公开(公告)号：US06859053B1

公开(公告)日：2005-02-22

申请号：US10111102

申请日：2000-11-13

申请人： Kenji Sato ,  Hiromitu Wada ,  Fujio Murai ,  Koichi Mimura ,  Masanori Akita

发明人： Kenji Sato ,  Hiromitu Wada ,  Fujio Murai ,  Koichi Mimura ,  Masanori Akita

IPC分类号： G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  G02F1/13 ,  H01R43/00

CPC分类号： G02F1/13452 ,  G01R1/06772 ,  G01R1/073 ,  G01R31/2886 ,  G02F1/1309 ,  Y10T29/49117

摘要： In a probe apparatus comprising an inspecting device, an intermediate substrate and a probe substrate, in which the inspecting device is electrically connected to a proximal end of the intermediate substrate, and the intermediate substrate has a distal end electrically connected to a proximal end of the probe substrate, and the probe substrate has a distal end electrically connectable to a substrate under inspection, a plurality of probe substrates are electrically connected to the single intermediate substrate. When a particular probe substrate 4 is damaged, only the particular probe substrate 4 may be changed, the other probe substrates 4 continuing to be used, thereby achieving economy.

摘要翻译： 在包括检查装置，中间基板和探针基板的探针装置中，其中检查装置电连接到中间基板的近端，并且中间基板具有电连接到中间基板的近端的远端 探针基板，并且探针基板具有可电连接到检查基板的远端，多个探针基板电连接到单个中间基板。 当特定的探针基板4被损坏时，仅可以改变特定的探针基板4，继续使用其它探针基板4，从而实现经济。