摘要:
A diaphragm is formed by etching a substrate. This substrate has a first surface provided with a depression by isotropic dry etching, and a second surface opposite the first surface. Furthermore, a through-hole is formed from the depression to the second surface by anisotropic dry etching. The depression and the through-hole are formed by using one resist mask. The depression has a hemispherical shape or a semi-elliptical spherical shape.
摘要:
A diaphragm is formed by etching a substrate. This substrate has a first surface provided with a depression by isotropic dry etching, and a second surface opposite the first surface. Furthermore, a through-hole is formed from the depression to the second surface by anisotropic dry etching. The depression and the through-hole are formed by using one resist mask. The depression has a hemispherical shape or a semi-elliptical spherical shape.
摘要:
A silicon structure of the present invention is provided with a silicon substrate (1) to become a base, and a plurality of fibrous projections (2) made of silicon dioxide and directly joined to a silicon-made surface (1a) of the silicon substrate (1). By arbitrarily constructing an area where these fibrous projections (2) are formed in a predetermined area, it is possible to render the area to have at least either hydrophilicity or water retentivity, so as to provide a silicon structure useful for a variety of devices.
摘要:
A chip for a cell electrophysiological sensor has a substrate. The substrate has a through-hole formed from the upside to the downside, and the opening of the through-hole is formed in a curved surface curved from the upside and downside of the substrate toward the inner side of the through-hole. In this configuration, the electrolyte solution (first electrolyte solution and second electrolyte solution) flows more smoothly, and the sample cell can be sucked accurately, and the trapping rate of the sample cells is improved.
摘要:
In a cell electrophysiological sensor having a thin plate with a through hole, a support plate with a through hole and a container plate with a through hole stuck to an upper portion of this support plate, the support plate and the container plate are stuck to each other through fusion with a portion of the outer shape of a first electrode in a ring shape intervening in a portion of the interface. In this configuration, a cell electrophysiological sensor which allows for measurement with high precision can be attained, and a manufacturing method which is excellent in terms of mass production can be provided.
摘要:
In a cell electrophysiological sensor having a thin plate with a through hole, a support plate with a through hole and a container plate with a through hole stuck to an upper portion of this support plate, the support plate and the container plate are stuck to each other through fusion with a portion of the outer shape of a first electrode in a ring shape intervening in a portion of the interface. In this configuration, a cell electrophysiological sensor which allows for measurement with high precision can be attained, and a manufacturing method which is excellent in terms of mass production can be provided.
摘要:
A leakage current on a side surface of a sensor chip of a cell electrophysiological sensor is reduced. In order to do so, a sensor chip having a continuity hole and a chip holding part covering the side surface of the sensor chip are provided. The sensor chip includes silicon as a main component, and the chip holding part is made of glass. The chip holding part is adhesively bonded to the side surface of the sensor chip by glass welding. Thus, in the cell electrophysiological sensor device of the present invention, the airtightness between the side surface of the sensor chip and the chip holding part is improved, so that a leakage current can be reduced.
摘要:
A chip for a cell electrophysiological sensor has a substrate. The substrate has a through-hole formed from the upside to the downside, and the opening of the through-hole is formed in a curved surface curved from the upside and downside of the substrate toward the inner side of the through-hole. In this configuration, the electrolyte solution (first electrolyte solution and second electrolyte solution) flows more smoothly, and the sample cell can be sucked accurately, and the trapping rate of the sample cells is improved.
摘要:
A component separating device includes a flow channel, an acoustic wave generator for generating an acoustic wave in the flow channel, a first inlet channel for introducing a fist solution containing solid particles into the flow channel, a second inlet channel for introducing a second solution, and outlet channels for discharging a solution from the flow channel. A density grade generator is provided at the first inlet channel for forming a density grade of the solid particles. This component separating device extracts the solid particles into a high-purity solution at a high collecting rate.
摘要:
A component separating device includes a flow channel, an acoustic wave generator for generating an acoustic wave in the flow channel, a first inlet channel for introducing a fist solution containing solid particles into the flow channel, a second inlet channel for introducing a second solution, and outlet channels for discharging a solution from the flow channel. A density grade generator is provided at the first inlet channel for forming a density grade of the solid particles. This component separating device extracts the solid particles into a high-purity solution at a high collecting rate.