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13 条记录 (耗时 0.042 秒)

    Substrate carrier system
    2.
    发明授权
    Substrate carrier system 失效
    基板载体系统

    公开(公告)号：US5755473A

    公开(公告)日：1998-05-26

    申请号：US695044

    申请日：1996-08-09

    申请人： Eugene A. Swain ,  Thomas E. Smith ,  Alan D. Smith ,  Robert S. Foltz ,  Peter J. Schmitt ,  Stanley J. Pietrzykowski, Jr. ,  Kamran U. Zaman

    发明人： Eugene A. Swain ,  Thomas E. Smith ,  Alan D. Smith ,  Robert S. Foltz ,  Peter J. Schmitt ,  Stanley J. Pietrzykowski, Jr. ,  Kamran U. Zaman

    IPC分类号： H01L21/00 ,  B66C1/56

    CPC分类号： H01L21/6715

    摘要： There is disclosed a carrier system for carrying a substrate batch including: (a) a heat treated, integral pallet having a pallet thickness, a top surface, and a bottom surface, wherein the pallet defines a plurality of passageways extending completely through the pallet thickness to form a first plurality of openings on the top surface and the bottom surface, wherein the pallet also defines a plurality of chambers extending through at least a portion of the pallet thickness to form a second plurality of openings on the bottom surface; and (b) a plurality of chuck assemblies partially disposed in the plurality of the chambers and adapted to engage the substrate batch, wherein the pallet has sufficient structural rigidity such that while the carrier system is carrying the substrate batch, even when the carrier system is subjected to an elevated temperature, there is absent any appreciable bending and twisting of the pallet.

    摘要翻译： 公开了一种用于承载衬底批次的载体系统，包括：（a）具有托盘厚度，顶表面和底表面的经热处理的整体托盘，其中托盘限定完全延伸穿过托盘厚度的多个通道 以在所述顶表面和所述底表面上形成第一多个开口，其中所述托盘还限定延伸穿过所述托盘厚度的至少一部分的多个室，以在所述底表面上形成第二多个开口; 和（b）多个卡盘组件，其部分地设置在所述多个室中并且适于接合所述基底批次，其中所述托盘具有足够的结构刚性，使得当所述载体系统承载所述基底批次时，即使所述载体系统 受到高温的影响，没有任何明显的弯曲和扭曲的托盘。

    Laser ablation nozzle
    3.
    发明授权
    Laser ablation nozzle 失效
    激光烧蚀喷嘴

    公开(公告)号：US5496985A

    公开(公告)日：1996-03-05

    申请号：US221955

    申请日：1994-04-01

    申请人： Robert S. Foltz ,  Ronald A. Gaither ,  Alfred O. Klein ,  John J. Wilbert ,  Henry T. Mastalski ,  Peter J. Schmitt ,  Eugene A. Swain ,  Christopher E. Dackson

    发明人： Robert S. Foltz ,  Ronald A. Gaither ,  Alfred O. Klein ,  John J. Wilbert ,  Henry T. Mastalski ,  Peter J. Schmitt ,  Eugene A. Swain ,  Christopher E. Dackson

    IPC分类号： B23K26/12 ,  B23K26/14

    CPC分类号： B23K26/1476 ,  B23K26/12 ,  B23K26/123 ,  B23K26/127 ,  B23K26/142 ,  B23K26/1436

    摘要： A laser ablation apparatus includes a nozzle, disposed through a housing, wherein the nozzle has: (i) a nozzle housing comprised of a bottom surface; (ii) a first orifice defined by the bottom surface; (iii) a second orifice defined by the bottom surface; (iv) a first passageway defined by the nozzle housing in communication with the first orifice; and (v) a second passageway defined by the nozzle housing in communication with the second orifice, wherein the portion of the second passageway adjacent the second orifice forms an angle .theta..sub.3 with the portion of the first passageway adjacent the first orifice, wherein the angle .theta..sub.3 is effective for directing a first fluid stream through the second orifice at the surface of the enclosed substrate portion to facilitate removal of the coating in the form of coating debris during or subsequent to exposure of the coating of an enclosed substrate portion to high energy radiation. A high energy radiation generating apparatus and a first fluid stream generating apparatus are coupled to the nozzle. A second fluid stream nozzle is disposed in a direction for directing a second fluid stream against the first fluid stream to keep coating debris inside the housing. Exhausting apparatus is coupled to the housing.

    摘要翻译： 一种激光烧蚀装置，包括一个通过壳体设置的喷嘴，其中喷嘴具有：（i）由底面构成的喷嘴壳; （ii）由底表面限定的第一孔; （iii）由底表面限定的第二孔; （iv）由所述喷嘴壳体限定的与所述第一孔连通的第一通道; 和（v）由所述喷嘴壳体限定的与所述第二孔口连通的第二通道，其中与所述第二孔口相邻的所述第二通道的所述部分与所述第一通道的所述部分邻近所述第一孔口形成角度θ3， θ3对于引导第一流体流在封闭的基底部分的表面处有效地引导第二流体流，以便于在封闭的基底部分的涂层暴露于高能量期间或之后去除涂层碎屑形式的涂层 辐射。 高能量辐射发生装置和第一流体流产生装置联接到喷嘴。 第二流体流喷嘴设置在用于将第二流体流引导抵靠第一流体流的方向上，以保持涂覆在壳体内的碎屑。 排气装置联接到壳体。

    Electrostatographic imaging drum end cap and drum assembly
    4.
    发明授权
    Electrostatographic imaging drum end cap and drum assembly 失效
    静电成像鼓端盖和鼓组件

    公开(公告)号：US5576803A

    公开(公告)日：1996-11-19

    申请号：US171040

    申请日：1993-12-21

    申请人： Edward C. Williams ,  Geoffrey M. T. Foley ,  Robert S. Foltz ,  William G. Herbert

    发明人： Edward C. Williams ,  Geoffrey M. T. Foley ,  Robert S. Foltz ,  William G. Herbert

    IPC分类号： G03G5/10 ,  G03G15/00 ,  G03G5/00

    CPC分类号： G03G15/751 ,  G03G5/10

    摘要： An electrostatographic imaging member assembly including a hollow electrostatographic imaging drum having a first end and a second end, at least one coating on the drum extending to at least the first end of the drum, the coating having an outer electrostatographic imaging surface and a first drum supporting end cap mounted on the first end of the drum, the first drum supporting end cap including a disk shaped member having an annular skirt encircling an exterior surface of the first end of the cylindrical substrate, the annular skirt having an imaginary axis coextensive with an imaginary axis of the drum. This electrostatographic imaging member assembly may be fabricated by sliding the skirt of the end cap over the end of the drum with or without presoftening of the coating. The electrostatographic imaging member assembly may be utilized in electrostatographic imaging apparatus in which the end caps support electrostatographic imaging apparatus subassembly components.

    摘要翻译： 一种静电摄影成像组件，包括具有第一端和第二端的中空静电摄影成像鼓，鼓上的至少一个涂层延伸至至少滚筒的第一端，涂层具有外部静电成像表面和第一鼓 支撑端盖安装在滚筒的第一端上，第一滚筒支撑端盖包括一个圆盘形构件，该圆盘形构件具有围绕圆柱形基底的第一端的外表面的环形裙部，该环形裙部具有与 滚筒的假想轴。 这种静电摄影成像组件可以通过在或不与涂层预浸的情况下将端盖的裙部滑过滚筒的端部来制造。 静电摄影成像组件可以用在其中端盖支撑静电摄影成像装置子组件部件的静电成像装置中。

    Imaging member end flange and end flange assembly
    8.
    发明授权
    Imaging member end flange and end flange assembly 失效
    成像端部法兰和端部法兰组件

    公开(公告)号：US5752136A

    公开(公告)日：1998-05-12

    申请号：US536033

    申请日：1995-09-29

    申请人： Ismael R. Sanchez ,  Robert S. Foltz ,  Warren F. Brydges ,  William A. Hammond ,  Eugene A. Swain ,  John K. Williams ,  Richard C Petralia ,  Thong H. Vo

    发明人： Ismael R. Sanchez ,  Robert S. Foltz ,  Warren F. Brydges ,  William A. Hammond ,  Eugene A. Swain ,  John K. Williams ,  Richard C Petralia ,  Thong H. Vo

    IPC分类号： G03G21/00 ,  G03G15/00 ,  G03G21/16

    CPC分类号： G03G15/751

    摘要： A hollow cylindrical electrostatographic imaging member supporting end flange including a disk shaped member, a supporting hub extending axially from the disk shaped member and a metal disk coaxially secured to the hub, the disk comprising a plurality of rectangular tabs extending radially from the disk in a direction away from an imaginary axis of the hub for engagement with the hollow cylindrical electrostatographic imaging member upon insertion of the hub and disk shaped member into one end of the hollow cylindrical electrostatographic imaging member. When this end flange is inserted into one end of the hollow cylindrical electrostatographic imaging member, the plurality of rectangular tabs extending radially from the disk engage the inner surface of the hollow cylindrical electrostatographic imaging member.

    摘要翻译： 一种中空圆柱形静电摄影成像构件，其支撑端部凸缘包括圆盘形构件，从盘形构件轴向延伸的支撑毂和同轴固定到毂的金属盘，盘包括从盘的径向延伸的多个矩形翼片 方向远离毂的假想轴线，用于在将毂盘和盘形构件插入中空圆柱形静电摄影成像构件的一端时与中空圆柱形静电摄影成像构件接合。 当该端部凸缘插入中空圆柱形静电摄影成像构件的一端时，从圆盘径向延伸的多个矩形凸片接合中空圆柱形静电摄影成像构件的内表面。

    Barbed ring flange assembly
    10.
    发明授权
    Barbed ring flange assembly 失效
    带刺环法兰组件

    公开(公告)号：US5599265A

    公开(公告)日：1997-02-04

    申请号：US359253

    申请日：1994-12-19

    申请人： Robert S. Foltz

    发明人： Robert S. Foltz

    IPC分类号： F16C13/00 ,  G03G15/00

    CPC分类号： G03G15/751 ,  F16C13/00

    摘要： A hollow cylinder supporting end flange is disclosed comprising a disk shaped member, a supporting hub extending axially from the disk shaped member and an annular ring supported on the hub, the ring comprising a plurality of sharp protrusions or barbs extending from the ring in a direction away from the hub for engagement with the hollow cylindrical member upon insertion of the annular ring into the hollow cylindrical member. This end flange is utilized in an assembly comprising a hollow cylindrical member having a circular cross section and an inner surface and an end flange comprising a disk shaped member having a circular periphery, a supporting hub extending axially from the disk shaped member into one end of the hollow cylindrical member and an annular ring supported on and secured to the hub, the ring comprising a plurality of sharp protrusions extending from the ring in a direction away from the hub into engagement with inner surface of the hollow cylindrical member to secure the hollow cylindrical member to the end flange.

    摘要翻译： 公开了一种中空圆柱体支承端部凸缘，其包括盘状构件，从盘形构件轴向延伸的支撑轮毂和支撑在轮毂上的环形环，所述环包括多个尖锐突起或倒钩，所述突起或倒钩从所述环沿方向 在将环形环插入中空圆柱形构件中时，远离毂用于与中空圆柱形构件接合。 该端部凸缘用于包括具有圆形横截面的中空圆柱形构件和内表面以及包括具有圆形周边的盘形构件的端部凸缘的组件，支撑毂从盘形构件轴向延伸到 所述中空圆柱形构件和支撑在所述毂上并固定到所述毂的环形环，所述环包括从所述环沿远离所述毂的方向延伸的多个尖锐突起，以与所述中空圆柱形构件的内表面接合，以固定所述中空圆柱形 构件到端部法兰。