Method of manufacturing actuator device, and liquid jet device
    2.
    发明申请
    Method of manufacturing actuator device, and liquid jet device 有权
    制造执行器装置的方法和液体喷射装置

    公开(公告)号:US20050210645A1

    公开(公告)日:2005-09-29

    申请号:US11076028

    申请日:2005-03-10

    摘要: An object of the present invention is to provide a method of manufacturing an actuator device, and a liquid jet head, which can improve characteristics of a piezoelectric layer constituting piezoelectric elements and can stabilize the characteristics of the piezoelectric layer. A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

    摘要翻译: 本发明的目的在于提供一种能够提高构成压电元件的压电层的特性,并能够稳定压电体层的特性的致动器装置和液体喷射头的制造方法。 形成振动板的步骤包括形成绝缘膜以使绝缘膜的表面粗糙度Ra在1nm至3nm的范围内的步骤:绝缘膜由已获得的氧化锆制成 通过沉积锆层,因此通过在预定温度下热氧化锆层,以及构成振动板最上表面的绝缘膜。 此外,形成压电元件的步骤包括:通过使用溅射法将钛(Ti)施加到下电极上并在其上形成晶种钛层的步骤; 以及通过将压电材料施加到种子钛层上形成压电前体膜的步骤,以及通过烘烤形成压电层并使压电前体层结晶的步骤。

    Actuator device, liquid jet head and liquid jet apparatus
    4.
    发明申请
    Actuator device, liquid jet head and liquid jet apparatus 有权
    致动器装置,液体喷射头和液体喷射装置

    公开(公告)号:US20050190239A1

    公开(公告)日:2005-09-01

    申请号:US11056207

    申请日:2005-02-14

    摘要: Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between the first and second oxide films 50 and 55 is not more than 10%.

    摘要翻译: 提供了致动器装置,液体喷射头和液体喷射装置,其可以通过防止形成振动板的各个膜的剥离来提高可靠性。 振动板具有形成在通道形成基板10的一个表面上的第一氧化膜(弹性膜50)和通过溅射法形成在第一氧化物膜50上的第二氧化膜(绝缘膜55)。 在第一和第二氧化物膜50和55之间的界面的仅一部分中,形成改变的层,其具有作为第一氧化膜50中包含的除了氧以外的构成元素的第一元素,第二元素是 第二氧化膜55中包含的除了氧以外的构成元素,其中第一元素的比例低于第一氧化物膜50中的比例和第二元素的比例低于第二元素 氧化膜55.第一和第二氧化物膜50和55之间的整个界面中的改变层的比例不大于10%。

    Method of manufacturing an actuator device
    8.
    发明授权
    Method of manufacturing an actuator device 有权
    制造执行装置的方法

    公开(公告)号:US07320163B2

    公开(公告)日:2008-01-22

    申请号:US11076028

    申请日:2005-03-10

    IPC分类号: H01L41/08

    摘要: A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

    摘要翻译: 形成振动板的步骤包括形成绝缘膜以使绝缘膜的表面粗糙度Ra在1nm至3nm的范围内的步骤:绝缘膜由已获得的氧化锆制成 通过沉积锆层,因此通过在预定温度下热氧化锆层,以及构成振动板最上表面的绝缘膜。 此外,形成压电元件的步骤包括:通过使用溅射法将钛(Ti)施加到下电极上并在其上形成晶种钛层的步骤; 以及通过将压电材料施加到种子钛层上形成压电前体膜的步骤,以及通过烘烤形成压电层并使压电前体层结晶的步骤。

    Method of manufacturing a piezoelectric element and a liquid ink jet head
    10.
    发明授权
    Method of manufacturing a piezoelectric element and a liquid ink jet head 失效
    制造压电元件和液体喷墨头的方法

    公开(公告)号:US07343654B2

    公开(公告)日:2008-03-18

    申请号:US11040090

    申请日:2005-01-24

    申请人: Li Xin-Shan

    发明人: Li Xin-Shan

    IPC分类号: H04R17/00 H05K3/02

    摘要: Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.

    摘要翻译: 本发明提供压电元件及其制造方法以及能够改善并均匀化压电体层的特性的液体喷射头。 包括:在其间形成种子钛层的步骤,通过钛(Ti)施加至少两次,以期望的膜厚形成晶种钛层; 以及通过在种子钛层上施加压电材料来形成压电前体膜的步骤,然后通过烘烤使压电前体膜结晶,从而形成压电层。