公开(公告)号：US20130341504A1

公开(公告)日：2013-12-26

申请号：US13913240

申请日：2013-06-07

申请人： Mark Neill ,  Mehran Nasser-Ghodsi ,  Christopher Sears

发明人： Mark Neill ,  Mehran Nasser-Ghodsi ,  Christopher Sears

IPC分类号： H01J49/00 ,  H01J49/44

CPC分类号： H01J37/26 ,  G01N23/2276 ,  G01N2223/345 ,  G06K9/00563 ,  G06K9/6271 ,  H01J49/0036 ,  H01J49/44

摘要： System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.

摘要翻译： 将俄歇电子谱分解为元素和化学成分的系统和方法包括调节和输入光谱以产生归一化输入光谱; 确定归一化输入光谱和存储的基本光谱特征之间的统计相关性; 以及从所述统计相关性表征所述输入光谱中的元素或化学物质，其中所述调节所述输入光谱包括估计所述输入光谱中的非俄歇电子的背景信号并从所述输入光谱中减去所估计的背景信号。