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24 条记录 (耗时 0.026 秒)

    Surface-treatment method and equipment
    1.
    发明授权
    Surface-treatment method and equipment 失效
    表面处理方法和设备

    公开(公告)号：US07459187B2

    公开(公告)日：2008-12-02

    申请号：US10577235

    申请日：2004-10-27

    申请人： Kazushi Hayashi ,  Toshihiro Kugimiya ,  Takashi Kobori ,  Junichi Ebisawa ,  Kazuo Sato ,  Yukio Yoshikawa

    发明人： Kazushi Hayashi ,  Toshihiro Kugimiya ,  Takashi Kobori ,  Junichi Ebisawa ,  Kazuo Sato ,  Yukio Yoshikawa

    IPC分类号： H05H1/24

    CPC分类号： H01J37/32449 ,  C23C16/45589 ,  H01J37/3244 ,  H01L21/02164 ,  H01L21/02186 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/31612 ,  H01L21/67017

    摘要： An object of the present invention is to make it possible to uniformly supply of a gas onto a base material in a way simpler and lower in cost, and thus, to realize a high-quality surface treatment. For that purpose, in surface treatment of a base material (12) by supplying a surface-treating gas on the surface of the base material (12) while conveying it in a particular direction, the peripheral surface of a rotor having a cylindrical peripheral surface (24) is made to face, via a gap (23), the surface of the base material (12) or an opposing member (20) formed at a position separated from the base material and the rotor is rotated around the axis in the direction almost perpendicular to the base material (12)-conveying direction, as the means for supplying the surface-treating gas. By the rotation, the surface-treating gas is dragged in by the peripheral surface of the rotor (24), guided into the gap (23), and then, fed from the gap (23) onto the surface of the base material (12).

    摘要翻译： 本发明的目的是使得可以以更简单和更低成本的方式将气体均匀地供应到基材上，从而实现高质量的表面处理。 为此，通过在基材12的表面上沿特定方向供给表面处理气体来对基材12进行表面处理，转子的圆周表面具有圆筒形周面 （24）经由间隙（23）面对，形成在与基材分离的位置处的基材（12）或相对构件（20）的表面，并且转子围绕轴线旋转 作为供给表面处理气体的装置，几乎垂直于基材（12） - 输送方向的方向。 通过旋转，表面处理气体被转子（24）的外周表面拖动，被引导到间隙（23）中，然后从间隙（23）进给到基体材料（12）的表面上 ）。

    Surface-treatment method and equipment
    2.
    发明申请
    Surface-treatment method and equipment 失效
    表面处理方法和设备

    公开(公告)号：US20070134414A1

    公开(公告)日：2007-06-14

    申请号：US10577235

    申请日：2004-10-27

    申请人： Kazushi Hayashi ,  Toshihiro Kugimiya ,  Takashi Kobori ,  Junichi Ebisawa ,  Kazuo Sato ,  Yukio Yoshikawa

    发明人： Kazushi Hayashi ,  Toshihiro Kugimiya ,  Takashi Kobori ,  Junichi Ebisawa ,  Kazuo Sato ,  Yukio Yoshikawa

    IPC分类号： C23C16/00 ,  H05H1/24

    CPC分类号： H01J37/32449 ,  C23C16/45589 ,  H01J37/3244 ,  H01L21/02164 ,  H01L21/02186 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/31612 ,  H01L21/67017

    摘要： An object of the present invention is to make it possible to uniformly supply of a gas onto a base material in a way simpler and lower in cost, and thus, to realize a high-quality surface treatment. For that purpose, in surface treatment of a base material (12) by supplying a surface-treating gas on the surface of the base material (12) while conveying it in a particular direction, the peripheral surface of a rotor having a cylindrical peripheral surface (24) is made to face, via a gap (23), the surface of the base material (12) or an opposing member (20) formed at a position separated from the base material and the rotor is rotated around the axis in the direction almost perpendicular to the base material (12)-conveying direction, as the means for supplying the surface-treating gas. By the rotation, the surface-treating gas is dragged in by the peripheral surface of the rotor (24), guided into the gap (23), and then, fed from the gap (23) onto the surface of the base material (12).

    摘要翻译： 本发明的目的是使得可以以更简单和更低成本的方式将气体均匀地供应到基材上，从而实现高质量的表面处理。 为此，通过在基材12的表面上沿特定方向供给表面处理气体来对基材12进行表面处理，转子的圆周表面具有圆筒形周面 （24）经由间隙（23）面对，形成在与基材分离的位置处的基材（12）或相对构件（20）的表面，并且转子围绕轴线旋转 作为供给表面处理气体的装置，几乎垂直于基材（12） - 输送方向的方向。 通过旋转，表面处理气体被转子（24）的外周表面拖动，被引导到间隙（23）中，然后从间隙（23）进给到基体材料（12）的表面上 ）。