INSPECTION APPARATUS, INSPECTION SYSTEM, AND INSPECTION METHOD

    公开(公告)号:US20220099587A1

    公开(公告)日:2022-03-31

    申请号:US17467957

    申请日:2021-09-07

    IPC分类号: G01N21/88

    摘要: An inspection apparatus includes a projector to irradiate an inspection target with light according to pattern image data associated with the inspection target, and an imaging device to capture an image of the inspection target being irradiated with the light from the projector and output image data of the captured image. The pattern image data specifies a pattern of light irradiation of the inspection target.