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1.
公开(公告)号:US07709792B2
公开(公告)日:2010-05-04
申请号:US11622758
申请日:2007-01-12
申请人: Mehran Naser-Ghodsi , Tzu-Chin Chuang , Kenneth Krzeczowski , Matthew Lent , Chris Huang , Stanislaw Marek Borowicz
发明人: Mehran Naser-Ghodsi , Tzu-Chin Chuang , Kenneth Krzeczowski , Matthew Lent , Chris Huang , Stanislaw Marek Borowicz
IPC分类号: H01J37/28 , H01J37/305 , G01N23/225
CPC分类号: H01J37/28 , H01J2237/226 , H01J2237/2611 , H01J2237/3174
摘要: Methods and apparatus for imaging a structure and a related processor-readable medium are disclosed. A surface of a substrate (or a portion thereof) is exposed to a gas composition. The gas composition includes one or more components that etch the substrate upon activation by interaction with a beam of electrons. A beam of electrons is directed to one or more portions of the surface of the substrate that are exposed to the gas composition to etch the one or more portions. A plurality of images is obtained of the one or more portions at different instances of time as the one or more portions are etched. A three-dimensional model of one or more structures embedded within the one or more portions of the substrate is generated from the plurality of images.
摘要翻译: 公开了用于对结构进行成像和相关处理器可读介质的方法和装置。 将基材(或其一部分)的表面暴露于气体组合物。 气体组合物包括一种或多种在通过与电子束的相互作用激活时蚀刻衬底的组分。 电子束被引导到暴露于气体组合物的衬底的表面的一个或多个部分以蚀刻一个或多个部分。 当蚀刻一个或多个部分时,在不同的时间点获得一个或多个部分的多个图像。 从多个图像生成嵌入在基板的一个或多个部分内的一个或多个结构的三维模型。
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2.
公开(公告)号:US07879730B2
公开(公告)日:2011-02-01
申请号:US11622605
申请日:2007-01-12
申请人: Mehran Naser-Ghodsi , Garrett Pickard , Rudy F. Garcia , Tzu-Chin Chuang , Ming Lun Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles K. MacDonald
发明人: Mehran Naser-Ghodsi , Garrett Pickard , Rudy F. Garcia , Tzu-Chin Chuang , Ming Lun Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles K. MacDonald
IPC分类号: H01L21/302 , H01L21/461
CPC分类号: C23F4/00 , H01J2237/31744 , H01L21/3065 , H01L21/32136
摘要: Etch selectivity enhancement during electron beam activated chemical etch (EBACE) is disclosed. A target or portion thereof may be exposed to a gas composition of a type that etches the target when the gas composition and/or target are exposed to an electron beam. By directing an electron beam toward the target in the vicinity of the gas composition, an interaction between the electron beam and the gas composition etches a portion of the target exposed to both the gas composition and the electron beam. Selectivity of etching of the target due to interaction between the electron beam and gas composition may be enhanced in a number of ways.
摘要翻译: 公开了电子束激活化学蚀刻(EBACE)期间的蚀刻选择性增强。 当气体组合物和/或靶暴露于电子束时,靶或其部分可暴露于蚀刻靶的类型的气体组合物。 通过在气体组合物附近引导电子束朝向靶,电子束和气体组成之间的相互作用会蚀刻暴露于气体组成和电子束两者的靶的一部分。 可以以多种方式增强由于电子束和气体组成之间的相互作用而导致的靶的蚀刻选择性。
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3.
公开(公告)号:US08052885B2
公开(公告)日:2011-11-08
申请号:US11622625
申请日:2007-01-12
申请人: Mehran Naser-Ghodsi , Garrett Pickard , Rudy F. Garcia , Ming Lun Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles K. MacDonald
发明人: Mehran Naser-Ghodsi , Garrett Pickard , Rudy F. Garcia , Ming Lun Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles K. MacDonald
IPC分类号: B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , H01L21/302 , H01L21/461
CPC分类号: C23F4/00 , G02B5/1857 , H01J2237/31744 , H01L21/3065 , H01L21/32136 , H01L29/66795
摘要: Structural modification using electron beam activated chemical etch (EBACE) is disclosed. A target or portion thereof may be exposed to a gas composition of a type that etches the target when the gas composition and/or target are exposed to an electron beam. By directing an electron beam toward the target in the vicinity of the gas composition, an interaction between the electron beam and the gas composition etches a portion of the target exposed to both the gas composition and the electron beam. Structural modifications of the target may be conducted by means of etching due to interaction between the electron beam and gas composition.
摘要翻译: 公开了使用电子束活化化学蚀刻(EBACE)的结构修饰。 当气体组合物和/或靶暴露于电子束时,靶或其部分可暴露于蚀刻靶的类型的气体组合物。 通过在气体组合物附近引导电子束朝向靶,电子束和气体组成之间的相互作用会蚀刻暴露于气体组成和电子束两者的靶的一部分。 由于电子束和气体组成之间的相互作用,靶的结构修饰可以通过蚀刻进行。
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4.
公开(公告)号:US20070158562A1
公开(公告)日:2007-07-12
申请号:US11622758
申请日:2007-01-12
申请人: MEHRAN NASSER-GHODSI , Tzu-Chin Chuang , Kenneth Krzeczowski , Matthew Lent , Chris Huang , Stanislaw Borowicz
发明人: MEHRAN NASSER-GHODSI , Tzu-Chin Chuang , Kenneth Krzeczowski , Matthew Lent , Chris Huang , Stanislaw Borowicz
IPC分类号: G21K7/00
CPC分类号: H01J37/28 , H01J2237/226 , H01J2237/2611 , H01J2237/3174
摘要: Methods and apparatus for imaging a structure and a related processor-readable medium are disclosed. A surface of a substrate (or a portion thereof) is exposed to a gas composition. The gas composition includes one or more components that etch the substrate upon activation by interaction with a beam of electrons. A beam of electrons is directed to one or more portions of the surface of the substrate that are exposed to the gas composition to etch the one or more portions. A plurality of images is obtained of the one or more portions at different instances of time as the one or more portions are etched. A three-dimensional model of one or more structures embedded within the one or more portions of the substrate is generated from the plurality of images.
摘要翻译: 公开了用于对结构进行成像和相关处理器可读介质的方法和装置。 将基材(或其一部分)的表面暴露于气体组合物。 气体组合物包括一种或多种在通过与电子束的相互作用激活时蚀刻衬底的组分。 电子束被引导到暴露于气体组合物的衬底的表面的一个或多个部分以蚀刻一个或多个部分。 当蚀刻一个或多个部分时,在不同的时间点获得一个或多个部分的多个图像。 从多个图像生成嵌入在基板的一个或多个部分内的一个或多个结构的三维模型。
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5.
公开(公告)号:US20070158304A1
公开(公告)日:2007-07-12
申请号:US11622605
申请日:2007-01-12
申请人: Mehran Nasser-Ghodsi , Garrett Pickard , Rudy Garcia , Tzu-Chin Chuang , Ming Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles MacDonald
发明人: Mehran Nasser-Ghodsi , Garrett Pickard , Rudy Garcia , Tzu-Chin Chuang , Ming Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles MacDonald
CPC分类号: C23F4/00 , H01J2237/31744 , H01L21/3065 , H01L21/32136
摘要: Etch selectivity enhancement during electron beam activated chemical etch (EBACE) is disclosed. A target or portion thereof may be exposed to a gas composition of a type that etches the target when the gas composition and/or target are exposed to an electron beam. By directing an electron beam toward the target in the vicinity of the gas composition, an interaction between the electron beam and the gas composition etches a portion of the target exposed to both the gas composition and the electron beam. Selectivity of etching of the target due to interaction between the electron beam and gas composition may be enhanced in a number of ways.
摘要翻译: 公开了电子束激活化学蚀刻(EBACE)期间的蚀刻选择性增强。 当气体组合物和/或靶暴露于电子束时,靶或其部分可暴露于蚀刻靶的类型的气体组合物。 通过在气体组合物附近引导电子束朝向靶,电子束和气体组成之间的相互作用会蚀刻暴露于气体组成和电子束两者的靶的一部分。 可以以多种方式增强由于电子束和气体组成之间的相互作用而导致的靶的蚀刻选择性。
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6.
公开(公告)号:US20070158303A1
公开(公告)日:2007-07-12
申请号:US11622625
申请日:2007-01-12
申请人: MEHRAN NASSER-GHODSI , Garrett Pickard , Rudy Garcia , Ming Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles MacDonald
发明人: MEHRAN NASSER-GHODSI , Garrett Pickard , Rudy Garcia , Ming Yu , Kenneth Krzeczowski , Matthew Lent , Sergey Lopatin , Chris Huang , Niles MacDonald
CPC分类号: C23F4/00 , G02B5/1857 , H01J2237/31744 , H01L21/3065 , H01L21/32136 , H01L29/66795
摘要: Structural modification using electron beam activated chemical etch (EBACE) is disclosed. A target or portion thereof may be exposed to a gas composition of a type that etches the target when the gas composition and/or target are exposed to an electron beam. By directing an electron beam toward the target in the vicinity of the gas composition, an interaction between the electron beam and the gas composition etches a portion of the target exposed to both the gas composition and the electron beam. Structural modifications of the target may be conducted by means of etching due to interaction between the electron beam and gas composition.
摘要翻译: 公开了使用电子束活化化学蚀刻(EBACE)的结构修饰。 当气体组合物和/或靶暴露于电子束时,靶或其部分可暴露于蚀刻靶的类型的气体组合物。 通过在气体组合物附近引导电子束朝向靶,电子束和气体组成之间的相互作用会蚀刻暴露于气体组成和电子束两者的靶的一部分。 由于电子束和气体组成之间的相互作用,靶的结构修饰可以通过蚀刻进行。
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公开(公告)号:US6123757A
公开(公告)日:2000-09-26
申请号:US123325
申请日:1998-07-28
申请人: Arnold Chang Mou Yang , Yi-Jing Leu , Ta-Wei Hsueh , Jane Hsueh , Chris Huang , Li-Wen Rau
发明人: Arnold Chang Mou Yang , Yi-Jing Leu , Ta-Wei Hsueh , Jane Hsueh , Chris Huang , Li-Wen Rau
CPC分类号: C09D11/38
摘要: A fragrant ink is provided. The fragrant ink comprises an alcohol component, an imaging component, a fragrant agent component, and a deionized water component. In certain embodiments, the fragrant ink further comprises an ethanol component. The imaging component includes at least one of a soluble dye or pigment materials. The fragrant agent preferably includes a phenolic compound. The fragrant ink causes the paper on which it is printed to emit a pleasant scent.
摘要翻译: 提供香料墨水。 芳香油墨包含醇组分,成像组分,芳香剂组分和去离子水组分。 在某些实施方案中,芳香墨水还包含乙醇组分。 成像组件包括可溶性染料或颜料材料中的至少一种。 芳香剂优选包括酚类化合物。 芳香的墨水使其印刷的纸张发出愉快的香味。
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8.
公开(公告)号:US07755042B1
公开(公告)日:2010-07-13
申请号:US12124407
申请日:2008-05-21
申请人: Gabor D. Toth , Rudy F. Garcia , Chris Huang , Niles Kenneth MacDonald , Mehran Nasser-Ghodsi , Garrett Pickard , Khashayar Shadman , Wo-Tak Wu , Ming Yu
发明人: Gabor D. Toth , Rudy F. Garcia , Chris Huang , Niles Kenneth MacDonald , Mehran Nasser-Ghodsi , Garrett Pickard , Khashayar Shadman , Wo-Tak Wu , Ming Yu
IPC分类号: H01J37/05
CPC分类号: H01J37/05 , G01N23/2276 , H01J37/14 , H01J37/28 , H01J2237/2511 , H01J2237/2801
摘要: A scanning electron beam apparatus with an Auger spectrometer. The apparatus includes at least an electron column for generating a primary electron beam, a magnetic objective lens configured to focus the primary electron beam onto a surface of a target substrate, and a spectrometer configured to detect Auger electrons emitted from the surface of the target substrate. The magnetic objective lens applies a magnetic field strength greater than 10 Gauss and less than 50 Gauss at the surface of the target substrate. Other embodiments, aspects and features are also disclosed.
摘要翻译: 具有俄歇光谱仪的扫描电子束装置。 该装置至少包括用于产生一次电子束的电子柱,被配置为将一次电子束聚焦到目标衬底的表面上的磁性物镜,以及配置成检测从靶衬底的表面发射的俄歇电子的光谱仪 。 磁性物镜在目标衬底的表面施加大于10高斯的磁场强度和小于50高斯。 还公开了其它实施例,方面和特征。
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9.
公开(公告)号:US20060141479A1
公开(公告)日:2006-06-29
申请号:US10835904
申请日:2004-04-30
申请人: Xiao-Yu Song , Chris Huang , Keying Ma , Bailin Liang , Michael Naso
发明人: Xiao-Yu Song , Chris Huang , Keying Ma , Bailin Liang , Michael Naso
摘要: Novel polypeptides (CNGH0010) and antibodies, including specified portions or variants, specific for at least one such CNGH0010 polypeptide, variant, or fragment thereof, as well as nucleic acids encoding such CNGH0010 polypeptides and antibodies, complementary nucleic acids, vectors, host cells, and methods of making and using thereof, are useful for therapeutic and diagnostic formulations, administration and devices. The aforesaid polypeptides can be used to generate human, primate, rodent, mammalian, chimeric, humanized and/or CDR-grafted anti-CNGH0010 antibodies. The CNGH0010 polypeptides and antibodies are used in modulating or treating at least one CNGH0010-related disease in a cell, tissue, organ, animal, or patient. Such diseases may include, but are not limited to, psoriasis, rheumatoid arthritis, emphysema, asthma, diabetes, autoimmune thyroiditis, inflammatory bowel diseases, including Crohn's disease and ulcerative colitis, different types of dermatitis including allergic dermatitis, contact dermatitis, actinic keratosis, wound healing, scar formation, various renal diseases, various respiratory diseases, various diseases of reproductive organs, such as endometriosis, melanoma, squamous cell carcinoma, ovarian cancer, breast cancer, lung cancer, colon cancer, prostate cancer, renal cell carcinoma, Grave's diseases and other inflammatory and hyperproliferative diseases.
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公开(公告)号:US20050136451A1
公开(公告)日:2005-06-23
申请号:US10957503
申请日:2004-10-01
申请人: Li Yan , Chris Huang , Prabakaran Kesavan , Katherine Li , Marian Nakada
发明人: Li Yan , Chris Huang , Prabakaran Kesavan , Katherine Li , Marian Nakada
IPC分类号: C07H21/04 , C07K14/47 , C12N20060101 , C12N9/02 , C12Q1/68
CPC分类号: C07K14/47
摘要: The invention provides isolated nucleic acids encoding a variety of nucleic acids and proteins having diagnostic, preventive, therapeutic, and other uses. These nucleic acids and proteins are useful for diagnosis, prevention, and therapy of a number of human and other animal disorders. The invention also provides antisense nucleic acids molecules, expression vectors containing the nucleic acids molecules of the invention, host cells into which the expression vectors have been introduced, and non-human transgenic animals in which a nucleic acids molecule of the invention has been introduced or disrupted. The invention still further provides isolated polypeptides, fusion polypeptides, antigenic peptides and antibodies. Diagnostic, screening, and therapeutic methods utilizing compositions of the invention are also provided. The nucleic acids and polypeptides of the present invention are useful as modulating agents in regulating a variety of cellular processes.
摘要翻译: 本发明提供编码具有诊断,预防,治疗和其它用途的各种核酸和蛋白质的分离的核酸。 这些核酸和蛋白质可用于诊断,预防和治疗许多人类和其他动物疾病。 本发明还提供了反义核酸分子,含有本发明的核酸分子的表达载体,已经引入了表达载体的宿主细胞,以及其中引入了本发明的核酸分子的非人转基因动物,或 中断了 本发明还进一步提供分离的多肽,融合多肽,抗原肽和抗体。 还提供了利用本发明组合物的诊断,筛选和治疗方法。 本发明的核酸和多肽可用作调节各种细胞过程的调节剂。
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