公开(公告)号：US10062589B2

公开(公告)日：2018-08-28

申请号：US15673030

申请日：2017-08-09

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20180068879A1

公开(公告)日：2018-03-08

申请号：US15676613

申请日：2017-08-14

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US09881820B2

公开(公告)日：2018-01-30

申请号：US15138097

申请日：2016-04-25

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US10062590B2

公开(公告)日：2018-08-28

申请号：US15676687

申请日：2017-08-14

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20180040492A1

公开(公告)日：2018-02-08

申请号：US15676687

申请日：2017-08-14

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20180019142A1

公开(公告)日：2018-01-18

申请号：US15673030

申请日：2017-08-09

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US09698036B2

公开(公告)日：2017-07-04

申请号：US14933987

申请日：2015-11-05

Applicant: Lam Research Corporation

Inventor： Silvia R. Aguilar ,  Scott Wong ,  Derek J. Witkowicki ,  Richard H. Gould ,  Candi Kristoffersen ,  Brandon Senn

IPC: H01L21/677

CPC classification number: H01L21/67769 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67775

Abstract: A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A plurality of cassette loaders provides substrate cassettes to the plurality of ports.

公开(公告)号：US20170117170A1

公开(公告)日：2017-04-27

申请号：US15138097

申请日：2016-04-25

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.