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公开(公告)号:US07041342B2
公开(公告)日:2006-05-09
申请号:US10683088
申请日:2003-10-10
IPC分类号: C23C16/56 , C23C16/24 , C23C16/515
CPC分类号: H01L21/0245 , C23C16/24 , C23C16/515 , C23C16/56 , H01L21/0242 , H01L21/02507 , H01L21/02532 , H01L21/0262 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02P70/521
摘要: There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.
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公开(公告)号:US06670543B2
公开(公告)日:2003-12-30
申请号:US10056802
申请日:2002-01-25
IPC分类号: H01L3104
CPC分类号: H01L21/0245 , C23C16/24 , C23C16/515 , C23C16/56 , H01L21/0242 , H01L21/02507 , H01L21/02532 , H01L21/0262 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02P70/521
摘要: There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.
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