摘要:
A dual damascene process capable of reliably producing aluminum interconnects that exhibit improved electromigration characteristics over aluminum interconnects produced by conventional RIE techniques. In particular, the dual damascene process relies on a PVD-Ti/CVD-TiN barrier layer to produce aluminum lines that exhibit significantly reduced saturation resistance levels and/or suppressed electromigration, particularly in lines longer than 100 micrometers. The electromigration lifetime of the dual damascene aluminum line is strongly dependent on the materials and material fill process conditions. Significantly, deviations in materials and processing can result in electromigration lifetimes inferior to that achieved with aluminum RIE interconnects. In one example, current densities as high as 2.5 MA/cm2 are necessary to induce a statistically relevant number of fails due to electromigration.
摘要翻译:一种能够可靠地生产铝互连的双镶嵌工艺,其通过常规RIE技术生产的铝互连件具有改善的电迁移特性。 特别地,双镶嵌工艺依赖于PVD-Ti / CVD-TiN阻挡层以产生显示出显着降低的饱和电阻水平和/或抑制电迁移的铝线,特别是在长于100微米的线中。 双镶嵌铝线的电迁移寿命很大程度上取决于材料和材料填充工艺条件。 重要的是,材料和加工的偏差可导致电迁移寿命低于铝RIE互连实现的寿命。 在一个示例中,高达2.5MA / cm 2的电流密度是诱导由于电迁移引起的统计上相关的失败数量所必需的。
摘要:
A method for determining values which are suitable for distortion correction of an image, including the following steps: a step of splitting a vector field, which is suitable for distortion correction of the image, into a sum of vector products, and a step of determining terms of the vector products as suitable values for distortion correction of the image.
摘要:
Gearwheel pump, having a housing with at least two intermeshing gears with shafts supported by slide bearings lubricated with pumping medium (M) fed from a suction side to a pressure side, a return duct which leads pumping medium which flows outward through the plain bearing back to the suction side, and a valve (5) having a stationary part and a moveable part (20, 21). The valve (5) has a setting characteristic which runs, as a first approximation, linearly at least in one region, wherein the setting characteristic is defined by a differential pressure (Δp) across the valve as a function of a setting path (x) in the valve (5) thereby significantly improving capability for setting the pressure in the transition region between the plain bearing and a dynamic seal of a driveshaft which is guided outward.
摘要:
A method and device is provided for thermal treatment of workpieces or components, in particular for producing a soldered joint between a solder material and at least one component or workpiece which is used as a carrier for said solder material, by melting of the solder material arranged on the solder material carrier. At least one component is heated in a melt chamber (12) in a process atmosphere which is sealed off from the environment. In a subsequent step the component is cooled in a cooling chamber (13) in a process atmosphere which is sealed off from the environment. The component is heated and cooled in process chamber (12, 13) which are independent of each other.
摘要:
The invention relates to a system for estimating the spatial position (pose) of a tool (2) within an object (1), particularly in the form of a human bone that is to be machined with said tool, comprising: a sensor (21) being designed to be coupled to said tool (2), which sensor (21) is further designed to generate an sensor output signal (31) upon machining of said object (1) along an actual trajectory (30), which sensor output signal (31) depends on a material property of said object along said actual trajectory (30), an analyzing means being designed to determine a correlation between said sensor output signal (31) upon machining said object (1) and a plurality of pre-determined candidate output signals (42), each candidate output signal (42) being generated in beforehand using said material property along an associated model trajectory (40) in a model of said object (1), and wherein said analyzing means is designed to estimate a spatial position of the tool (2) within the object (1) using the model trajectory (40) whose associated candidate output signal (42) has the highest correlation with the sensor output signal (31), for instance. The invention further relates to a method for estimating the pose of the tool (2), as well as a computer program product.
摘要:
The present invention relates to a method and device (10) for the temperature treatment of workpieces (19) or components, in particular for producing a solder connection between a solder material and at least one component or workpiece used as a solder material carrier by means of melting the solder material arranged on the solder material carrier, where a heating and, in a subsequent method step, a cooling of at least one component is carried out in a process chamber (13, 14) which is sealed from the surrounding area, wherein the heating and the cooling of the component (19) are carried out in two chamber regions (13, 14) of the process chamber (12), which can be separated from one another by means of a condensation device (15).
摘要:
A microelectronic structure is formed on a first layer or a substrate. The first layer or substrate is formed with grooves and contact openings. A metal nitride layer of TiN or WN covers the first layer or the substrate at least partially. An alpha-phase tantalum layer is deposited on top of the metal nitride layer. Finally, a metal is deposited to completely fill the grooves and the contact openings.
摘要:
Gearwheel pump, having a housing with at least two intermeshing gears with shafts supported by slide bearings lubricated with pumping medium (M) fed from a suction side to a pressure side, a return duct which leads pumping medium which flows outward through the plain bearing back to the suction side, and a valve (5) having a stationary part and a moveable part (20, 21). The valve (5) has a setting characteristic which runs, as a first approximation, linearly at least in one region, wherein the setting characteristic is defined by a differential pressure (Δp) across the valve as a function of a setting path (x) in the valve (5) thereby significantly improving capability for setting the pressure in the transition region between the plain bearing and a dynamic seal of a driveshaft which is guided outward.
摘要:
The present invention relates to a heat storage system with a plurality of storage tanks, in which a latent heat storage medium is disposed, and with a conduit system with supply conduits for supplying heat into the storage tanks and with discharge conduits for removing heat from the storage tanks, wherein the conduit system includes one or more valves by means of which at least one supply conduit to at least one of the storage tanks and/or at least one discharge conduit from at least one of the storage tanks can be shut off or be varied in its flow rate, and with a control unit which is connected with the one or more valves and is configured such that it actuates the same.
摘要:
A conductor for interconnecting integrated circuit components having improved reliability. The conductor includes a liner surrounding at least three surfaces of the conductor, producing a low textured conductor. It has been found that low textured conductor results in improved electromigration lifetime.