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    Method for laser machining a sample having a crystalline structure
    1.
    发明授权
    Method for laser machining a sample having a crystalline structure 有权
    用于激光加工具有晶体结构的样品的方法

    公开(公告)号：US08853592B2

    公开(公告)日：2014-10-07

    申请号：US13003450

    申请日：2009-07-09

    申请人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    发明人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    IPC分类号： B23K26/40 ,  B23K26/14 ,  B23K26/08 ,  B23K26/06 ,  B23K26/03

    CPC分类号： B23K26/03 ,  B23K26/0622 ,  B23K26/0853 ,  B23K26/14 ,  B23K26/1423 ,  B23K26/348 ,  H01J2237/2813

    摘要： A charged particle beam and a laser beam are used together to micromachine a substrate. A first beam alters the state of a region of the work piece, and the second beam removes material whose state was altered. In one embodiment, an ion beam can create photon absorbing defects to lower the local ablation threshold, allowing the laser beam to remove material in a region defined by the ion beam. The combination of laser beam and charged particle beam allows the creation of features similar in size to the charged particle beam spot size, at milling rates greater than charged particle processing because of the increased energy provided by the laser beam.

    摘要翻译： 带电粒子束和激光束一起用于微机械衬底。 第一光束改变工件的区域的状态，第二光束去除状态被改变的材料。 在一个实施例中，离子束可以产生光子吸收缺陷以降低局部消融阈值，允许激光束去除由离子束限定的区域中的材料。 激光束和带电粒子束的组合允​​许在大小与带电粒子束点尺寸相似的特征的情况下产生大于带电粒子处理的铣削速率，因为激光束提供的能量增加。

    Method and Apparatus for Laser Machining
    2.
    发明申请
    Method and Apparatus for Laser Machining 有权
    激光加工方法与装置

    公开(公告)号：US20110115129A1

    公开(公告)日：2011-05-19

    申请号：US13003450

    申请日：2009-07-09

    申请人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    发明人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    IPC分类号： B29C35/08 ,  B23K26/36

    CPC分类号： B23K26/03 ,  B23K26/0622 ,  B23K26/0853 ,  B23K26/14 ,  B23K26/1423 ,  B23K26/348 ,  H01J2237/2813

    摘要： A charged particle beam and a laser beam are used together to micromachine a substrate. A first beam alters the state of a region of the work piece, and the second beam removes material whose state was altered. In one embodiment, an ion beam can create photon absorbing defects to lower the local ablation threshold, allowing the laser beam to remove material in a region defined by the ion beam. The combination of laser beam and charged particle beam allows the creation of features similar in size to the charged particle beam spot size, at milling rates greater than charged particle processing because of the increased energy provided by the laser beam.

    摘要翻译： 带电粒子束和激光束一起用于微机械衬底。 第一光束改变工件的区域的状态，第二光束去除状态被改变的材料。 在一个实施例中，离子束可以产生光子吸收缺陷以降低局部消融阈值，允许激光束去除由离子束限定的区域中的材料。 激光束和带电粒子束的组合允​​许在大小与带电粒子束点尺寸相似的特征的情况下产生大于带电粒子处理的铣削速率，因为激光束提供的能量增加。

    System for sensing a sample
    3.
    发明授权
    System for sensing a sample 失效
    用于感测样品的系统

    公开(公告)号：US07278301B2

    公开(公告)日：2007-10-09

    申请号：US11423098

    申请日：2006-06-08

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    IPC分类号： G01B5/28 ,  G01N13/10 ,  G01N13/16

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。

    System for Sensing a Sample
    4.
    发明申请
    System for Sensing a Sample 失效
    感应样品系统

    公开(公告)号：US20060230819A1

    公开(公告)日：2006-10-19

    申请号：US11423098

    申请日：2006-06-08

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven Eaton ,  Amin Samsavar ,  William Wheeler

    IPC分类号： G01B5/28

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    摘要翻译： 扫描仪或扫描探针显微镜可以跨样品表面进行扫描，其间的距离被控制以允许感测尖端间歇地接触表面，以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时，尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行：快速查找模式以查找特征，以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米，以减少尖端损伤的可能性来执行快速步进模式。 在该模式中，在每个垂直步骤之后，增加尖端和样品之间的间隔，检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触，则采取一个或多个垂直步骤来增加分离，并且不采取垂直步骤来减小分离，并且不会引起横向相对运动，直到确定尖端和样品 不再联系。

    Dual stage instrument for scanning a specimen
    5.
    发明申请
    Dual stage instrument for scanning a specimen 有权
    用于扫描样品的双级仪器

    公开(公告)号：US20050005688A1

    公开(公告)日：2005-01-13

    申请号：US10867922

    申请日：2004-06-14

    申请人： Amin Samsavar ,  William Wheeler ,  Steven Eaton ,  Jian-Ping Zhuang

    发明人： Amin Samsavar ,  William Wheeler ,  Steven Eaton ,  Jian-Ping Zhuang

    IPC分类号： G01Q70/06 ,  G01B3/00 ,  G01B5/28 ,  G01B7/34 ,  G01B21/30 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/00 ,  G01Q90/00 ,  G12B5/00

    CPC分类号： G01Q10/04 ,  G01B3/008 ,  G01B7/34 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q70/06 ,  Y10S977/834 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/867 ,  Y10S977/868 ,  Y10S977/872 ,  Y10S977/874

    摘要： A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

    摘要翻译： 双级扫描仪器包括用于感测样品参数的传感器和用于引起传感器和样品之间的相对运动的粗细级和细级级的传感器。 粗糙度分辨率约为1微米，细微分辨率为1纳米或更好。 当传感器组件和样品之间产生相对运动时，传感器用于检测参数。 传感器可用于在检测到高度变化的同时检测样品表面的高度变化以及热变化，静电，磁性，光反射率或光传输参数。 通过以更粗糙的分辨率执行扫描，并且在固定的相对位置使用相同的探针尖端或两个探针尖端短扫描高分辨率，可以精确地相关联从长扫描和短扫描得到的数据。

    System for sensing a sample
    6.
    发明授权
    System for sensing a sample 有权

    公开(公告)号：US06520005B2

    公开(公告)日：2003-02-18

    申请号：US09313962

    申请日：1999-05-18

    申请人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    发明人： Thomas McWaid ,  Peter Panagas ,  Steven G. Eaton ,  Amin Samsavar ,  William R. Wheeler

    IPC分类号： G01B528

    CPC分类号： G01B3/008 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/34 ,  Y10S977/851

    摘要： A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.

    Methods and systems for determining a property of an insulating film
    7.
    发明授权
    Methods and systems for determining a property of an insulating film 有权
    用于确定绝缘膜性能的方法和系统

    公开(公告)号：US07358748B1

    公开(公告)日：2008-04-15

    申请号：US11291075

    申请日：2005-11-30

    申请人： Thomas G. Miller ,  Gregory S. Horner ,  Amin Samsavar ,  Zhiwei Xu ,  Patrick Stevens

    发明人： Thomas G. Miller ,  Gregory S. Horner ,  Amin Samsavar ,  Zhiwei Xu ,  Patrick Stevens

    IPC分类号： G01R27/08 ,  G01R27/26 ,  G01R31/302 ,  G01N27/60

    CPC分类号： H01L22/12 ,  G01R31/2831 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage decay of the film. The method may also include determining the property of the film using the charge density, the surface voltage potential, and the rate of voltage decay. A method for determining a thickness of an insulating film is provided. The method may include depositing a charge on the film, measuring a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and measuring a rate of voltage decay of the film. The method may also include determining a thickness of the film using the rate of voltage decay and a theoretical model relating to current leakage and film thickness.

    摘要翻译： 提供一种用于确定绝缘膜的性质的方法。 该方法可以包括获得膜的电荷密度测量，膜相对于衬底的体电压电位的表面电压电势以及膜的电压衰减速率。 该方法还可以包括使用电荷密度，表面电压电位和电压衰减速率确定膜的性质。 提供一种确定绝缘膜厚度的方法。 该方法可以包括在膜上沉积电荷，测量膜相对于衬底的体电压电位的表面电压电位，以及测量膜的电压衰减速率。 该方法还可以包括使用电压衰减速率和与电流泄漏和膜厚度有关的理论模型来确定膜的厚度。