ t-BuO基团的摩尔比为0.050至2.0的酸催化剂的存在。 在消除反应期间，测定所得部分叔丁氧基化聚（对羟基苯乙烯）的溶解度的变化，以计算叔丁氧基的消除程度。 当达到所需的消除程度时，终止反应。 通过简单的方法，产生具有良好控制的t-BuO含量的部分叔丁氧基化聚（对羟基苯乙烯），产率高。

    Precursor composition of silicon carbide
    7.
    发明授权
    Precursor composition of silicon carbide 失效
    前体组成的碳化硅

    公开(公告)号：US4657991A

    公开(公告)日：1987-04-14

    申请号：US787328

    申请日：1985-10-15

    申请人： Minoru Takamizawa ,  Taishi Kobayashi ,  Toshinobu Ishihara ,  Yoshihumi Takeda ,  Akira Hayashida

    发明人： Minoru Takamizawa ,  Taishi Kobayashi ,  Toshinobu Ishihara ,  Yoshihumi Takeda ,  Akira Hayashida

    IPC分类号： C08L83/00 ,  C04B35/571 ,  C08G79/00 ,  C08L83/02 ,  C08L83/16 ,  D01F9/10 ,  C08F283/00

    CPC分类号： C08G79/00 ,  C04B35/571 ,  C08L83/16

    摘要： The precursor composition of silicon carbide fibers provided by the invention has greatly improved spinnability and can be spun at a very high spinning velocity to give a green filament which has a much larger tensile strength than those of conventional precursor materials and is capable of giving silicon carbide fibers having increased tensile strength by the infusibilization and calcination of the green filament of the composition under tension. The composition comprises from 80 to 99.9 parts by weight of a polycarbosilane polymer and from 20 to 0.01 part by weight of a silmethylene polymer having a degree of polymerization larger than the specified lower limit.

    摘要翻译： 由本发明提供的碳化硅纤维的前体组合物大大提高了可纺性，并且可以以非常高的纺丝速度纺丝，得到具有比常规前体材料高的拉伸强度的绿色长丝，并且能够提供碳化硅 纤维通过在张力下的组合物的绿色细丝的不熔化和煅烧而具有增加的拉伸强度。 该组合物包含80-99.9重量份的聚碳硅烷聚合物和20至0.01重量份具有大于规定下限的聚合度的硅亚甲基聚合物。