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    Nanoporous polymers crosslinked via cyclic structures
    1.
    发明授权
    Nanoporous polymers crosslinked via cyclic structures 失效
    通过环状结构交联的纳米多孔聚合物

    公开(公告)号：US06172128B2

    公开(公告)日：2001-01-09

    申请号：US09544722

    申请日：2000-04-06

    申请人： Kreisler Lau ,  Tian-An Chen ,  Roger Leung

    发明人： Kreisler Lau ,  Tian-An Chen ,  Roger Leung

    IPC分类号： C08J902

    CPC分类号： C08J3/246 ,  C08J9/26 ,  C08J2201/046

    摘要： Nanoporous polymeric materials are fabricated in which polymeric strands are crosslinked via ring structures. Preferred ring structures are formed de novo during crosslinking, and at least some of the ring structures are preferably included in the backbones of the strands. At least one of the ring structures may advantageously comprise an aromatic structure, and may more advantageously comprise a benzyl moiety. Especially preferred polymers comprise a poly(arylene ether) synthesized from a difluoroaromatic portion and an aromatic bisphenolic portion. In another preferred aspect, the difluoroaromatic portions of the poly(arylene ether) carry at least two different crosslinking functionalities. In an even more preferred aspect, the crosslinking functionalities comprise an ethynyl and a tetracyclone. Nanoporosity is preferably introduced by thermolyzing one or more thermolabile portions in the crosslinked polymer. An especially preferred thermolabile portion comprises ethylene glycol-poly(caprolactone).

    摘要翻译： 制造纳米多孔聚合材料，其中聚合物链通过环结构交联。 优选的环结构在交联期间从头形成，并且至少一些环结构优选包含在该链的主链中。 至少一个环结构可以有利地包含芳族结构，并且可以更有利地包含苄基部分。 特别优选的聚合物包括由二氟芳族部分和芳族双酚部分合成的聚（亚芳基醚）。 在另一个优选的方面，聚（亚芳基醚）的二氟芳香族部分携带至少两种不同的交联官能团。 在更优选的方面，交联官能团包括乙炔基和四环。 优选通过热交换聚合物中的一个或多个热不稳定部分来引入纳米孔。 特别优选的耐热不稳定部分包括乙二醇 - 聚（己内酯）。

    Polymers having backbones with reactive groups employed in crosslinking as precursors to nanoporous thin film structures
    2.
    发明授权
    Polymers having backbones with reactive groups employed in crosslinking as precursors to nanoporous thin film structures 失效
    具有反应性基团的骨架的聚合物用作交联作为纳米多孔薄膜结构的前体

    公开(公告)号：US06313185B1

    公开(公告)日：2001-11-06

    申请号：US09538276

    申请日：1998-09-24

    申请人： Kreisler Lau ,  Tian-An Chen ,  Roger Leung

    发明人： Kreisler Lau ,  Tian-An Chen ,  Roger Leung

    IPC分类号： C08J902

    CPC分类号： C08J9/26 ,  C08J2201/046 ,  H05K1/0313

    摘要： Nanoporous materials are fabricated from polymers having backbones with reactive groups used in crosslinking. In one aspect of preferred methods and compositions, the reactive groups in the backbone comprise a diene and a dienophile. The diene may advantageously comprise a tetracyclone, and the dienophile may advantageously comprise an ethynyl. In another aspect of preferred methods and compositions, the reactive groups in the backbone are included in a conjugated system. Especially preferred polymeric strands comprise a poly(arylene ether) synthesized from a difluoroaromatic portion and an aromatic bisphenolic portion. It is still more preferred that the difluoroaromatic portions of the poly(arylene ether) are modified in such a way that some difluoroaromatic portions carry a thermolabile portion. In still other aspects crosslinking may advantageously occur without reliance on an exogenous crosslinker.

    摘要翻译： 纳米多孔材料由具有用于交联的反应性基团的主链的聚合物制成。 在优选的方法和组合物的一个方面，主链中的反应性基团包含二烯和亲二烯体。 二烯可有利地包含四环，并且亲二烯体可有利地包含乙炔基。 在优选方法和组合物的另一方面，骨架中的反应性基团包括在共轭体系中。 特别优选的聚合物链包含由二氟芳族部分和芳族双酚部分合成的聚（亚芳基醚）。 更优选的是，聚（亚芳基醚）的二氟芳香族部分以使得一些二氟芳香族部分携带不可热热部分的方式被改性。 在其它方面，交联可有利地发生，而不依赖于外源交联剂。

    Nanoporous polymers comprising macrocycles
    3.
    发明授权
    Nanoporous polymers comprising macrocycles 失效
    包含大环的纳米多孔聚合物

    公开(公告)号：US06380347B1

    公开(公告)日：2002-04-30

    申请号：US09544504

    申请日：2000-04-06

    申请人： Kreisler Lau ,  Tian-An Chen ,  Boris Korolev

    发明人： Kreisler Lau ,  Tian-An Chen ,  Boris Korolev

    IPC分类号： C08G6538

    CPC分类号： C08G65/4081 ,  C08G2650/64 ,  H05K1/0326

    摘要： Compositions and methods are provided in which an electrical device is fabricated by incorporating macrocycles in a polymer on a substrate portion of the device, and crosslinking the polymer to form a crosslinked polymer. It is preferred that at least some of the macrocycles are relatively large, including at least six rings in the backbone of a macrocycle. It is also preferred that rings used in forming the macrocycles may be relatively large, preferably having at least six members as in phenyl rings. The intermacrocyclic links can be relatively complex, such as where four macrocycles may be coupled to a single atom or a single phenyl group. In yet other aspects, macrocycles can be heavily conjugated, with more preferred macrocycles having a completely conjugated backbone. In yet other aspects the macrocycles can have backbones with ether, carboxyl, and ethynyl groups, some of which can be used in crosslinking without reliance on an extrinsic crosslinker. In still another aspect, the macrocycles can be fabricated from a bisphenol and a difluoroaromatic compound.

    摘要翻译： 提供了组合物和方法，其中通过在装置的基材部分上的聚合物中引入大环来制造电气装置，并交联聚合物以形成交联聚合物。 优选至少一些大环化合物相对较大，包括在大环的主链中的至少六个环。 还优选用于形成大环的环可以相对较大，优选在苯环中具有至少六个成员。 杂环连接可以是相对复杂的，例如四个大环可以连接到单个原子或单个苯基上。 在另一方面，大环可以重共轭，更优选的大环化合物具有完全共轭的主链。 在其它方面，大环可以具有醚，羧基和乙炔基的主链，其中一些可以用于交联而不依赖于外在交联剂。 另一方面，大环可以由双酚和二氟芳族化合物制备。

    Nanoporous material fabricated using polymeric template strands
    4.
    发明授权
    Nanoporous material fabricated using polymeric template strands 失效
    使用聚合物模板链制造的纳米多孔材料

    公开(公告)号：US6156812A

    公开(公告)日：2000-12-05

    申请号：US544723

    申请日：2000-04-06

    申请人： Kreisler Lau ,  Tian-An Chen ,  Boris Korolev

    发明人： Kreisler Lau ,  Tian-An Chen ,  Boris Korolev

    IPC分类号： C08J9/26 ,  C08J9/02

    CPC分类号： C08J9/26 ,  C08J2201/046

    摘要： Compositions and methods are provided in which nanoporous polymeric materials are produced via stable, polymeric template strands having reactive groups that can be used for forming crosslinking functionalities and/or adding thermolabile groups, wherein at least some of the thermolabile groups are thermolyzed to produce voids. The template strands preferably comprise aromatic systems and vicinal keto groups, such as a polybenzil formed from fluorene bisphenol or 3,3'-dihydroxytolane with 4,4'-difluorobenzil. At least some of the reactive groups preferably react using an addition-elimination reaction. Especially preferred thermolabile groups comprise poly(propylene oxide), and especially preferred crosslinkers comprise ethynyl-moiety and tetracyclone moieties.

    摘要翻译： 提供了组合物和方法，其中纳米多孔聚合物材料通过具有可用于形成交联官能团和/或添加不耐热基团的反应性基团的稳定的聚合物模板链产生，其中至少一些不耐热基团被热分解以产生空隙。 模板链优选包含芳族体系和连位酮基，例如由芴双酚或3,3'-二羟基乙内酯与4,4'-二氟苯甲醛形成的聚苯乙烯。 至少一些反应性基团优选使用加成 - 消除反应进行反应。 特别优选的热不稳定基团包括聚（环氧丙烷），并且特别优选的交联剂包括乙炔基部分和四环酮部分。

    Wafer supporting system for semiconductor wafers
    7.
    发明申请
    Wafer supporting system for semiconductor wafers 审中-公开
    晶圆支撑系统用于半导体晶圆

    公开(公告)号：US20050147489A1

    公开(公告)日：2005-07-07

    申请号：US10745923

    申请日：2003-12-24

    申请人： Tian-An Chen ,  Daoqiang Lu

    发明人： Tian-An Chen ,  Daoqiang Lu

    IPC分类号： B66C17/08 ,  H01L21/68

    CPC分类号： H01L21/6836 ,  H01L2221/68327

    摘要： The embodiments of the present invention include coating a semiconductor wafer with a polymer layer and attaching the polymer layer to a support substrate with a tape. The tape has at least two adhesive sides, and at least one radiation sensitive side. The radiation sensitive side facilitates release of the tape.

    摘要翻译： 本发明的实施例包括用聚合物层涂覆半导体晶片并且用胶带将聚合物层附着到支撑基板上。 胶带具有至少两个粘合剂侧面和至少一个辐射敏感侧。 辐射敏感侧有利于胶带的释放。

    Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric
    9.
    发明授权
    Method of fabricating a bismaleimide (BMI) ASA sacrifical material for an integrated circuit air gap dielectric 失效
    制造用于集成电路气隙电介质的双马来酰亚胺（BMI）ASA牺牲材料的方法

    公开(公告)号：US06872654B2

    公开(公告)日：2005-03-29

    申请号：US10330619

    申请日：2002-12-26

    申请人： Tian-An Chen ,  Kevin P. O'Brien

    发明人： Tian-An Chen ,  Kevin P. O'Brien

    IPC分类号： H01L21/312 ,  H01L21/768 ,  H01L21/4763

    CPC分类号： H01L21/7682 ,  H01L21/02118 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/02348 ,  H01L21/312

    摘要： A method for implementing a bismaleimide (BMI) polymer as a sacrificial material for an integrated circuit air gap dielectric. The method of one embodiment comprises forming a first and second metal interconnect lines on a substrate, wherein at least a portion of the first and second metal interconnect lines extend parallel to one another and wherein a trough is located between the parallel portion of said first and second metal interconnect lines. A layer of bismaleimide is spin coated over the substrate. The layer of bismaleimide is polished with a chemical mechanical polish, wherein the trough remains filled with the bismaleimide. A diffusion layer is formed over the substrate. The substrate is heated to activate a pyrolysis of the bismaleimide. An air gap is formed in the trough in the space vacated by the bismaleimide.

    摘要翻译： 一种用于实现用于集成电路气隙电介质的双马来酰亚胺（BMI）聚合物作为牺牲材料的方法。 一个实施例的方法包括在衬底上形成第一和第二金属互连线，其中第一和第二金属互连线的至少一部分彼此平行延伸，并且其中槽位于所述第一和第二金属互连线的平行部分之间， 第二金属互连线。 将一层双马来酰亚胺旋涂在基材上。 用化学机械抛光剂抛光双马来酰亚胺层，其中槽保持充满双马来酰亚胺。 在衬底上形成扩散层。 加热底物以活化双马来酰亚胺的热解。 在由双马来酰亚胺空出的空间中的槽中形成气隙。