Dielectric material having a low dielectric loss factor for
high-frequency use
    1.
    发明授权
    Dielectric material having a low dielectric loss factor for high-frequency use 失效
    具有低介电损耗因数的介电材料用于高频用途

    公开(公告)号:US5885916A

    公开(公告)日:1999-03-23

    申请号:US931499

    申请日:1997-09-16

    摘要: A dielectric material having a low dielectric loss factor for high-frequency use, which comprises a sintered product of silicon nitride chiefly composed of silicon nitride and containing at least oxygen as an impurity component or oxygen as an impurity component and a compound of an element of the Group 3a of periodic table, wherein said sintered product contains aluminum in an amount which is not larger than 2% by weight reckoned as an oxide thereof having relative densities of not smaller than 97% and has a dielectric loss factor at 10 GHz ofnot larger than 5.times.10.sup.-4. The dielectric material has excellent mechanical properties such as large strength and excellent chemical stability, features small dielectric loss factor in high-frequency regions, and is suited for use as a material for high-frequency oscillators, antennas, filters and electronic circuit boards. In particular, those dielectric materials are suited for use as window materials for introducing high frequencies in a high-frequency plasma-generating CVD apparatus, a microwave wave output unit and an oscillator.

    摘要翻译: 一种具有低介电损耗因子用于高频用途的电介质材料,其包括主要由氮化硅组成的氮化硅和至少含有氧作为杂质成分或氧作为杂质成分的烧结体,以及元素的化合物 元素周期表的第3a族,其中所述烧结产物含有不大于2重量%的铝,其相对密度不低于97%且其10千兆赫的介电损耗系数不大 超过5x10-4。 电介质材料具有优异的机械性能,例如强度高,化学稳定性优异,在高频区域具有小的介电损耗因子,适用于高频振荡器,天线,滤波器和电子电路板的材料。 特别地,这些介电材料适合用作在高频等离子体产生CVD装置,微波波输出单元和振荡器中引入高频的窗口材料。

    Sintered product of silicon nitride
    2.
    发明授权
    Sintered product of silicon nitride 失效
    氮化硅烧结制品

    公开(公告)号:US5804523A

    公开(公告)日:1998-09-08

    申请号:US853410

    申请日:1997-05-09

    IPC分类号: C04B35/593 C04B35/587

    CPC分类号: C04B35/593 C04B35/5935

    摘要: A sintered product of silicon nitride containing not smaller than 70 mol % of a .beta.-silicon nitride as well as an element of the Group 3a at least including Lu of periodic table and impurity oxygen, wherein when the content of the element of the Group 3a of periodic table and the content of the impurity oxygen are, respectively, expressed being reckoned as the amount of an oxide of the element of the Group 3a of periodic table (RE.sub.2 O.sub.3) and as the amount of SiO.sub.2 of impurity oxygen, their total amount is from 2 to 30 mol %, the molar ratio (SiO.sub.2 /RE.sub.2 O.sub.3) of the amount of the element of the Group 3a of periodic table reckoned as the oxide (RE.sub.2 O.sub.3) thereof to the amount of impurity oxygen reckoned as SiO.sub.2 is from 1.6 to 10, and the intergranular phase of the sintered product chiefly comprises a crystal phase consisting of the element of the Group 3a of periodic table, silicon and oxygen and a process for producing the same. The sintered product has a large strength from room temperature through up to high temperatures and maintains excellent resistance against oxidation even at high temperatures, and exhibits excellent resistance against creeping and excellent breaking toughness.

    摘要翻译: 包含不小于70mol%的β-氮化硅的氮化硅的烧结产品以及至少包括Lu的元素周期表和杂质氧的第3a族的元素,其中当第3a族元素的含量 的周期表和杂质氧的含量分别表示为元素周期表(RE 2 O 3)的第3a族元素的氧化物的量和杂质氧的SiO 2的量,它们的总量是 2〜30摩尔%时,作为氧化物(RE 2 O 3)的元素周期表中的元素的量与作为SiO 2计算的杂质氧的量的摩尔比(SiO 2 / RE 2 O 3)为1.6〜10 ,并且烧结体的晶间相主要包含由元素周期表第3a族元素,硅和氧组成的结晶相及其制造方法。 该烧结体从室温至高温具有很大的强度,即使在高温下也能保持优异的抗氧化性,并且具有优异的抗蠕变性和优异的断裂韧性。

    Silicon nitride-silicon carbide composite sintered material and
manufacturing thereof
    4.
    发明授权
    Silicon nitride-silicon carbide composite sintered material and manufacturing thereof 失效
    氮化硅 - 碳化硅复合烧结材料及其制造

    公开(公告)号:US5523267A

    公开(公告)日:1996-06-04

    申请号:US276596

    申请日:1994-07-18

    CPC分类号: C04B35/593 C04B35/575

    摘要: A silicon nitride-silicon carbide composite sintered material which comprises 100 parts by weight of a silicon nitride component containing 92 to 99.5 mol % of silicon nitride including excessive oxygen and 0.5 to 8 mol % of the elements of Group IIIa in the Periodic Table as corresponding oxides thereof and 1 to 100 parts by weight of a silicon carbide component in a dispersed state, wherein the silicon nitride component has an average particle size of 1 .mu.m or less and an average aspect ratio of 2 to 10, and the silicon carbide component has an average particle size of 1 .mu.m or less, moreover, the total amount of Al, Mg, Ca respectively contained in the sintered material as calculated as oxides thereof is 0.5% by weight or less, and a manufacturing method thereof.According to the above-mentioned composite sintered material, it becomes possible to suppress deterioration of strength at 1400.degree. C. and realize excellent creep properties. Therefore, the composite sintered material is applicable not only to structural materials for heat engines such as gas turbines and turbo-rotors but also to other heat resistant materials for various uses.

    摘要翻译: 一种氮化硅 - 碳化硅复合烧结材料,其包含100重量份的包含92至99.5摩尔%的包含过量氧的氮化硅和0.5至8摩尔%的元素周期表中的IIIa族的元素的氮化硅组分, 氧化物和1〜100重量份的分散状态的碳化硅成分,其中,氮化硅成分的平均粒径为1μm以下,平均纵横比为2〜10,碳化硅成分 具有1μm以下的平均粒径,此外,以氧化物计算的烧结体中所含的Al,Mg,Ca的总量为0.5重量%以下,其制造方法。 根据上述复合烧结材料,可以抑制1400℃强度的劣化,实现优异的蠕变性能。 因此,复合烧结体不仅适用于燃气轮机,涡轮转子等发动机的结构材料,还适用于各种用途的其他耐热材料。

    Laminated piezoelectric actuator
    6.
    发明授权
    Laminated piezoelectric actuator 失效
    层压压电致动器

    公开(公告)号:US06414417B1

    公开(公告)日:2002-07-02

    申请号:US09653091

    申请日:2000-08-31

    IPC分类号: H01L41083

    摘要: A laminated piezoelectric actuator comprising external electrodes formed on the side surfaces of an actuator body constituted by plural piezoelectric layers and plural internal electrode layers alternatingly laminated in the direction of height, external electrodes connecting the ends of said internal electrode layers, the internal electrode layers neighboring one another with the piezoelectric layers sandwiched among them of one side constituting first electrode layers and the internal electrode layers of the other side constituting second electrode layers, wherein the external electrodes include a first external electrode connecting the ends of the first electrode layers, and a second external electrode connecting the ends of the second electrode layers and is formed on a side surface of the actuator body different from the side surface on where the first external electrode is formed, insulating blocks are arranged between the first external electrode and the ends of the second electrode layers, and between the second external electrode and the ends of the first electrode layers, flat surfaces are formed on the side surfaces of the insulating blocks that are in contact with the ends of the first electrode layers and with the ends of the second electrode layers, the flat surfaces extending in parallel with the side surfaces of said actuator body, and, when the thickness of the internal electrode layers is denoted by t1, the thickness of the piezoelectric layers by t2, and the length of the flat surfaces by L, a relation represented by the following formula, 0.2≦(L−t1)/t2

    摘要翻译: 一种层叠压电致动器,包括形成在由多个压电层和在高度方向上交替层叠的多个内部电极层构成的致动器主体的侧表面上的外部电极,连接所述内部电极层的端部的外部电极,相邻的内部电极层 彼此之间压电层夹在其中构成第一电极层的一侧和构成第二电极层的另一侧的内部电极层之间的压电层,其中外部电极包括连接第一电极层的端部的第一外部电极和 第二外部电极,其连接第二电极层的端部,并且形成在致动器主体的与形成有第一外部电极的侧面不同的侧面上,绝缘块布置在第一外部电极和第二外部电极的端部之间 第二选 并且在第二外部电极和第一电极层的端部之间,在与第一电极层的端部接触的绝缘块的侧表面上形成平坦表面,并且与第二电极的端部 层,平坦表面与所述致动器主体的侧表面平行延伸,并且当内部电极层的厚度由t1表示时,压电层的厚度为t2,平坦表面的长度为L ,满足由下式表示的关系。