公开(公告)号：US08852695B2

公开(公告)日：2014-10-07

申请号：US13608118

申请日：2012-09-10

Applicant: Mengbing Huang ,  William T. Spratt

Inventor： Mengbing Huang ,  William T. Spratt

IPC: C23C14/48

CPC classification number: C23C14/48 ,  C30B29/20 ,  C30B33/04 ,  G02B6/03666

Abstract: Electromagnetic radiation barriers and waveguides, including barriers and waveguides for light, are disclosed. The barriers and waveguides are fabricated by directing charged particles, for example, ions, into crystalline substrates, for example, single-crystal sapphire substrates, to modify the crystal structure and produce a region of varying refractive index. These substrates are then heated to temperatures greater than 200 degrees C. to stabilize the modified crystal structure and provide the barrier to electromagnetic radiation. Since the treatment stabilizes the crystal structure at elevated temperature, for example, above 500 degrees C. or above 1000 degrees C., the barriers and waveguides disclosed are uniquely adapted for use in detecting conditions in harsh environments, for example, at greater than 200 degrees C. Sensors, systems for using sensors, and methods for fabricating barriers and waveguides are also disclosed.

Abstract translation: 公开了电磁辐射屏障和波导，包括用于光的屏障和波导。 阻挡层和波导通过将带电粒子例如离子引导到晶体衬底（例如单晶蓝宝石衬底）中来修饰晶体结构并产生变化的折射率区域来制造。 然后将这些衬底加热到​​大于200摄氏度的温度，以稳定改性的晶体结构并为电磁辐射提供屏障。 由于处理在升高的温度（例如高于500摄氏度或高于1000摄氏度）下稳定晶体结构，因此公开的屏障和波导被独特地适用于在恶劣环境中检测条件，例如大于200 还公开了传感器，用于使用传感器的系统，以及用于制造屏障和波导的方法。