FEEDER SYSTEM AND METHOD FOR A VAPOR TRANSPORT DEPOSITION SYSTEM
    2.
    发明申请
    FEEDER SYSTEM AND METHOD FOR A VAPOR TRANSPORT DEPOSITION SYSTEM 有权
    用于蒸汽运输沉积系统的进料器系统和方法

    公开(公告)号:US20130058728A1

    公开(公告)日:2013-03-07

    申请号:US13601512

    申请日:2012-08-31

    IPC分类号: B65G53/08

    摘要: An improved feeder system and method for a vapor transport deposition system that includes a carrier gas bypass flow line to allow for continuous carrier gas flow to a vaporizer unit when a vibratory unit which supplies powdered material and carrier gas to the vaporizer unit is out of service. A process gas flow line to the vibratory unit may be included when the powdered material contains a powdered dopant in the material mix.

    摘要翻译: 一种用于蒸气传输沉积系统的改进的馈送系统和方法,其包括载气旁路流线,以便当向蒸发器单元供应粉末材料和载气的振动单元失去使用时,允许连续的载气流向蒸发器单元 。 当粉末材料在材料混合物中含有粉末掺杂剂时,可以包括到振动单元的工艺气体流线。

    Feeder system and method for a vapor transport deposition system
    3.
    发明授权
    Feeder system and method for a vapor transport deposition system 有权
    用于蒸气输送沉积系统的送料系统和方法

    公开(公告)号:US09359668B2

    公开(公告)日:2016-06-07

    申请号:US13601512

    申请日:2012-08-31

    IPC分类号: B65G53/40 C23C14/22

    摘要: An improved feeder system and method for a vapor transport deposition system that includes a carrier gas bypass flow line to allow for continuous carrier gas flow to a vaporizer unit when a vibratory unit which supplies powdered material and carrier gas to the vaporizer unit is out of service. A process gas flow line to the vibratory unit may be included when the powdered material contains a powdered dopant in the material mix.

    摘要翻译: 一种用于蒸气传输沉积系统的改进的馈送系统和方法,其包括载气旁路流线,以便当向蒸发器单元供应粉末材料和载气的振动单元失去使用时,允许连续的载气流向蒸发器单元 。 当粉末材料在材料混合物中含有粉末掺杂剂时,可以包括到振动单元的工艺气体流线。