公开(公告)号：US06595065B2

公开(公告)日：2003-07-22

申请号：US09492605

申请日：2000-01-27

申请人： Yukihiko Tanizawa ,  Kazuaki Hamamoto ,  Inao Toyoda ,  Hiroaki Tanaka ,  Yasutoshi Suzuki

发明人： Yukihiko Tanizawa ,  Kazuaki Hamamoto ,  Inao Toyoda ,  Hiroaki Tanaka ,  Yasutoshi Suzuki

IPC分类号： G01L904

CPC分类号： G01L9/0055

摘要： A pressure detecting apparatus has a single-crystal semiconductor sensor chip disposed on a metallic diaphragm through a low melting point glass. The sensor chip has a planar shape selected from a circular shape, a first polygonal shape having more than five sides and having interior angles all less than 180°, and a second polygonal shape having a ratio of a circumscribed circle diameter relative to an inscribed circle diameter being less than 1.2. Four strain gauge resistors are disposed on X, Y axes passing through a center point O of the sensor chip in parallel with directions. Accordingly, thermal stress is reduced not to adversely affect a detection error and simultaneously high sensitivity is provided.

摘要翻译： 压力检测装置具有通过低熔点玻璃设置在金属隔膜上的单晶半导体传感器芯片。 传感器芯片具有选自圆形，多于五边的第一多边形和内角全部小于180°的平面形状，以及具有相对于内切圆的外接圆直径的比率的第二多边形 直径小于1.2。 四个应变计电阻器设置在X，Y轴上，与<110>方向平行地穿过传感器芯片的中心点O。 因此，热应力降低，不会不利地影响检测误差，同时提供高灵敏度。

公开(公告)号：US06870086B2

公开(公告)日：2005-03-22

申请号：US10164603

申请日：2002-06-10

申请人： Kazuaki Hamamoto ,  Takahiko Yoshida ,  Yasutoshi Suzuki ,  Inao Toyoda

发明人： Kazuaki Hamamoto ,  Takahiko Yoshida ,  Yasutoshi Suzuki ,  Inao Toyoda

IPC分类号： G01J5/12 ,  H01L35/34 ,  H01L35/28 ,  B05D5/12

CPC分类号： H01L35/34 ,  G01J5/12

摘要： In a thermo pile infrared ray sensor, an opening portion is formed by etching a substrate from a second surface after an n-type poly-Si layer and a thin aluminium layer are formed so that first and second connection portions are formed by parts thereof. An infrared ray absorbent layer is formed on the substrate to cover the first connection portion with a screen print after the opening portion is formed.

摘要翻译： 在热桩红外线传感器中，在形成n型多晶硅层和薄铝层之后，通过从第二表面蚀刻衬底形成开口部分，使得第一和第二连接部分由其部分形成。 在形成开口部之后，在基板上形成有用于将丝网印刷物覆盖在第一连接部上的红外线吸收层。

公开(公告)号：US06777961B2

公开(公告)日：2004-08-17

申请号：US10144733

申请日：2002-05-15

申请人： Kazuaki Hamamoto ,  Inao Toyoda

发明人： Kazuaki Hamamoto ,  Inao Toyoda

IPC分类号： G01R2708

CPC分类号： G01J5/12 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48472 ,  H01L2924/00014 ,  H01L2924/00

摘要： A sensor has a series circuit, which includes first and second end terminals, a set of thermocouples electrically connected in series between the first end terminal and the second end terminal, and electrical inspection terminals, which extend from corresponding intermediate points in the series circuit between the first end terminal and the second end terminal to divide the set of thermocouples into smaller groups of thermocouples. A resistance value of each group of thermocouples is measured through adjacent two of the first and second end terminals and the electrical inspection terminals while the sensor is in a wafer state. Whether the thermopile infrared sensor is normal is determined based on the measured resistance value of each group of thermocouples.

摘要翻译： 传感器具有串联电路，其包括第一端子和第二端子，串联电连接在第一端子端子和第二端子端子之间的一组热电偶，以及电气检查端子，其从串联电路中的相应中间点延伸到 第一端子和第二端子端子将热电偶组分成较小的热电偶组。 当传感器处于晶片状态时，通过相邻的第一端子和第二端子端子以及电气检查端子来测量每组热电偶的电阻值。 基于每组热电偶的测量电阻值来确定热电堆红外传感器是否正常。

公开(公告)号：US06742387B2

公开(公告)日：2004-06-01

申请号：US10298537

申请日：2002-11-19

申请人： Kazuaki Hamamoto ,  Inao Toyoda

发明人： Kazuaki Hamamoto ,  Inao Toyoda

IPC分类号： G01N2720

CPC分类号： G01N19/10

摘要： A capacitive humidity sensor includes a pair of opposed electrodes on a substrate. A humidity-sensitive film covers the electrodes. The electrodes are comb-shaped and interdigitated. Humidity is detected based on the capacitance between the pair of electrodes, which changes with changes according to the humidity in the atmosphere. The uniform width of each tooth in the pair of electrodes is L1, and the uniform distance between a tooth of one of the electrodes and a tooth of the other electrode is L2. When L1 is less than 3 micrometers, L2 is 5 micrometers. When L1 is greater than or equal to 3 micrometers, L2 is less than or equal to 5 micrometers.

摘要翻译： 电容式湿度传感器包括在基板上的一对相对的电极。 湿敏膜覆盖电极。 电极是梳状和叉指。 基于一对电极之间的电容检测湿度，其随着大气中的湿度的变化而变化。 一对电极中的每个齿的均匀宽度为L1，电极之一的齿与另一电极的齿之间的均匀距离为L2。 当L1小于3微米时，L2为5微米。 当L1大于或等于3微米时，L2小于或等于5微米。

公开(公告)号：US06476455B2

公开(公告)日：2002-11-05

申请号：US09983109

申请日：2001-10-23

申请人： Inao Toyoda ,  Kazuaki Hamamoto

发明人： Inao Toyoda ,  Kazuaki Hamamoto

IPC分类号： H01L310232

CPC分类号： G01J5/10 ,  G01J5/12

摘要： An infrared sensor includes a concavity made on a side of a semiconductor substrate and a plurality of sensing areas formed in a thin film area on the back side of the bottom of the concavity. Groups of two thermocouples, three thermocouples and four thermocouples reside in a sensing area in the central part of the thin film area, in another sensing area adjacent the central sensing area and in yet other sensing areas adjacent to the central sensing area, respectively, to compensate for the heterogeneity of heat transfer in the thin film area. Therefore, sensitivity loss is suppressed in the sensing area having a boundary with the substrate. More specifically, the difference in sensitivity between the sensing areas is reduced.

公开(公告)号：US06998612B2

公开(公告)日：2006-02-14

申请号：US10653067

申请日：2003-09-03

申请人： Kazuaki Hamamoto ,  Inao Toyoda

发明人： Kazuaki Hamamoto ,  Inao Toyoda

IPC分类号： G01J5/00

CPC分类号： G01J5/12

摘要： A sensor includes a detector for detecting physical quantity, a membrane, and a stress relaxation area. A stress is expected to concentrate in the stress relaxation area in a case of manufacturing process of the sensor or a case of operating the sensor. The detector is disposed on the membrane except for the stress relaxation area.

摘要翻译： 传感器包括用于检测物理量的检测器，膜和应力松弛区域。 在传感器的制造过程或操作传感器的情况下，应力应力集中在应力松弛区域中。 除了应力松弛区域之外，检测器设置在膜上。

公开(公告)号：US06653702B2

公开(公告)日：2003-11-25

申请号：US09866752

申请日：2001-05-30

申请人： Seiichiro Ishio ,  Inao Toyoda ,  Kazuaki Hamamoto ,  Yasutoshi Suzuki

发明人： Seiichiro Ishio ,  Inao Toyoda ,  Kazuaki Hamamoto ,  Yasutoshi Suzuki

IPC分类号： H01L2982

CPC分类号： H01L27/1203 ,  B81B2201/0264 ,  B81C1/00246 ,  B81C2203/0778 ,  G01L9/0054 ,  G01L9/06 ,  H01L21/84

摘要： A semiconductor pressure sensor includes a SOI substrate composed of first and second silicon substrates. A diaphragm portion is formed by the first silicon substrate as a bottom of a recess portion formed in the second silicon substrate. Strain gauges are formed on the diaphragm portion, and a circuit portion is formed on the first silicon substrate at a region other than the diaphragm portion. A LOCOS film for isolating the strain gauges from the circuit portion is formed on the first silicon substrate outside the outermost peripheral portion of the diaphragm portion.

摘要翻译： 半导体压力传感器包括由第一和第二硅衬底构成的SOI衬底。 隔膜部分由第一硅衬底形成为形成在第二硅衬底中的凹部的底部。 应变计形成在隔膜部分上，并且电路部分在隔膜部分以外的区域形成在第一硅衬底上。 在隔膜部分的最外周部分的外侧的第一硅基板上形成用于将应变计与电路部分隔离的LOCOS膜。

公开(公告)号：US07032448B2

公开(公告)日：2006-04-25

申请号：US10797117

申请日：2004-03-11

申请人： Kazuaki Hamamoto

发明人： Kazuaki Hamamoto

IPC分类号： G01N27/22 ,  G01R27/26

CPC分类号： G01N27/225

摘要： A capacitive humidity sensor includes a detection portion and a reference portion. The detection portion includes detection electrodes and a moisture sensitive film. The reference portion includes reference electrodes and a moisture permeation film as a capacitance adjusting film. The capacitive humidity sensor detects humidity by converting a capacitance difference between a capacitance of the detection electrodes and a capacitance of the reference electrodes to an electric signal by using a capacitance-voltage conversion circuit. The moisture permeation film reduces offset voltage of the capacitive humidity sensor. Thus, an offset compensation circuit or the like is not required.

摘要翻译： 电容式湿度传感器包括检测部和参考部。 检测部分包括检测电极和湿敏膜。 参考部分包括参考电极和作为电容调整膜的透湿膜。 电容式湿度传感器通过使用电容电压转换电路将检测电极的电容和参考电极的电容之间的电容差转换为电信号来检测湿度。 透湿膜降低电容式湿度传感器的偏移电压。 因此，不需要偏移补偿电路等。

公开(公告)号：US07095064B2

公开(公告)日：2006-08-22

申请号：US10809343

申请日：2004-03-26

申请人： Kazuaki Hamamoto

发明人： Kazuaki Hamamoto

IPC分类号： H01L29/82

CPC分类号： B81B7/0029 ,  B81B2201/0292 ,  B81B2203/0127

摘要： In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by the expansion or contraction of a fluid within a hollow part formed under the membrane while the sensor is in use is prevented. A semiconductor sensor 10 comprising a substrate 30 and a membrane 20 formed on the top surface thereof, in which the bottom of the substrate 30 and a mounting surface 50 on which the sensor 10 is mounted are bonded, has pressure difference adjusting means 22a to 22c for eliminating the difference in pressure of a fluid between an inside and an outside of a hollow part 34 while the sensor is in use.

摘要翻译： 在具有膜结构的半导体传感器中，防止了在传感器使用时在膜下方形成的中空部内的流体的膨胀或收缩引起的膜的破坏。 半导体传感器10包括基板30和形成在其顶表面上的膜20，其中基板30的底部和安装有传感器10的安装表面50接合，具有压力差调节装置22A至 22c，用于消除传感器在使用中的中空部34的内部和外部之间的流体的压力差。

公开(公告)号：US07005643B2

公开(公告)日：2006-02-28

申请号：US10811873

申请日：2004-03-30

申请人： Kazuaki Hamamoto

发明人： Kazuaki Hamamoto

IPC分类号： G01J5/02

CPC分类号： B81C3/001 ,  G01J5/10

摘要： An infrared sensor formed as a membrane on a substrate and detecting infrared rays by an infrared detector on that membrane, wherein even if an adhesive used for mounting the infrared sensor on a mounting surface creeps up to the membrane, it is made possible to prevent a drop in the sensor sensitivity by mounting the infrared sensor on a mounting surface by an adhesive having a heat conductivity of not more than seven times the heat conductivity of a fluid present in the inner cavity below the membrane.

摘要翻译： 一种红外传感器，其形成为基板上的膜并通过该膜上的红外检测器检测红外线，其中即使用于将安装红外传感器的粘合剂安装在膜上也可以防止 通过将导热率不超过存在于膜下方的内腔中的流体的热导率的7倍的粘合剂将红外传感器安装在安装表面上来降低传感器灵敏度。