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    MEASURING APPARATUS HAVING NANOTUBE PROBE
    2.
    发明申请
    MEASURING APPARATUS HAVING NANOTUBE PROBE 审中-公开
    具有纳米管探针的测量装置

    公开(公告)号：US20090243637A1

    公开(公告)日：2009-10-01

    申请号：US12412113

    申请日：2009-03-26

    申请人： Makoto OKAI ,  Motoyuki Hirooka

    发明人： Makoto OKAI ,  Motoyuki Hirooka

    IPC分类号： G01R27/00

    CPC分类号： G01R1/06761

    摘要： An object of the present invention is to provide a measuring apparatus such as a conduction characteristics evaluation apparatus, a probe microscope, etc. having a nanotube probe, wherein the measuring apparatus is succeeded in reducing the electrical resistance of the carbon nanotube as well as the electrical resistance between the carbon nanotube and a metal substrate to improve electrical conduction characteristics of the nanotube probe and attain a uniform diameter, thus improving the measurement accuracy.In order to solve the above-mentioned problem, there is provided a conduction characteristics evaluation apparatus having a nanotube probe made of a nanotube coated by tiny fragments of graphene sheets to improve the wettability with respect to metal materials and then coated by a metal layer, or a conduction characteristics evaluation apparatus having a nanotube probe made of a metal-coated amorphous nanotube composed of tiny fragments of graphene sheets.

    摘要翻译： 本发明的目的是提供一种具有纳米管探针的导电特性评价装置，探针显微镜等测量装置，其中测量装置成功地降低了碳纳米管的电阻以及 碳纳米管和金属基板之间的电阻，以改善纳米管探针的导电特性并获得均匀的直径，从而提高测量精度。 为了解决上述问题，提供了一种具有纳米管探针的导电特性评价装置，该纳米管探针由石墨烯片的微小碎片涂覆的纳米管构成，以提高相对于金属材料的润湿性，然后用金属层涂覆， 或具有由石墨烯片的微小碎片构成的金属涂覆的无定形纳米管制成的纳米管探针的导电特性评价装置。

    Electrically connected graphene-metal electrode device, and electronic device, electronic integrated circuit and electro-optical integrated circuit using same
    4.
    发明授权
    Electrically connected graphene-metal electrode device, and electronic device, electronic integrated circuit and electro-optical integrated circuit using same 有权
    电气连接的石墨烯 - 金属电极器件，电子器件，电子集成电路和使用其的电光集成电路

    公开(公告)号：US08278658B2

    公开(公告)日：2012-10-02

    申请号：US12766960

    申请日：2010-04-26

    申请人： Makoto Okai ,  Motoyuki Hirooka

    发明人： Makoto Okai ,  Motoyuki Hirooka

    IPC分类号： H01L29/40 ,  H01B1/02

    CPC分类号： H01L29/1606

    摘要： An device according to the present invention comprises: graphene; and a metal electrode, the metal electrode and the graphene being electrically connected, the following relationship of Eq. (1) being satisfied: coth ⁡ ( r GP r C ⁢ S )

    摘要翻译： 根据本发明的装置包括：石墨烯; 和金属电极，金属电极和石墨烯电连接，等式 （1）满足：coth⁡（r GP r C S）<1.3，等式 （1）其中rGP（以＆OHgr / /μm2为单位）表示每单位面积的石墨烯层的电阻，rC（以＆OHgr;μm2为单位）表示石墨烯层与金属之间的单位面积的接触电阻 电极，S表示石墨烯层和金属电极之间的接触面积（以μm2为单位）。

    SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME
    7.
    发明申请
    SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME 有权
    扫描探针显微镜及其使用方法观察样品

    公开(公告)号：US20100218287A1

    公开(公告)日：2010-08-26

    申请号：US12712745

    申请日：2010-02-25

    申请人： Toshihiko NAKATA ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Makoto Okai ,  Motoyuki Hirooka

    发明人： Toshihiko NAKATA ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Makoto Okai ,  Motoyuki Hirooka

    IPC分类号： G01Q20/02 ,  G01Q60/18

    CPC分类号： G01Q60/22 ,  G01Q70/12

    摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.

    摘要翻译： 在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元 增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息 分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

    MICROCONTACT PROBER
    8.
    发明申请
    MICROCONTACT PROBER 有权

    公开(公告)号：US20120090056A1

    公开(公告)日：2012-04-12

    申请号：US13378286

    申请日：2010-05-26

    申请人： Motoyuki Hirooka ,  Makoto Okai

    发明人： Motoyuki Hirooka ,  Makoto Okai

    IPC分类号： G01Q30/02

    CPC分类号： G01Q60/40 ,  G01Q70/12 ,  G01R1/06727 ,  G01R1/06744 ,  G01R31/2887

    摘要： The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.

    摘要翻译： 当使用具有导电纳米管，纳米线或纳米柱探针的微探针探针时，探针和测量样品之间的接触引起的应力得到改善，接触界面处的绝缘层被去除，从而降低了接触电阻，并且性能 的半导体器件检查得到改进。 微接触探针包括悬臂探针，其中每个悬臂设置有从设置在前端的保持器突出50至100nm的纳米线，纳米柱或金属涂覆的碳纳米管探针和用于水平振动悬臂的振动机构 关于这个问题。 支架的前端可以从悬臂的自由端突出，并且可以从悬臂上方检查支架的前端。

    GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME
    9.
    发明申请
    GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME 失效
    具有改善的石墨和金属电极之间的电气接触的石墨电路板和包括其的装置

    公开(公告)号：US20110198558A1

    公开(公告)日：2011-08-18

    申请号：US13013984

    申请日：2011-01-26

    申请人： Makoto Okai ,  Motoyuki Hirooka ,  Yasuo Wada

    发明人： Makoto Okai ,  Motoyuki Hirooka ,  Yasuo Wada

    IPC分类号： H01L29/06

    CPC分类号： H01L29/1606 ,  G02B6/4246 ,  H01L21/2855 ,  H01L29/41 ,  H01L29/45 ,  H01L29/7781 ,  H01L29/78603 ,  H01L29/78684

    摘要： A circuit board having a graphene circuit according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more), the patterned aluminum oxide film having a recessed region whose surface has one or more cone-shaped recesses therein; a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film having a contact region that covers the recessed region, the graphene film growing parallel to a flat surface of the recessed region and parallel to an inner wall surface of each cone-shaped recess of the recessed region; and a patterned metal film, a part of the patterned metal film covering and having electrical contact with the contact region, the patterned metal film filling each recess covered by the graphene film.

    摘要翻译： 根据本发明的具有石墨烯电路的电路板包括：基底; 形成在基底基板上的图案化氧化铝膜，图案化的氧化铝膜具有平均组成为Al 2-x O 3 + x（其中x为0或更大）的图案化氧化铝膜，图案化的氧化铝膜具有凹陷区域，其表面具有一个或多个 锥形凹槽; 优选仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜具有覆盖所述凹陷区域的接触区域，所述石墨烯膜平行于所述凹陷区域的平坦表面生长 并且平行于凹陷区域的每个锥形凹部的内壁表面; 以及图案化的金属膜，所述图案化的金属膜的一部分覆盖并与所述接触区域电接触，所述图案化金属膜填充由所述石墨烯膜覆盖的每个凹部。

    Graphene grown substrate and electronic/photonic integrated circuits using same
    10.
    发明授权
    Graphene grown substrate and electronic/photonic integrated circuits using same 失效
    石墨烯生长衬底和电子/光子集成电路使用相同

    公开(公告)号：US08476739B2

    公开(公告)日：2013-07-02

    申请号：US12624437

    申请日：2009-11-24

    申请人： Makoto Okai ,  Motoyuki Hirooka ,  Takashi Kyotani ,  Hironori Orikasa

    发明人： Makoto Okai ,  Motoyuki Hirooka ,  Takashi Kyotani ,  Hironori Orikasa

    IPC分类号： H01L23/58

    CPC分类号： H01L21/0242 ,  C23C16/26 ,  C23C16/56 ,  C30B25/02 ,  C30B29/02 ,  H01L21/02381 ,  H01L21/02488 ,  H01L21/02527 ,  H01L21/0262 ,  H01L29/78603 ,  H01L29/78684

    摘要： A graphene-on-oxide substrate according to the present invention includes: a substrate having a metal oxide layer formed on its surface; and, formed on the metal oxide layer, a graphene layer including at least one atomic layer of the graphene. The graphene layer is grown generally parallel to the surface of the metal oxide layer, and the inter-atomic-layer distance between the graphene atomic layer adjacent to the surface of the metal oxide layer and the surface atomic layer of the metal oxide layer is 0.34 nm or less. Preferably, the arithmetic mean surface roughness Ra of the metal oxide layer is 1 nm or less.

    摘要翻译： 根据本发明的石墨烯氧化物衬底包括：在其表面上形成有金属氧化物层的衬底; 并且在所述金属氧化物层上形成包括所述石墨烯的至少一个原子层的石墨烯层。 石墨烯层通常平行于金属氧化物层的表面生长，并且与金属氧化物层的表面相邻的石墨烯原子层与金属氧化物层的表面原子层之间的原子间距离为0.34 nm以下。 优选地，金属氧化物层的算术平均表面粗糙度Ra为1nm以下。