摘要:
Streak camera whereof the pulse converter for converting a photon pulse for detecting into an electron stream comprises a gaseous medium. A streak camera for a photon pulse in the far-infrared region is provided with a laser source to bring particles in the medium into a Rydberg state, in a streak camera for an X-ray pulse the medium contains particles for bringing into an Auger state, and additional deflection plates are provided for separating a primary electron stream from a secondary electron stream.
摘要:
A lithographic apparatus is disclosed that includes a projection system, and a liquid confinement structure configured to at least partly confine immersion liquid to an immersion space defined by the projection system, the liquid confinement structure and a substrate and/or substrate table. Measures are taken in the lithographic apparatus, for example, to reduce the effect of droplets on the final element of the projection system or to substantially avoid such droplet formation.