公开(公告)号：US20100209040A1

公开(公告)日：2010-08-19

申请号：US12678534

申请日：2008-09-19

申请人： Kenji Kawano ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Satoshi Matsumoto

发明人： Kenji Kawano ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Satoshi Matsumoto

IPC分类号： G02F1/035 ,  G02B6/12

CPC分类号： G02F1/2255 ,  G02F2201/07 ,  G02F2201/12 ,  G02F2203/21

摘要： In an optical modulator comprising substrate 1 having electro-optical effect, two optical waveguides 3a, 3b formed in the substrate, buffer layer 2 formed on the substrate, traveling-wave electrode 4 having center conductor 4a and ground conductors 4b, 4c above the buffer layer, and ridge sections formed with recessed sections 9a to 9c by carving at least a part of the substrate where an electrical field strength of high-frequency electrical signal propagating the traveling-wave electrode is strong, in which the ridge sections include center conductor ridge section 8a having the center conductor formed above and ground conductor ridge section 8b having the ground conductor formed above, and the center conductor ridge section has one of the two optical waveguides formed therein, the recessed sections are practically symmetrical to the center line between the two optical waveguides and the traveling-wave electrode is practically symmetrical to the center line of the center conductor.

摘要翻译： 在具有电光效应的基板1的光调制器中，形成在基板上的两个光波导3a，3b，形成在基板上的缓冲层2，具有中心导体4a的行波电极4和缓冲器上方的接地导体4b，4c 通过雕刻传播行波电极的高频电信号的电场强度强的基板的至少一部分而形成有凹部9a〜9c的层，脊部，其中脊部包括中心导体脊 具有上面形成的中心导体的部分8a和具有形成在上面的接地导体的接地导体脊部分8b，并且中心导体脊部分在其中形成的两个光波导中的一个形成，凹部实际上对称于两者之间的中心线 光波导和行波电极实际上与中心导体的中心线对称。

公开(公告)号：US20090297087A1

公开(公告)日：2009-12-03

申请号：US12471838

申请日：2009-05-26

申请人： Kenji Kawano ,  Seiji Uchida ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Toru Nakahira ,  Nobuhiro Igarashi ,  Satoshi Matsumoto

发明人： Kenji Kawano ,  Seiji Uchida ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Toru Nakahira ,  Nobuhiro Igarashi ,  Satoshi Matsumoto

IPC分类号： G02F1/035

CPC分类号： G02F1/2255 ,  G02F2001/212

摘要： Herein disclosed is an optical modulator, having: a substrate (1); and a center and ground electrodes (4a to 4c), in which the substrate has ridge portions (8a to 8c), the center and ground electrodes are respectively formed above the ridge portions, the ridge portions below the center and ground electrodes respectively have top parts (10a, 10b) having a respective first and second end points (18, 19) separated with a distance of “WR”, the substrate has a bottom surface (21b) between the ridge portions having center and midway points (23, 24) positioned with a respective distance of WR/2 and WR/N ( 3 ≦N≦25 ) from the first end point, the ridge portion below the center electrode has a normal line (13), and the center point and the midway point define a straight line (25) crossed with the normal line at an angle larger or equal to 90.1°.

摘要翻译： 本文公开了一种光调制器，具有：基板（1）; 以及其中基板具有脊部分（8a至8c）的中心和接地电极（4a至4c），中心接地电极分别形成在脊部上方，中心部分和接地电极下方的脊部分别具有顶部 具有以“WR”的距离分开的相应的第一和第二端点（18,19）的部分（10a，10b），所述基板在具有中心点和中间点（23,24）的脊部之间具有底表面 ）与第一端点分别具有WR / 2和WR / N（3 <= N <= 25）的距离，中心电极下方的脊部具有法线（13），中心点和 中间点限定与法线交叉的直线（25），角度大于或等于90.1°。

公开(公告)号：US08204344B2

公开(公告)日：2012-06-19

申请号：US12471838

申请日：2009-05-26

申请人： Kenji Kawano ,  Seiji Uchida ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Toru Nakahira ,  Nobuhiro Igarashi ,  Satoshi Matsumoto

发明人： Kenji Kawano ,  Seiji Uchida ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Toru Nakahira ,  Nobuhiro Igarashi ,  Satoshi Matsumoto

IPC分类号： G02F1/035

CPC分类号： G02F1/2255 ,  G02F2001/212

摘要： Herein disclosed is an optical modulator, having: a substrate (1); and a center and ground electrodes (4a to 4c), in which the substrate has ridge portions (8a to 8c), the center and ground electrodes are respectively formed above the ridge portions, the ridge portions below the center and ground electrodes respectively have top parts (10a, 10b) having a respective first and second end points (18, 19) separated with a distance of “WR”, the substrate has a bottom surface (21b) between the ridge portions having center and midway points (23, 24) positioned with a respective distance of WR/2 and WR/N (3≦N≦25) from the first end point, the ridge portion below the center electrode has a normal line (13), and the center point and the midway point define a straight line (25) crossed with the normal line at an angle larger or equal to 90.1°.

摘要翻译： 本文公开了一种光调制器，具有：基板（1）; 以及其中基板具有脊部分（8a至8c）的中心和接地电极（4a至4c），中心接地电极分别形成在脊部上方，中心部分和接地电极下方的脊部分别具有顶部 具有以“WR”的距离分开的相应的第一和第二端点（18,19）的部分（10a，10b），所述基板在具有中心点和中间点（23,24）的脊部之间具有底表面 ）与第一端点分别具有WR / 2和WR / N（3＆nlE; N＆nlE; 25）的距离，中心电极下方的脊部具有法线（13），中心点和中点 以大于或等于90.1°的角度定义与法线交叉的直线（25）。

公开(公告)号：US08170381B2

公开(公告)日：2012-05-01

申请号：US12678534

申请日：2008-09-19

申请人： Kenji Kawano ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Satoshi Matsumoto

发明人： Kenji Kawano ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Satoshi Matsumoto

IPC分类号： G02F1/035

CPC分类号： G02F1/2255 ,  G02F2201/07 ,  G02F2201/12 ,  G02F2203/21

摘要： In an optical modulator comprising substrate 1 having electro-optical effect, two optical waveguides 3a, 3b formed in the substrate, buffer layer 2 formed on the substrate, traveling-wave electrode 4 having center conductor 4a and ground conductors 4b, 4c above the buffer layer, and ridge sections formed with recessed sections 9a to 9c by carving at least a part of the substrate where an electrical field strength of high-frequency electrical signal propagating the traveling-wave electrode is strong, in which the ridge sections include center conductor ridge section 8a having the center conductor formed above and ground conductor ridge section 8b having the ground conductor formed above, and the center conductor ridge section has one of the two optical waveguides formed therein, the recessed sections are practically symmetrical to the center line between the two optical waveguides and the traveling-wave electrode is practically symmetrical to the center line of the center conductor.

摘要翻译： 在具有电光效应的基板1的光调制器中，形成在基板上的两个光波导3a，3b，形成在基板上的缓冲层2，具有中心导体4a的行波电极4和缓冲器上方的接地导体4b，4c 通过雕刻传播行波电极的高频电信号的电场强度强的基板的至少一部分而形成有凹部9a〜9c的层，脊部，其中脊部包括中心导体脊 具有上面形成的中心导体的部分8a和具有形成在上面的接地导体的接地导体脊部分8b，并且中心导体脊部分在其中形成的两个光波导中的一个形成，凹部实际上对称于两者之间的中心线 光波导和行波电极实际上与中心导体的中心线对称。

公开(公告)号：US20100310206A1

公开(公告)日：2010-12-09

申请号：US12863126

申请日：2008-01-18

申请人： Kenji Kawano ,  Seiji Uchida ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Toru Nakahira ,  Nobuhiro Igarashi ,  Satoshi Matsumoto

发明人： Kenji Kawano ,  Seiji Uchida ,  Eiji Kawazura ,  Yuji Sato ,  Masaya Nanami ,  Toru Nakahira ,  Nobuhiro Igarashi ,  Satoshi Matsumoto

IPC分类号： G02F1/035

CPC分类号： G02F1/0356 ,  G02F2201/063 ,  G02F2201/07

摘要： A technical problem related to a traveling wave electrode type of optical modulator comprising a substrate having the electro-optical effect, optical waveguides formed in the substrate, and a traveling wave electrode formed above the substrate includes improvement of the characteristics such as optical modulation bandwidth, driving voltage, and characteristic impedance of the traveling wave electrode type of optical modulator. To solve the problem, the structure of ridge portions is optimized which is formed in such a manner that a part of the substrate at regions where electric field generated by a high frequency electric signal traveling through the traveling wave electrode is strong is reduced in thickness by digging. Further, a buffer layer is formed over the substrate where the ridge portions are formed and a conducting layer is formed over the buffer layer. The thickness of at least one part of the buffer layer along the normal line of a side surface of the ridge portions is less than the thickness of the buffer layer on a bottom surface between the ridge portions formed by digging and/or the thickness of the buffer layer on a top part of the ridge portions.

摘要翻译： 与包括具有电光效应的基板，形成在基板中的光波导和形成在基板上的行波电极的行波电极型光调制器有关的技术问题包括光调制带宽等特性的改进， 驱动电压，以及行波电极型光调制器的特性阻抗。 为了解决这个问题，脊部的结构被优化，其形成为使得在通过行波电极行进的高频电信号产生的电场强的区域中的基板的一部分的厚度通过 挖掘。 此外，在形成有脊部的基板上形成缓冲层，在缓冲层上形成导电层。 沿着脊部的侧面的法线的缓冲层的至少一部分的厚度小于通过挖掘形成的脊部之间的底面上的缓冲层的厚度和/ 在脊部的顶部的缓冲层。

公开(公告)号：US20100158428A1

公开(公告)日：2010-06-24

申请号：US12304089

申请日：2007-06-08

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Eiji Kawazura ,  Satoshi Matsurnoto

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Eiji Kawazura ,  Satoshi Matsurnoto

IPC分类号： G02F1/035 ,  G02B6/12

CPC分类号： G02F1/0356 ,  G02F2201/127

摘要： Herein disclosed is an optical modulator, comprising: an optical waveguide (3); and a traveling wave electrode (4) including an interaction portion (9) for modulating a phase of incident light and an input feed-through portion (7), in which the optical modulator further comprises at least one impedance transformation portion for reducing an impedance mismatching between a characteristic impedance of the interaction portion and at least one of characteristic impedances of the input feed-through portion, a connector electrically connected to the input feed-through portion, and an external circuit, at least one of the impedance transformation portions has a characteristic impedance which is different from a geometric mean of the characteristic impedances of said interaction portion and said input feed-through portion, a geometric mean of the characteristic impedances of the interaction portion and the connector, or a geometric mean of the characteristic impedances of the interaction portion and the external circuit.

摘要翻译： 这里公开了一种光调制器，包括：光波导（3）; 以及包括用于调制入射光相位的相互作用部分（9）和输入馈通部分（7）的行波电极（4），其中所述光学调制器还包括至少一个用于减小阻抗的阻抗变换部分 交互部分的特征阻抗与输入馈通部分的特征阻抗，电连接到输入馈通部分的连接器和外部电路中的至少一个之间不匹配，至少一个阻抗变换部分具有 特征阻抗不同于所述相互作用部分和所述输入馈通部分的特征阻抗的几何平均值，相互作用部分和连接器的特征阻抗的几何平均值或特征阻抗的几何平均值 交互部分和外部电路。

公开(公告)号：US07916981B2

公开(公告)日：2011-03-29

申请号：US12063789

申请日：2006-08-15

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/01 ,  G02F1/035 ,  G02B6/12

CPC分类号： G02F1/2255 ,  G02F1/0316 ,  G02F1/0356 ,  G02F2203/25

摘要： An optical modulator, including: a substrate; an optical waveguide embedded in the substrate; a traveling wave electrode mounted on the substrate and having a traveling wave applied thereon so that a light wave is modulated by the traveling wave with an electro-optic effect. The traveling wave electrode includes a center electrode and ground electrodes; in which the optical waveguide has a plurality of interaction optical waveguides that form a Mach-Zehnder optical waveguide that modulates the light wave in a phase modulation manner when the traveling wave is applied to the traveling wave electrode, the interaction optical waveguides form a region where respective widths of the interaction optical waveguides are different from each other, and the center electrode and the ground electrodes are positioned such that interaction efficiencies between the high frequency electric signal and the light wave guided in the respective interaction optical waveguides are substantially equal to each other.

摘要翻译： 一种光调制器，包括：基板; 嵌入基板中的光波导; 安装在基板上并具有施加在其上的行波的行波电极，使得光波被电光效应的行波调制。 行波电极包括中心电极和接地电极; 其中光波导具有多个相互作用的光波导，其形成当将行波施加到行波电极时以相位调制方式调制光波的马赫 - 曾德尔光波导，相互作用光波导形成一个区域， 相互作用光波导的相应宽度彼此不同，并且中心电极和接地电极被定位成使得在各个相互作用光波导中引导的高频电信号和光波之间的相互作用效率基本相等 。

公开(公告)号：US07643708B2

公开(公告)日：2010-01-05

申请号：US11988199

申请日：2006-07-05

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/035

CPC分类号： G02F1/0121 ,  G02F1/2255 ,  G02F2201/127

摘要： Herein disclosed is an optical modulator, comprising: a substrate (1) having an electro-optic effect; an optical waveguide (3) formed in the substrate; a traveling wave electrode (4) including a center electrode (4a) and ground electrodes (4b, 4c) to have a high frequency electric signal applied thereto, the traveling wave electrode and the optical waveguide collectively forming a high frequency interaction portion (20) to have the incident light phase modulated under the condition that the high frequency electric signal is applied to the traveling wave electrode; and bias electrodes each including a center electrode (22a, 23a) and ground electrodes (22b, 22c, 23b, 23c) to have a bias voltage applied thereto, each of the bias electrodes and the optical waveguide collectively forming a bias voltage interaction portion (19, 21) to have the incident light phase modulated under the condition that the bias voltage is applied to the bias electrode, in which the traveling wave electrode and the bias electrodes are extended in a propagation direction of the incident light with the traveling wave electrode (20) positioned between the bias electrodes (19, 21).

摘要翻译： 这里公开了一种光调制器，包括：具有电光效应的基板（1） 形成在所述基板中的光波导（3） 包括中心电极（4a）和施加高频电信号的接地电极（4b，4c）的行波电极（4），行波电极和光波导共同形成高频相互作用部分（20） 在高频电信号施加到行波电极的条件下使入射光相位调制; 以及各自包括中心电极（22a，23a）和接地电极（22b，22c，23b，23c）的偏置电极以施加偏置电压，每个偏置电极和光波导共同形成偏置电压相互作用部分（ 在偏置电极施加偏置电极的条件下进行入射光相位调制，其中行波电极和偏置电极在入射光的传播方向上延伸有行波电极 （20）位于偏置电极（19,21）之间。

公开(公告)号：US20090041403A1

公开(公告)日：2009-02-12

申请号：US11988199

申请日：2006-07-05

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/035

CPC分类号： G02F1/0121 ,  G02F1/2255 ,  G02F2201/127

摘要： Herein disclosed is an optical modulator, comprising: a substrate (1) having an electro-optic effect; an optical waveguide (3) formed in the substrate; a traveling wave electrode (4) including a center electrode (4a) and ground electrodes (4b, 4c) to have a high frequency electric signal applied thereto, the traveling wave electrode and the optical waveguide collectively forming a high frequency interaction portion (20) to have the incident light phase modulated under the condition that the high frequency electric signal is applied to the traveling wave electrode; and bias electrodes each including a center electrode (22a, 23a) and ground electrodes (22b, 22c, 23b, 23c) to have a bias voltage applied thereto, each of the bias electrodes and the optical waveguide collectively forming a bias voltage interaction portion (19, 21) to have the incident light phase modulated under the condition that the bias voltage is applied to the bias electrode, in which the traveling wave electrode and the bias electrodes are extended in a propagation direction of the incident light with the traveling wave electrode (20) positioned between the bias electrodes (19, 21).

摘要翻译： 这里公开了一种光调制器，包括：具有电光效应的基板（1） 形成在所述基板中的光波导（3） 包括中心电极（4a）和施加高频电信号的接地电极（4b，4c）的行波电极（4），行波电极和光波导共同形成高频相互作用部分（20） 在将高频电信号施加到行波电极的条件下使入射光相位调制; 以及各自包括中心电极（22a，23a）和接地电极（22b，22c，23b，23c）的偏置电极以施加偏置电压，每个偏置电极和光波导共同形成偏置电压相互作用部分（ 在偏置电极施加偏置电极的条件下进行入射光相位调制，其中行波电极和偏置电极在入射光的传播方向上延伸有行波电极 （20）位于偏置电极（19,21）之间。

公开(公告)号：US20090034898A1

公开(公告)日：2009-02-05

申请号：US12063789

申请日：2006-08-15

申请人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

发明人： Kenji Kawano ,  Masaya Nanami ,  Yuji Sato ,  Seiji Uchida ,  Nobuhiro Igarashi ,  Toru Nakahira ,  Hiroaki Senda

IPC分类号： G02F1/035 ,  G02F1/03

CPC分类号： G02F1/2255 ,  G02F1/0316 ,  G02F1/0356 ,  G02F2203/25

摘要： Herein disclosed is an optical modulator, comprising: a substrate 1 having an electro-optic effect; an optical waveguide 12 embedded in the substrate 1 to have a light wave guided therein; a traveling wave electrode 4 mounted on the substrate 1 to have a traveling wave applied thereon so that the light wave is modulated by the traveling wave with the electro-optic effect, the traveling wave electrode being constituted by a center electrode 4a and ground electrodes 4b, 4c; in which the optical waveguide has a plurality of interaction optical waveguides 12a, 12b to collectively form a Mach-Zehnder optical waveguide operative to modulate the light wave in a phase modulation manner under the condition that the traveling wave is applied to the traveling wave electrode, the interaction optical waveguides 12a, 12b collectively form a region where respective widths of said interaction optical waveguides are different from each other, and the center electrode 4a and the ground electrodes 4b, 4c are positioned such that interaction efficiencies between the high frequency electric signal and the light wave guided in the respective interaction optical waveguides 12a, 12b are substantially equal to each other.

摘要翻译： 这里公开了一种光调制器，包括：具有电光效应的基板1; 嵌入在基板1内的光波导路12，其中引导光波; 安装在基板1上的行波电极4，其上施加有行波，使得光波被电光效应的行波调制，行波电极由中心电极4a和接地电极4b构成 ，4c; 其中光波导具有多个相互作用的光波导12a，12b，以在将行波施加到行波电极的条件下共同形成用于以相位调制方式调制光波的马赫 - 曾德尔光波导， 相互作用的光波导12a，12b共同形成相互之间的相互作用的光波导的各自的宽度彼此不同的区域，中心电极4a和接地电极4b，4c被定位成使得高频电波信号与 在相互作用的光波导12a，12b中引导的光波基本相等。