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公开(公告)号：US20080093336A1
公开(公告)日：2008-04-24
申请号：US11583845
申请日：2006-10-20
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。
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公开(公告)号：US20100221581A1
公开(公告)日：2010-09-02
申请号：US12768616
申请日：2010-04-27
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。
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公开(公告)号：US07704614B2
公开(公告)日：2010-04-27
申请号：US11583845
申请日：2006-10-20
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
IPC分类号： G11B5/66
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。
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公开(公告)号：US08460565B2
公开(公告)日：2013-06-11
申请号：US12768616
申请日：2010-04-27
申请人： Kim Y Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S Kuo , Dieter K Weller
发明人： Kim Y Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S Kuo , Dieter K Weller
IPC分类号： B44C1/22
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。
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5.发明申请Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist 审中-公开使用混合抗蚀剂制造图案化记录介质的主压模/打印机的方法公开(公告)号：US20080113157A1
公开(公告)日：2008-05-15
申请号：US11595894
申请日：2006-11-13
申请人： Kim Y. Lee , Hong Ying Wang , Shih-Fu Lee , David S. Kuo , Koichi Wago , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Shih-Fu Lee , David S. Kuo , Koichi Wago , Dieter K. Weller
CPC分类号： G03F7/095 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/24355
摘要： A method of fabricating a master stamper/imprinter for manufacturing a patterned recording medium by nano-imprint lithography comprises steps of: (a) providing a substrate having a surface; (b) forming a layer of a hybrid resist material on the surface, the resist layer having an exposed upper surface; (c) subjecting selected areas of the exposed upper surface of the resist layer to an energy beam to form therein a latent image of a topographical pattern to be formed in the resist layer and having a correspondence to a pattern to be formed in a patterned recording medium; and (d) developing the latent image into the topographical pattern in the resist layer, wherein only those areas of the resist layer which have received an energy beam exposure dose between a positive-tone threshold dose D0p and a negative-tone threshold dose D0n are developed.
摘要翻译： 制造用于通过纳米压印光刻制造图案化记录介质的主压模/印刷机的方法包括以下步骤：（a）提供具有表面的基板; （b）在所述表面上形成混合抗蚀剂材料层，所述抗蚀剂层具有暴露的上表面; （c）使抗蚀剂层的暴露的上表面的选定区域能量束在其中形成要在抗蚀剂层中形成的形貌图案的潜像，并且与图案化记录中形成的图案对应 中; 并且（d）将潜像显影成抗蚀剂层中的形貌图案，其中只有已经接收了能量束曝光的抗蚀剂层的那些区域剂量在正音阈值剂量D 0 P 0和 开发出负色调阈值剂量D 0n 。
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6.发明授权Dry passivation process for stamper/imprinter family making for patterned recording media 有权干式钝化工艺用于压模/印刷机家族制作图案化记录介质公开(公告)号：US07150844B2
公开(公告)日：2006-12-19
申请号：US10685462
申请日：2003-10-16
摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.
摘要翻译： 一种制造用于记录介质图形化的压模/打印机的方法包括以下步骤：（a）提供基板/工件，该基板/工件包括地形图形表面，其包括对应于待形成的图案的多个凸起和凹陷 记录介质的表面; （b）通过干法形成与地形图形表面保形接触的薄释放层; （c）在地形图形表面上形成与薄钝化层保形接触的材料的较厚层; 以及（d）将厚层材料与地形图案化的表面分离以形成压模/打印机，其包括具有地形图形表面的负图像复制品的压印表面，较厚的材料层与地形图形表面的分离是 由通过干法形成的薄释放层促进。
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7.发明授权Eliminating gel particle-related defects for obtaining sub-micron flyability over sol-gel—coated disk substrates 失效消除与凝胶颗粒相关的缺陷，以获得溶胶 - 凝胶涂覆的盘基底上的亚微米可飞性公开(公告)号：US06572922B1
公开(公告)日：2003-06-03
申请号：US09910812
申请日：2001-07-24
申请人： Hong Ying Wang , Neil Deeman , Nobuo Kurataka
发明人： Hong Ying Wang , Neil Deeman , Nobuo Kurataka
IPC分类号： B05D312
CPC分类号： G11B5/84 , G11B5/8404
摘要： A method of manufacturing a magnetic recording medium comprises steps of: (a) preparing a sol solution containing gel particles; (b) treating the sol solution to remove gel particles having a size greater than a predetermined maximum size; (c) providing a non-magnetic substrate for a magnetic recording medium, the substrate including a surface; and (d) applying a layer of the treated sol solution to the surface of the substrate; (e) converting the layer of treated sol solution to a layer of sol-gel having a hardness less than that of the surface of the substrate, an exposed surface of the layer of sol-gel having very low surface micro-waviness and substantially no defects in the form of protrusions or bumps; (f) forming a pattern in the exposed surface of the layer of sol-gel; (g) converting the layer of sol-gel to a glass or glass-like layer having a density and hardness substantially comparable to that of the surface of the substrate, while preserving the pattern formed in an exposed surface of the glass or glass-like layer and (h) forming a stack of thin film layers over an exposed surface of the glass or glass-like layer formed in step (g), the stack of layers including at least one ferromagnetic layer.
摘要翻译： 制造磁记录介质的方法包括以下步骤：（a）制备含有凝胶颗粒的溶胶溶液;（b）处理溶胶溶液以除去具有大于预定最大尺寸的凝胶颗粒;（c） 用于磁记录介质的磁性基底，所述基底包括表面; 和（d）将经处理的溶胶溶液层施加到基材的表面;（e）将处理的溶胶溶液层转化为硬度小于基材表面的溶胶 - 凝胶层， 溶胶凝胶层的暴露表面具有非常低的表面微波纹度，并且基本上没有突起或凸起形式的缺陷;（f）在溶胶 - 凝胶层的暴露表面中形成图案;（g）转化 所述溶胶 - 凝胶层到玻璃或玻璃状层，其密度和硬度基本上与基材的表面相当，同时保留在玻璃或玻璃状层的暴露表面中形成的图案和（h ）在步骤（g）中形成的玻璃或玻璃状层的暴露表面上形成一叠薄膜层，所述层叠层包括至少一个铁磁层。
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8.发明授权Servo pattern formation via transfer of sol-gel layer and magnetic media obtained thereby 失效通过溶胶 - 凝胶层的转移和由此获得的磁性介质形成伺服图案公开(公告)号：US06974643B2
公开(公告)日：2005-12-13
申请号：US10821871
申请日：2004-04-12
申请人： Nobuo Kurataka , Hong Ying Wang , Neil Deeman
发明人： Nobuo Kurataka , Hong Ying Wang , Neil Deeman
IPC分类号： C03B19/12 , C23C18/12 , C23C26/00 , G11B5/596 , G11B5/74 , G11B5/82 , G11B5/855 , B44C1/165 , C03B37/06 , B32B5/66
CPC分类号： G11B5/855 , B82Y10/00 , C03B19/12 , C23C18/06 , C23C18/1212 , C23C18/1254 , C23C18/1295 , C23C26/00 , G11B5/59633 , G11B5/74 , G11B5/743 , G11B5/82 , Y02P40/57
摘要： A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.
摘要翻译： 一种制造包括伺服图案的磁记录介质的方法，包括以下步骤：（a）提供包括至少一个主表面的非磁性基板; （b）提供具有表面的压模，所述表面具有形成伺服图案的负像的多个凹部; （c）形成部分干燥的溶胶 - 凝胶材料层，其具有与压模的凹形图案表面保形接触的第一表面和与第一表面相对的暴露的第二表面; （d）促使衬底的主表面与暴露的溶胶 - 凝胶层的第二表面接触; （e）除去所述压模与所述溶胶 - 凝胶材料层的接触以露出其凹形图案表面; （f）将部分干燥的溶胶 - 凝胶层转化成玻璃状层，同时保持其表面上的凹凸图案; 和（f）在凹形图案表面上形成构成伺服图案化磁记录介质的层的层叠体。
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9.发明授权Servo pattern formation via transfer of sol-gel layer and magnetic media obtained thereby 失效通过溶胶 - 凝胶层的转移和由此获得的磁性介质形成伺服图案公开(公告)号：US06723198B1
公开(公告)日：2004-04-20
申请号：US10079516
申请日：2002-02-22
申请人： Nobuo Kurataka , Hong Ying Wang , Neil Deeman
发明人： Nobuo Kurataka , Hong Ying Wang , Neil Deeman
IPC分类号： B44C1165
CPC分类号： G11B5/855 , B82Y10/00 , C03B19/12 , C23C18/06 , C23C18/1212 , C23C18/1254 , C23C18/1295 , C23C26/00 , G11B5/59633 , G11B5/74 , G11B5/743 , G11B5/82 , Y02P40/57
摘要： A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.
摘要翻译： 一种制造包括伺服图案的磁记录介质的方法，包括以下步骤：（a）提供包括至少一个主表面的非磁性基板;（b）提供具有多个凹槽的压模，所述凹槽形成负极 伺服图案的图像;（c）形成部分干燥的溶胶 - 凝胶材料层，其具有与压模的凹形图案表面保形接触的第一表面和与第一表面相对的暴露的第二表面;（d） 所述基材的主表面与所述溶胶 - 凝胶层的暴露的第二表面接触;（e）除去所述压模与所述溶胶 - 凝胶材料层的接触以暴露其凹陷图案化表面;（f） 部分干燥的溶胶 - 凝胶层到玻璃状层，同时保持其表面中的凹凸图案; 和（f）在凹形图案表面上形成构成伺服图案化磁记录介质的层的层叠体。
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10.发明授权公开(公告)号：US07074341B1
公开(公告)日：2006-07-11
申请号：US10603088
申请日：2003-06-25
IPC分类号： B44C1/22
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G11B5/743 , G11B5/82 , G11B5/855 , G11B5/865 , G11B7/263 , G11B11/10582 , Y10T29/49037 , Y10T29/49052
摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprising the sequential steps of providing a substrate/workpiece comprising a topographical pattern formed in a portion of a surface of the substrate/workpiece. The pattern defines a periphery. An alignment mark is formed in another portion of the surface of surrounding the periphery. An opaque protective film is formed overlying the entirety of the surface. A peripheral portion of the protective film is removed to expose the alignment mark. Selected portions of the substrate/workpiece are removed while the alignment mark is utilized for accurate alignment during the removal process. Remaining portions of the protective film are removed prior to use.
摘要翻译： 一种制造用于记录介质图形化的压模/打印机的方法，包括提供包括形成在基板/工件的表面的一部分中的形状图案的基板/工件的顺序步骤。 图案定义了外围。 在围绕周边的表面的另一部分中形成对准标记。 在整个表面上形成不透明的保护膜。 去除保护膜的周边部分以露出对准标记。 去除基板/工件的选定部分，同时在移除过程期间利用对准标记进行精确对准。 保护膜的剩余部分在使用前被去除。
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