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公开(公告)号:US09024058B2
公开(公告)日:2015-05-05
申请号:US13256101
申请日:2010-03-12
IPC分类号: C07C309/00 , C07C313/04 , C07C303/32 , C07C381/12 , G03F7/004 , G03F7/039
CPC分类号: C07C313/04 , C07C303/32 , C07C381/12 , G03F7/0045 , G03F7/0046 , G03F7/0392 , C07C309/08 , C07C309/12
摘要: An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing the ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting the ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator in chemically amplified resists and the like.
摘要翻译: 通过使用有机碱,同时用硫酸化剂硫化溴氟醇来获得羟基氟烷基亚磺酸铵。 通过氧化羟基氟烷基亚磺酸铵得到羟基氟烷基磺酸铵。 通过酯化将羟基氟烷基磺酸铵转化成鎓盐得到氟代烷基磺酸鎓鎓盐。 该氟鎓烷基磺酸鎓可用作化学放大抗蚀剂等中的光致酸产生剂。