Robot drive with magnetic spindle bearings
    1.
    发明授权
    Robot drive with magnetic spindle bearings 有权
    带磁性主轴轴承的机器人驱动

    公开(公告)号:US08283813B2

    公开(公告)日:2012-10-09

    申请号:US12163996

    申请日:2008-06-27

    IPC分类号: H02K7/09

    摘要: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

    摘要翻译: 一种用于基板输送臂的驱动部分,包括框架,至少一个定子,其安装在框架内,该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴,所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子,所述转子包括第二电动机部分和至少一个转子轴承部分,所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合,其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转,并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。

    ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS
    2.
    发明申请
    ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS 有权
    带有磁性主轴的机架式驱动装置

    公开(公告)号:US20090243413A1

    公开(公告)日:2009-10-01

    申请号:US12163996

    申请日:2008-06-27

    IPC分类号: H02K7/09 B25J17/00

    摘要: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

    摘要翻译: 一种用于基板输送臂的驱动部分,包括框架,至少一个定子,其安装在框架内,该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴,所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子,所述转子包括第二电动机部分和至少一个转子轴承部分,所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合,其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转,并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。

    REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC MOTOR
    6.
    发明申请
    REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC MOTOR 有权
    降低复杂度自轴承无刷直流电机

    公开(公告)号:US20090001917A1

    公开(公告)日:2009-01-01

    申请号:US11769651

    申请日:2007-06-27

    IPC分类号: H02P31/00

    摘要: A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.

    摘要翻译: 一种换向电动机的方法包括操作地连接电动机的定子和致动部件,相对于致动部件布置至少两个绕组,并且独立地控制至少两个绕组组,使得至少两个绕组组被致动 组件都被驱动和集中。

    MULTIPLE DIMENSION POSITION SENSOR
    7.
    发明申请
    MULTIPLE DIMENSION POSITION SENSOR 有权
    多尺寸位置传感器

    公开(公告)号:US20120223597A1

    公开(公告)日:2012-09-06

    申请号:US13412392

    申请日:2012-03-05

    IPC分类号: H02K41/02

    CPC分类号: G01B7/003

    摘要: An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.

    摘要翻译: 一种装置,包括控制器,与具有可移动部分和传送路径的控制器通信的工件传送装置,以及多维位置测量装置,其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信,场产生压板被配置为用于位置测量并推动可移动部分,所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号,所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置, 包括平面位置和间隙测量的三维位置。

    SUBSTRATE PROCESSING APPARATUS
    9.
    发明申请
    SUBSTRATE PROCESSING APPARATUS 有权
    基板加工设备

    公开(公告)号:US20090162179A1

    公开(公告)日:2009-06-25

    申请号:US12330780

    申请日:2008-12-09

    IPC分类号: B65G35/00

    摘要: A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

    摘要翻译: 用于输送装置的驱动系统包括连接到输送装置的多个永磁体,暴露于多个永磁体中的至少一个的磁场的多个静止绕组,用于给固定绕组通电以提供磁性的控制系统 输送装置上的力,以及靠近运输装置的至少一侧的铁磁部件的布置,用于提供传送装置的提升,俯仰和滚动的被动稳定。