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    Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing
    3.
    发明授权
    Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing 有权
    用于区分多个激光束的反射用于半导体结构处理的校准的系统和方法

    公开(公告)号：US08110775B2

    公开(公告)日：2012-02-07

    申请号：US11499394

    申请日：2006-08-03

    申请人： Ho Wai Lo ,  David Martin Hemenway ,  Brady Nilsen ,  Kelly J. Bruland

    发明人： Ho Wai Lo ,  David Martin Hemenway ,  Brady Nilsen ,  Kelly J. Bruland

    IPC分类号： B23K26/04

    CPC分类号： H01L23/5258 ,  G11C17/14 ,  G11C17/143 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A system determines relative positions of a semiconductor substrate and a plurality of laser beam spots on or within the semiconductor substrate in a machine for selectively irradiating structures on or within the substrate using a plurality of laser beams. The system comprises a laser source, first and second laser beam propagation paths, first and second reflection sensors, and a processor. The laser source produces at least the first and second laser beams, which propagate toward the substrate along the first and second propagation paths, respectively, which have respective first and second axes that intersects the substrate at respective first and second spots. The reflection sensors are positioned to detect reflection of the spots, as the spots moves relative to the substrate, thereby generating reflection signals. The processor is configured to determine, based on the reflection signals, positions of the spots on or within the substrate.

    摘要翻译： 系统确定半导体衬底和机器中半导体衬底上或半导体衬底内的多个激光束点的相对位置，用于使用多个激光束选择性地照射衬底上或衬底内的结构。 该系统包括激光源，第一和第二激光束传播路径，第一和第二反射传感器以及处理器。 激光源至少产生第一和第二激光束，其分别沿着第一和第二传播路径朝着衬底传播，其具有在相应的第一和第二点处与衬底相交的相应的第一和第二轴。 反射传感器被定位成检测点的反射，因为光点相对于基板移动，从而产生反射信号。 处理器被配置为基于反射信号确定基板上或内部的斑点的位置。

    Photonic clock stabilized laser comb processing
    4.
    发明授权
    Photonic clock stabilized laser comb processing 失效
    光子时钟稳定激光梳状加工

    公开(公告)号：US07982160B2

    公开(公告)日：2011-07-19

    申请号：US12060199

    申请日：2008-03-31

    申请人： Brian W. Baird ,  Kelly J. Bruland ,  Clint Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    发明人： Brian W. Baird ,  Kelly J. Bruland ,  Clint Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    IPC分类号： B23K26/36 ,  H01L21/768 ,  H01L21/77

    CPC分类号： H01S3/0007 ,  B23K26/042 ,  B23K26/0622 ,  B23K26/0853

    摘要： Processing a workpiece with a laser includes generating laser pulses at a first pulse repetition frequency. The first pulse repetition frequency provides reference timing for coordination of a beam positioning system and one or more cooperating beam position compensation elements to align beam delivery coordinates relative to the workpiece. The method also includes, at a second pulse repetition frequency that is lower than the first pulse repetition frequency, selectively amplifying a subset of the laser pulses. The selection of the laser pulses included in the subset is based on the first pulse repetition frequency and position data received from the beam positioning system. The method further includes adjusting the beam delivery coordinates using the one or more cooperating beam position compensation elements so as to direct the amplified laser pulses to selected targets on the workpiece.

    摘要翻译： 用激光加工工件包括以第一脉冲重复频率产生激光脉冲。 第一脉冲重复频率提供用于协调光束定位系统和一个或多个配合光束位置补偿元件的参考定时，以相对于工件对准光束传送坐标。 该方法还包括在低于第一脉冲重复频率的第二脉冲重复频率下，选择性地放大激光脉冲的子集。 包括在子集中的激光脉冲的选择基于从波束定位系统接收的第一脉冲重复频率和位置数据。 该方法还包括使用一个或多个配合光束位置补偿元件来调整光束传送坐标，以便将放大的激光脉冲引导到工件上的选定目标。

    Photonic clock stabilized laser comb processing
    6.
    发明授权
    Photonic clock stabilized laser comb processing 失效
    光子时钟稳定激光梳状加工

    公开(公告)号：US08358671B2

    公开(公告)日：2013-01-22

    申请号：US13186323

    申请日：2011-07-19

    申请人： Brian W. Baird ,  Kelly J. Bruland ,  Clint R. Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    发明人： Brian W. Baird ,  Kelly J. Bruland ,  Clint R. Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    IPC分类号： H01S3/10 ,  B23K26/00

    CPC分类号： H01S3/0007 ,  B23K26/042 ,  B23K26/0622 ,  B23K26/0853

    摘要： Processing a workpiece with a laser includes generating laser pulses at a first pulse repetition frequency. The first pulse repetition frequency provides reference timing for coordination of a beam positioning system and one or more cooperating beam position compensation elements to align beam delivery coordinates relative to the workpiece. The method also includes, at a second pulse repetition frequency that is lower than the first pulse repetition frequency, selectively amplifying a subset of the laser pulses. The selection of the laser pulses included in the subset is based on the first pulse repetition frequency and position data received from the beam positioning system. The method further includes adjusting the beam delivery coordinates using the one or more cooperating beam position compensation elements so as to direct the amplified laser pulses to selected targets on the workpiece.

    摘要翻译： 用激光加工工件包括以第一脉冲重复频率产生激光脉冲。 第一脉冲重复频率提供用于协调光束定位系统和一个或多个配合光束位置补偿元件的参考定时，以相对于工件对准光束传送坐标。 该方法还包括在低于第一脉冲重复频率的第二脉冲重复频率下，选择性地放大激光脉冲的子集。 包括在子集中的激光脉冲的选择基于从波束定位系统接收的第一脉冲重复频率和位置数据。 该方法还包括使用一个或多个配合光束位置补偿元件来调整光束传送坐标，以便将放大的激光脉冲引导到工件上的选定目标。

    PHOTONIC CLOCK STABILIZED LASER COMB PROCESSING
    7.
    发明申请
    PHOTONIC CLOCK STABILIZED LASER COMB PROCESSING 失效
    光电时钟稳定激光加工

    公开(公告)号：US20110272388A1

    公开(公告)日：2011-11-10

    申请号：US13186323

    申请日：2011-07-19

    申请人： Brian W. Baird ,  Kelly J. Bruland ,  Clint R. Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    发明人： Brian W. Baird ,  Kelly J. Bruland ,  Clint R. Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    IPC分类号： B23K26/38

    CPC分类号： H01S3/0007 ,  B23K26/042 ,  B23K26/0622 ,  B23K26/0853

    摘要： Processing a workpiece with a laser includes generating laser pulses at a first pulse repetition frequency. The first pulse repetition frequency provides reference timing for coordination of a beam positioning system and one or more cooperating beam position compensation elements to align beam delivery coordinates relative to the workpiece. The method also includes, at a second pulse repetition frequency that is lower than the first pulse repetition frequency, selectively amplifying a subset of the laser pulses. The selection of the laser pulses included in the subset is based on the first pulse repetition frequency and position data received from the beam positioning system. The method further includes adjusting the beam delivery coordinates using the one or more cooperating beam position compensation elements so as to direct the amplified laser pulses to selected targets on the workpiece.

    摘要翻译： 用激光加工工件包括以第一脉冲重复频率产生激光脉冲。 第一脉冲重复频率提供用于协调光束定位系统和一个或多个配合光束位置补偿元件的参考定时，以相对于工件对准光束传送坐标。 该方法还包括在低于第一脉冲重复频率的第二脉冲重复频率下，选择性地放大激光脉冲的子集。 包括在子集中的激光脉冲的选择基于从波束定位系统接收的第一脉冲重复频率和位置数据。 该方法还包括使用一个或多个配合光束位置补偿元件来调整光束传送坐标，以便将放大的激光脉冲引导到工件上的选定目标。

    PHOTONIC CLOCK STABILIZED LASER COMB PROCESSING
    8.
    发明申请
    PHOTONIC CLOCK STABILIZED LASER COMB PROCESSING 失效
    光电时钟稳定激光加工

    公开(公告)号：US20090242531A1

    公开(公告)日：2009-10-01

    申请号：US12060199

    申请日：2008-03-31

    申请人： Brian W. Baird ,  Kelly J. Bruland ,  Clint R. Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    发明人： Brian W. Baird ,  Kelly J. Bruland ,  Clint R. Vandergiessen ,  Mark A. Unrath ,  Brady Nilsen ,  Steve Swaringen

    IPC分类号： B23K26/02 ,  B23K26/04 ,  B23K26/08 ,  G06F19/00

    CPC分类号： H01S3/0007 ,  B23K26/042 ,  B23K26/0622 ,  B23K26/0853

    摘要： Processing a workpiece with a laser includes generating laser pulses at a first pulse repetition frequency. The first pulse repetition frequency provides reference timing for coordination of a beam positioning system and one or more cooperating beam position compensation elements to align beam delivery coordinates relative to the workpiece. The method also includes, at a second pulse repetition frequency that is lower than the first pulse repetition frequency, selectively amplifying a subset of the laser pulses. The selection of the laser pulses included in the subset is based on the first pulse repetition frequency and position data received from the beam positioning system. The method further includes adjusting the beam delivery coordinates using the one or more cooperating beam position compensation elements so as to direct the amplified laser pulses to selected targets on the workpiece.

    摘要翻译： 用激光加工工件包括以第一脉冲重复频率产生激光脉冲。 第一脉冲重复频率提供用于协调光束定位系统和一个或多个配合光束位置补偿元件的参考定时，以相对于工件对准光束传送坐标。 该方法还包括在低于第一脉冲重复频率的第二脉冲重复频率下，选择性地放大激光脉冲的子集。 包括在子集中的激光脉冲的选择基于从波束定位系统接收的第一脉冲重复频率和位置数据。 该方法还包括使用一个或多个配合光束位置补偿元件来调整光束传送坐标，以便将放大的激光脉冲引导到工件上的选定目标。

    HIGH ENERGY PULSE SUPPRESSION METHOD
    9.
    发明申请
    HIGH ENERGY PULSE SUPPRESSION METHOD 有权
    高能量脉冲抑制方法

    公开(公告)号：US20100046561A1

    公开(公告)日：2010-02-25

    申请号：US12605989

    申请日：2009-10-26

    申请人： Keith Grant ,  Steve Stone ,  Brady Nilsen

    发明人： Keith Grant ,  Steve Stone ,  Brady Nilsen

    IPC分类号： H01S3/11 ,  H01S3/10

    CPC分类号： H01S3/117 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/0853 ,  B23K26/40 ,  B23K2101/36 ,  B23K2103/50 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10069 ,  H01S3/1024 ,  H01S3/1611 ,  H01S3/1673 ,  H05K3/0026 ,  H05K3/0038

    摘要： A laser processes a workpiece with laser pulses delivered at random time intervals and at substantially constant energy levels by characterizing the laser cavity discharge behavior and utilizing that information for adjusting dummy pulse time periods to compensate for the energy errors. Dummy pulses are laser pulses that are blocked from reaching a workpiece. A second way for providing constant pulse energies employs an AOM for varying amounts of laser energy passed to the workpiece. A third way of providing constant pulse energies entails extending the pulse period of selected pulses to allow additional laser cavity charging time whenever a dummy pulse is initiated.

    摘要翻译： 激光通过表征激光腔排放行为并利用该信息调整虚拟脉冲时间周期来补偿能量误差，以随机时间间隔和基本上恒定的能量级别递送的激光脉冲来处理工件。 虚拟脉冲是被阻止到达工件的激光脉冲。 提供恒定脉冲能量的第二种方法使用AOM来改变传递给工件的激光能量。 提供恒定脉冲能量的第三种方式需要延长所选脉冲的脉冲周期，以便每当启动虚拟脉冲时，允许额外的激光腔充电时间。

    Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing
    10.
    发明申请
    Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing 有权
    用于区分多个激光束的反射用于半导体结构处理的校准的系统和方法

    公开(公告)号：US20070008534A1

    公开(公告)日：2007-01-11

    申请号：US11499394

    申请日：2006-08-03

    申请人： Ho Lo ,  David Hemenway ,  Brady Nilsen ,  Kelly Bruland

    发明人： Ho Lo ,  David Hemenway ,  Brady Nilsen ,  Kelly Bruland

    IPC分类号： G01B11/00

    CPC分类号： H01L23/5258 ,  G11C17/14 ,  G11C17/143 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A system determines relative positions of a semiconductor substrate and a plurality of laser beam spots on or within the semiconductor substrate in a machine for selectively irradiating structures on or within the substrate using a plurality of laser beams. The system comprises a laser source, first and second laser beam propagation paths, first and second reflection sensors, and a processor. The laser source produces at least the first and second laser beams, which propagate toward the substrate along the first and second propagation paths, respectively, which have respective first and second axes that intersects the substrate at respective first and second spots. The reflection sensors are positioned to detect reflection of the spots, as the spots moves relative to the substrate, thereby generating reflection signals. The processor is configured to determine, based on the reflection signals, positions of the spots on or within the substrate.

    摘要翻译： 系统确定半导体衬底和机器中半导体衬底上或半导体衬底内的多个激光束点的相对位置，用于使用多个激光束选择性地照射衬底上或衬底内的结构。 该系统包括激光源，第一和第二激光束传播路径，第一和第二反射传感器以及处理器。 激光源至少产生第一和第二激光束，其分别沿着第一和第二传播路径朝着衬底传播，其具有在相应的第一和第二点处与衬底相交的相应的第一和第二轴。 反射传感器被定位成检测点的反射，因为光点相对于基板移动，从而产生反射信号。 处理器被配置为基于反射信号确定基板上或内部的斑点的位置。