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公开(公告)号：US07112791B2
公开(公告)日：2006-09-26
申请号：US10916451
申请日：2004-08-12
申请人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
发明人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
IPC分类号： H01J37/00 , H01J37/256
CPC分类号： G06T7/0004 , G01N23/20 , G06T2207/30148 , H01J2237/2487 , H01J2237/2817
摘要： A sample inspection system having a sample stage holding a sample to be inspected, electron beam optics so as to radiate an electron beam to the sample, a detector unit that detects a secondly generated signal generated in response to radiation of the sample by the electron beam, a storage for storing a plurality of images obtained from the generated signal and information for classifying the plurality of images by a type of defect in the sample, and an image processing unit. The image processing unit retrieves any of the plurality of images and classifies the retrieved image depending on the type of defect including an electrical defect and a defect in the figure.
摘要翻译： 具有保持要检查的样品的样品台的样品检查系统，电子束光学以便向样品辐射电子束的检测器单元，检测器单元，其检测响应于通过电子束的样品的辐射而产生的第二生成的信号 用于存储从所生成的信号获得的多个图像的存储器和用于通过样本中的缺陷类型对所述多个图像进行分类的信息，以及图像处理单元。 图像处理单元检索多个图像中的任一个，并且根据包括图中的电缺陷和缺陷的缺陷的类型对检索到的图像进行分类。
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公开(公告)号：US08558173B2
公开(公告)日：2013-10-15
申请号：US11518893
申请日：2006-09-12
申请人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
发明人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
IPC分类号： G01N23/00
CPC分类号： G06T7/0004 , G01N23/20 , G06T2207/30148 , H01J2237/2487 , H01J2237/2817
摘要： An electron beam apparatus equipped with a review function of a semiconductor wafer includes a scanning electron microscope to obtain image information of a semiconductor wafer, and an information processing apparatus to process the image information. The information processing apparatus includes a data input unit to receive positional information of a defect on the wafer, a storage for storing a plurality of image information of a position on the wafer corresponding to the positional information, and an image processing unit that retrieves any of the plurality of image information, and classifies the retrieved image information corresponding to the positional information depending on the type of defect.
摘要翻译： 配备有半导体晶片的检查功能的电子束装置包括扫描电子显微镜以获得半导体晶片的图像信息，以及处理图像信息的信息处理装置。 信息处理装置包括：数据输入单元，用于接收晶片上的缺陷的位置信息，存储用于存储与位置信息对应的晶片上的位置的多个图像信息;以及图像处理单元， 多个图像信息，并且根据缺陷的类型对与位置信息相对应的检索到的图像信息进行分类。
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公开(公告)号：US20050006583A1
公开(公告)日：2005-01-13
申请号：US10916451
申请日：2004-08-12
申请人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
发明人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
IPC分类号： G01Q30/02 , G01N21/956 , G01N23/20 , G01N23/225 , G01Q30/04 , G01Q30/20 , G01R1/06 , G01R31/302 , H01L21/027 , H01L21/66 , G21K7/00 , G01N23/00
CPC分类号： G06T7/0004 , G01N23/20 , G06T2207/30148 , H01J2237/2487 , H01J2237/2817
摘要： A sample inspection system having a sample stage holding a sample to be inspected corresponding to a selected file, electron beam optics so as to radiate an electron beam to the sample, a detector unit that detects a secondly generated signal attributable to the electron beam, a storage for storing a plurality of images obtained from the secondly generated signal and information for classifying the plurality of images by a type of defect in the sample, and an image processing unit. The image processing unit retrieves any of the plurality of images and classifies the retrieved image depending on the type of defect including an electrical defect and a defect in the figure.
摘要翻译： 一种样本检查系统，具有样本台，其保持对应于所选择的文件的待检查样本，电子束光学器件，以便向样本辐射电子束;检测器单元，其检测归因于电子束的第二生成信号; 用于存储从第二生成信号获得的多个图像的存储器和用于通过样本中的缺陷类型对多个图像进行分类的信息，以及图像处理单元。 图像处理单元检索多个图像中的任一个，并且根据包括图中的电缺陷和缺陷的缺陷的类型对检索到的图像进行分类。
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公开(公告)号：US20070023658A1
公开(公告)日：2007-02-01
申请号：US11518893
申请日：2006-09-12
申请人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
发明人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
IPC分类号： G21K7/00
CPC分类号： G06T7/0004 , G01N23/20 , G06T2207/30148 , H01J2237/2487 , H01J2237/2817
摘要： An electron beam apparatus equipped with a review function of a semiconductor wafer includes a scanning electron microscope to obtain image information of a semiconductor wafer, and an information processing apparatus to process the image information. The information processing apparatus includes a data input unit to receive positional information of a defect on the wafer, a storage for storing a plurality of image information of a position on the wafer corresponding to the positional information, and an image processing unit that retrieves any of the plurality of image information, and classifies the retrieved image information corresponding to the positional information depending on the type of defect.
摘要翻译： 配备有半导体晶片的检查功能的电子束装置包括扫描电子显微镜以获得半导体晶片的图像信息，以及处理图像信息的信息处理装置。 信息处理装置包括：数据输入单元，用于接收晶片上的缺陷的位置信息，存储用于存储与位置信息对应的晶片上的位置的多个图像信息;以及图像处理单元， 多个图像信息，并且根据缺陷的类型对与位置信息相对应的检索到的图像信息进行分类。
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公开(公告)号：US06777677B2
公开(公告)日：2004-08-17
申请号：US10463576
申请日：2003-06-18
申请人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
发明人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
IPC分类号： H01J3728
CPC分类号： G06T7/0004 , G01N23/20 , G06T2207/30148 , H01J2237/2487 , H01J2237/2817
摘要： A pattern inspection system for inspecting a substrate surface on which a predetermined pattern is formed with radiation of an electron beam and an optical beam. the pattern inspection system includes a radiation and which radiates an electron beam to the substrate, a detection unit which detects a secondarily generated signal attributable to the radiation of the electron beam, a retrieval unit which retrieves an image from the signal detected by the detection unit, and an image processing unit which classifies the retrieved image depending on a type of the image.
摘要翻译： 一种图案检查系统，用于检查其上形成有电子束和光束的辐射的预定图案的基板表面。 图案检查系统包括辐射并且向基板辐射电子束，检测单元，其检测归因于电子束的辐射的次要生成的信号;检索单元，其从由检测单元检测到的信号中检索图像 以及图像处理单元，其根据图像的类型对检索到的图像进行分类。
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公开(公告)号：US06583414B2
公开(公告)日：2003-06-24
申请号：US09725900
申请日：2000-11-30
申请人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
发明人： Mari Nozoe , Hidetoshi Nishiyama , Shigeaki Hijikata , Kenji Watanabe , Koji Abe
IPC分类号： H01J37147
CPC分类号： G06T7/0004 , G01N23/20 , G06T2207/30148 , H01J2237/2487 , H01J2237/2817
摘要： There are provided an inline inspection system and inspection method for inspecting the substrate surface on which semiconductors and circuit patterns are formed by radiating thereto white beam, laser beam or electron beam, and reviewing, inspecting and discriminating the detected roughness and figure defect, particle and moreover electrical defect on the surface with higher accuracy within a short period of time with the same instrument. Thereby, automatic movement to the position to be reviewed, acquisition of image and classification can be realized. On the occasion of identifying the position to be reviewed on a sample and forming an image through irradiation of electron beam on the basis of the positional information of defect detected with the other inspection instrument, an electrical defect can be reviewed with the voltage contrast mode by designating the electron beam irradiation condition, detectors and detecting condition depending on a kind of defect to be reviewed. The image obtained is automatically classified in the image processing unit and the result is then additionally output to the defect file.
摘要翻译： 提供了一种在线检查系统和检查方法，用于通过向其发射白光束，激光束或电子束来检查其上形成有半导体和电路图案的衬底表面，并且检查和检查检测到的粗糙度和图形缺陷，颗粒和 此外，在相同仪器的短时间内，表面具有较高精度的电气缺陷。 因此，可以实现自动移动到要检查的位置，获取图像和分类。 在通过基于用其他检查仪检测到的缺陷的位置信息的基础上，通过照射电子束来识别要检查的位置并形成图像的情况下，可以通过电压对比度模式来检查电缺陷 指定电子束照射条件，检测器和检测条件取决于要检查的缺陷的种类。 所获得的图像被自动分类到图像处理单元中，然后将结果另外输出到缺陷文件。
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公开(公告)号：US09371268B2
公开(公告)日：2016-06-21
申请号：US13061329
申请日：2009-08-31
申请人： Koji Abe , Akikazu Ito
发明人： Koji Abe , Akikazu Ito
摘要： An asymmetric chain carbonate can be produced in a single-step reaction comprising a step of reacting methyl nitrite, carbon monoxide, and 0.05-1.5 moles of an aliphatic alcohol having 2-6 carbon atoms or an alicyclic alcohol having 5-6 carbon atoms per one mole of methyl nitrile in a gaseous phase in the presence of a solid catalyst comprising a platinum group metal or a compound thereof placed on a support.
摘要翻译： 可以在单步反应中制备不对称链碳酸酯，其包括使亚硝酸甲酯，一氧化碳和0.05-1.5摩尔具有2-6个碳原子的脂族醇或具有5-6个碳原子的脂环族醇反应的步骤 在含有铂族金属或其化合物的固体催化剂存在下，在气相中加入1摩尔甲基腈。
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公开(公告)号：US09364400B2
公开(公告)日：2016-06-14
申请号：US14002124
申请日：2012-08-09
申请人： Yosuke Ikebe , Koji Abe
发明人： Yosuke Ikebe , Koji Abe
CPC分类号： A61K8/064 , A61K8/0254 , A61K8/8152 , A61K8/894 , A61K8/895 , A61K2800/612 , A61Q17/04
摘要： The present invention provides a water-in-oil emulsified sunscreen cosmetic characteristically comprising the following (a) through (g): (a) Ultraviolet absorbent (b) Silicone backbone powder (c) Methyl polymethacrylate powder (d) Hydrophobicized platelike powder (e) Surfactant (f) Oil component (g) Water The object of the present invention is to provide a water-in-oil emulsified sunscreen cosmetic that manifests a superior texture during use, a high ultraviolet protection effect, and superior stability.
摘要翻译： 本发明提供一种油包水乳化防晒化妆品，其特征在于包括以下（a）至（g）：（a）紫外线吸收剂（b）硅酮骨架粉末（c）聚甲基丙烯酸甲酯粉末（d）疏水性扁平粉末 ）表面活性剂（f）油成分（g）水本发明的目的是提供一种油包水乳化防晒化妆品，其在使用中表现出优异的质地，高的紫外线防护效果和优异的稳定性。
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公开(公告)号：US09362595B2
公开(公告)日：2016-06-07
申请号：US14111451
申请日：2012-03-26
申请人： Koji Abe , Kazuhiro Miyoshi , Yuichi Kotou
发明人： Koji Abe , Kazuhiro Miyoshi , Yuichi Kotou
IPC分类号： H01M10/056 , H01M10/0567 , H01M10/0569 , H01M10/0525 , H01G11/06 , H01G11/60 , H01M10/48 , H01G11/64
CPC分类号： H01M10/0569 , H01G11/06 , H01G11/60 , H01G11/64 , H01M10/0525 , H01M10/0567 , H01M10/48 , H01M2200/20 , H01M2220/20 , Y02E60/122 , Y02E60/13 , Y02T10/7011 , Y02T10/7022
摘要： The present invention is to provide a nonaqueous electrolytic solution prepared by dissolving an electrolyte salt in a nonaqueous solvent, wherein the nonaqueous solvent includes 0.01 to 40% by volume of an ester having two alkyl groups at the α-position carbon of the carbonyl group and being represented by the following general formula (I), and an energy storage device. (in the above formula, R1 is an alkyl group, an alkenyl group or an alkynyl group in which at least one of the hydrogen atoms may be substituted with a halogen atom, R2 and R3 are an alkyl group in which at least one of the hydrogen atoms may be substituted with a halogen atom, and R2 and R3 may be linked to each other to form a ring. However, when R2 and R3 do not form a ring, R3 is an alkyl group in which at least one of the hydrogen atoms may be substituted with a halogen atom.).
摘要翻译： 本发明提供一种通过将电解质盐溶解在非水溶剂中制备的非水电解液，其中非水溶剂包括0.01至40体积％的在羰基的α-位碳上具有两个烷基的酯， 由以下通式（I）表示，以及储能装置。 （在上式中，R 1是其中至少一个氢原子可以被卤素原子取代的烷基，烯基或炔基，R 2和R 3是烷基，其中至少一个 氢原子可以被卤素原子取代，R2和R3可以彼此连接形成环，但是当R2和R3不形成环时，R3是烷基，其中至少一个氢 原子可以被卤素原子取代）。
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公开(公告)号：US09236635B2
公开(公告)日：2016-01-12
申请号：US14237492
申请日：2012-08-07
申请人： Koji Abe , Kei Shimamoto
发明人： Koji Abe , Kei Shimamoto
IPC分类号： H01M10/0567 , H01M10/0569 , H01M10/0525 , H01M4/131 , H01M4/505 , H01M4/52 , H01M4/58 , H01M4/583 , H01M4/38 , H01M4/485 , C07C309/65 , H01M10/052 , C07C69/65 , C07D327/00 , H01M10/0568
CPC分类号： H01M10/0567 , C07C69/65 , C07C309/65 , C07D327/00 , H01M4/13 , H01M4/131 , H01M4/386 , H01M4/387 , H01M4/485 , H01M4/505 , H01M4/52 , H01M4/525 , H01M4/5825 , H01M4/583 , H01M4/587 , H01M10/052 , H01M10/0525 , H01M10/0568 , H01M10/0569 , Y02E60/122 , Y02T10/7011
摘要： The present invention provides a nonaqueous electrolytic solution capable of improving electrochemical characteristics in a broad temperature range, such as low-temperature cycle properties and low-temperature discharge properties after high-temperature storage, and provides an energy storage device using the nonaqueous electrolytic solution. The invention includes (1) a nonaqueous electrolytic solution of an electrolyte salt dissolved in a nonaqueous solvent, which comprises from 0.001 to 10% by mass of a compound represented by the following general formula (I), and (2) an energy storage device comprising a positive electrode, a negative electrode, and a nonaqueous electrolytic solution of an electrolyte salt dissolved in a nonaqueous solvent, wherein the nonaqueous electrolytic solution is the nonaqueous electrolytic solution of (1). (In the formula, Y represents a group —C(═O)— or a group —S(═O)2—; R3 and R4 each independently represent an aryl group having from 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a halogen atom, or R3 and R4 bonding to each other represent a cycloalkanediyl group or a benzenediyl group, having from 5 to 12 carbon atoms. R represents —C(R1)(R2)— or -L-; R1 and R2 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having from 1 to 4 carbon atoms; and L represents a divalent linking group having from 1 to 6 carbon atoms and optionally substituted with a halogen atom).
摘要翻译： 本发明提供一种能够在高温保存后的低温循环特性和低温放电性等宽温度范围内提高电化学特性的非水电解液，提供使用该非水电解液的储能装置。 本发明包括（1）溶解在非水溶剂中的电解质盐的非水电解液，其含有0.001〜10质量％的下述通式（I）表示的化合物，和（2）能量储存装置 包括正极，负极和溶解在非水溶剂中的电解质盐的非水电解液，其中非水电解液是（1）的非水电解液。 （在该式中，Y表示基团-C（= O） - 或基团-S（= O）2 - ; R 3和R 4各自独立地表示具有6至10个碳原子的芳基，其中至少一个氢 原子被卤素原子取代，或者R 3和R 4彼此键合表示具有5至12个碳原子的环烷二基或苯二基，R表示-C（R 1）（R 2） - 或-L-; R 1 和R 2各自独立地表示氢原子，卤素原子或具有1〜4个碳原子的烷基; L表示具有1〜6个碳原子并且任选被卤素原子取代的二价连接基团）。
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