摘要:
A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要:
A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要:
A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要:
A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要:
A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.
摘要:
A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprising the sequential steps of providing a substrate/workpiece comprising a topographical pattern formed in a portion of a surface of the substrate/workpiece. The pattern defines a periphery. An alignment mark is formed in another portion of the surface of surrounding the periphery. An opaque protective film is formed overlying the entirety of the surface. A peripheral portion of the protective film is removed to expose the alignment mark. Selected portions of the substrate/workpiece are removed while the alignment mark is utilized for accurate alignment during the removal process. Remaining portions of the protective film are removed prior to use.
摘要:
A method of manufacturing a magnetic recording medium comprises steps of: (a) preparing a sol solution containing gel particles; (b) treating the sol solution to remove gel particles having a size greater than a predetermined maximum size; (c) providing a non-magnetic substrate for a magnetic recording medium, the substrate including a surface; and (d) applying a layer of the treated sol solution to the surface of the substrate; (e) converting the layer of treated sol solution to a layer of sol-gel having a hardness less than that of the surface of the substrate, an exposed surface of the layer of sol-gel having very low surface micro-waviness and substantially no defects in the form of protrusions or bumps; (f) forming a pattern in the exposed surface of the layer of sol-gel; (g) converting the layer of sol-gel to a glass or glass-like layer having a density and hardness substantially comparable to that of the surface of the substrate, while preserving the pattern formed in an exposed surface of the glass or glass-like layer and (h) forming a stack of thin film layers over an exposed surface of the glass or glass-like layer formed in step (g), the stack of layers including at least one ferromagnetic layer.
摘要:
A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.
摘要:
A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.
摘要:
A method of manufacturing a stamper/imprinter for use in patterning of a recording medium, comprising sequential steps of: (a) providing a permanent master comprising a body of a substantially rigid material having a surface with a topographical pattern formed therein comprising a patterned plurality of spaced-apart recesses with a plurality of non-recessed areas therebetween, the topographical pattern corresponding to a pattern to be formed in a recording medium; (b) forming a layer of a substantially rigid material over the surface of the permanent master with the topographical pattern formed therein; (c) separating the layer of a substantially rigid material from the master, the layer of a substantially rigid material having an imprinting surface with a topographical pattern formed therein replicating the topographical pattern of the permanent master; and (d) repeating steps (b) and (c) multiple times with the permanent master provided in step (a) to form a plurality of stampers/imprinters.