公开(公告)号：US5283942A

公开(公告)日：1994-02-08

申请号：US998085

申请日：1992-12-29

申请人： Mao-Min Chen ,  Jyh-Shuey J. Lo ,  Po-Kang Wang

发明人： Mao-Min Chen ,  Jyh-Shuey J. Lo ,  Po-Kang Wang

IPC分类号： G11B5/31 ,  G11B5/42

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A process for producing a planar thin film magnetic head wherein a sacrificial layer is introduced to provide control of the gap planarization procedure. Unbounded planar layers of lower pole-tip material and nonmagnetic gap material are first deposited and covered with a sacrificial layer that may be selectively removed by solvent. A critical layer island is then formed by etching the excess, thereby ensuring ideal planar characteristics at the edges of the critical gap layer. Following island formation, the entire assembly is covered with a nonmagnetic insulating layer and lapped or etched smooth. This planarization process is adjusted to end in the sacrificial layer. The remaining sacrificial layer material is then removed by solvent, a step that not only ensures the integrity of the underlying critical gap and pole layers but also creates the upper step needed for staggered pole-tip and conformal pole-tip head configurations.

摘要翻译： 一种制造平面薄膜磁头的方法，其中引入牺牲层以提供间隙平坦化过程的控制。 首先沉积下极尖材料和非磁性间隙材料的无界平面层，并用可以通过溶剂选择性去除的牺牲层覆盖。 然后通过蚀刻过量形成临界层岛，从而确保在临界间隙层的边缘处的理想平面特性。 随着岛形成，整个组件被非磁性绝缘层覆盖并且被研磨或蚀刻光滑。 该平坦化处理被调整为在牺牲层中结束。 然后通过溶剂去除剩余的牺牲层材料，该步骤不仅确保了下面的关键间隙和极层的完整性，而且产生了交错的极尖和共形极尖头构造所需的上部步骤。

公开(公告)号：US5438747A

公开(公告)日：1995-08-08

申请号：US208398

申请日：1994-03-09

申请人： Mohamad T. Krounbi ,  Jyh-Shuey J. Lo ,  Ching H. Tsang ,  Robert M. Valletta

发明人： Mohamad T. Krounbi ,  Jyh-Shuey J. Lo ,  Ching H. Tsang ,  Robert M. Valletta

IPC分类号： G11B5/31 ,  G11B5/39

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49048

摘要： A merged MR head is provided which has vertically aligned sidewalls so as to minimize side-fringing and improve off-track performance. The bottom pole piece P1, which comprises the second shield layer S2 of the read head, has a pedestal pole tip with a short length dimension. A pedestal pole tip with a length as short as two times the length of the gap layer G optimally minimizes the sidewriting and improves off-track performance. The bottom pole tip structure of the write head is constructed by ion beam milling using the top pole tip structure as a mask. The ion beam milling is directed at an angle to the sidewalls of the top pole tip structure which causes the bottom pole tip structure to be milled with sidewalls which align with the top pole tip structure. The ion beam milling can comprise two angled beams, either sequentially or simultaneously, the first beam performing primarily a cutting operation and some clean up work while the second beam primarily conducts clean up work of the redeposition of the debris caused by the cutting. In another embodiment, a single angled ion beam can be employed, provided its angle is within a particular range.

摘要翻译： 提供了具有垂直对齐的侧壁的合并的MR头，以便使边缘最小化并且提高离轨性能。 包括读取头的第二屏蔽层S2的底极片P1具有短长度尺寸的基座极头。 长度短到间隙层G的长度的两倍的基座极尖最优化了笔迹的最小化并改善了离轨性能。 写头的底极尖端结构是通过使用顶极尖端结构作为掩模的离子束铣削构成的。 离子束铣削与顶极尖端结构的侧壁成一角度地引导，这导致底极尖端结构被与顶极尖端结构对准的侧壁铣削。 离子束铣削可以包括两个成角度的梁，顺序地或同时地，第一梁主要执行切割操作和一些清理工作，而第二梁主要进行由切割引起的碎片的再沉积的清理工作。 在另一个实施例中，只要其角度在特定范围内即可使用单角度离子束。

公开(公告)号：US5264981A

公开(公告)日：1993-11-23

申请号：US745039

申请日：1991-08-14

申请人： Richard T. Campbell ,  Jyh-Shuey J. Lo

发明人： Richard T. Campbell ,  Jyh-Shuey J. Lo

IPC分类号： G01R33/09 ,  C21D1/04 ,  G11B5/31 ,  G11B5/33 ,  G11B5/39 ,  H01F10/14 ,  H01F10/32 ,  H01F41/30 ,  H01L43/08 ,  C23C30/00 ,  G11B5/11 ,  G11B5/147

CPC分类号： B82Y25/00 ,  B82Y40/00 ,  G11B5/31 ,  G11B5/3146 ,  G11B5/3903 ,  H01F10/147 ,  H01F10/32 ,  H01F41/302 ,  C21D1/04 ,  Y10T428/1129

摘要： A soft magnetic film includes a laminated structure having an alternating plurality of first magnetic and second magnetic film. The first magnetic films is of a predetermined thickness range and is made of a magnetic alloy of nickel, iron and nitrogen with the nitrogen present from greater than zero to 20 atomic percent. The second magnetic film is of a predetermined thickness range and is made of a magnetic alloy of iron and nitrogen with the nitrogen present from greater than zero to about 20 atomic percent. The films can be annealed in an applied magnetic field. The multilayer films have application as pole pieces and shields in magnetic heads. The magnetic heads are for use in dynamic storage systems including disk and tape media.

摘要翻译： 软磁性膜包括具有交替的多个第一磁性和第二磁性膜的叠层结构。 第一磁性膜具有预定的厚度范围，并且由镍，铁和氮的磁性合金制成，其中存在大于零至20原子百分比的氮。 第二磁性膜具有预定的厚度范围，并且由铁和氮的磁性合金制成，氮存在从大约零到大约20原子百分比。 膜可以在施加的磁场中退火。 多层薄膜可用作磁头中的极片和屏蔽。 磁头用于动态存储系统，包括磁盘和磁带介质。