公开(公告)号：US06807349B2

公开(公告)日：2004-10-19

申请号：US09946712

申请日：2001-09-04

申请人： Michael Bazylenko

发明人： Michael Bazylenko

IPC分类号： G02B602

CPC分类号： G02B6/12011 ,  G02B6/12026 ,  G02B6/12028 ,  G02B6/12033 ,  G02B6/122 ,  G02B6/13 ,  G02B2006/12038 ,  G02B2006/12145 ,  G02B2006/12169 ,  G02B2006/12197 ,  G02F1/0147 ,  G02F1/225 ,  G02F2001/0113

摘要： The present invention provides a method of forming a planar optical waveguide comprising the steps of forming a silica-based waveguide at a first temperature which is below a melting temperature of material from which the waveguide is formed; and annealing a region of the waveguide at a second temperature which is greater than the formation temperature and less than a melting temperature of material from which the waveguide is formed, so as to alter an effective refractive index of the region. In one embodiment the step of annealing is preceded by the step of forming a thin film heater over the region of the waveguide, the heater being capable of heating the region to the second temperature. The first temperature is preferably low (below 400° C.) to maximize the range of annealing temperatures.

摘要翻译： 本发明提供一种形成平面光波导的方法，包括以下步骤：在低于形成波导的材料的熔融温度的第一温度下形成二氧化硅基波导; 以及在大于所述形成温度并且小于形成所述波导的材料的熔融温度的第二温度下退火所述波导的区域，以便改变所述区域的有效折射率。 在一个实施例中，退火步骤之前是在波导区域上形成薄膜加热器的步骤，加热器能够将该区域加热至第二温度。 第一温度优选为低（低于400℃）以最大化退火温度的范围。

公开(公告)号：US20060197960A1

公开(公告)日：2006-09-07

申请号：US10566482

申请日：2005-04-20

申请人： Michael Bazylenko

发明人： Michael Bazylenko

IPC分类号： G01B9/02

CPC分类号： G01N21/6454 ,  G01N21/253 ,  G01N21/648 ,  G01N21/7743 ,  G01N2021/7776 ,  G01N2021/7786 ,  Y10S977/701 ,  Y10S977/702 ,  Y10S977/707 ,  Y10S977/712

摘要： The present invention provides a biochip for testing biological substances comprising a plurality of binding sites, optical means for determining a specific binding event at each binding site, wherein the plurality of binding sites and the means for determining a specific binding event at each binding site are monolithically integrated into a single chip which is electrically powered and produces electrical signals in response to binding events at each binding site. The means for determining a specific binding event can include a micro-cavity light source formed in a semiconductor layer and a photodetector formed in the same semiconductor layer and further include a grating assisted vertical planar waveguide coupler for in-situ monitoring hybridisation dynamics at each binding site via associated changes in refractive index. The invention further provides a method of manufacturing a biochip containing light sources, photodetectors, binding sites and optical means for determining a specific binding event at each binding site wherein said light sources, photodetectors, binding sites and optical means for determining a specific binding event at each binding site are produced by processing a single planar substrate in a sequence of deposition, photolithography and etching steps.

摘要翻译： 本发明提供一种用于测试包含多个结合位点的生物物质的生物芯片，用于确定每个结合位点处的特异性结合事件的光学方法，其中所述多个结合位点和用于确定每个结合位点处的特异性结合事件的方法是 单片集成到单个芯片中，该芯片被电力供电并且响应于每个结合位点处的结合事件而产生电信号。 用于确定特定结合事件的装置可以包括形成在半导体层中的微腔光源和形成在相同半导体层中的光电检测器，并且还包括用于在每个结合处原位监测杂化动力学的光栅辅助垂直平面波导耦合器 通过相关的折射率变化。 本发明还提供一种制造含有光源，光电检测器，结合位点和光学装置的生物芯片的方法，用于确定每个结合位点处的特异性结合事件，其中所述光源，光电检测器，结合位点和用于确定特异性结合事件的光学装置 通过以沉积，光刻和蚀刻步骤的顺序处理单个平面基板来产生每个结合位点。

公开(公告)号：US06727110B2

公开(公告)日：2004-04-27

申请号：US09986250

申请日：2001-11-08

申请人： Michael Bazylenko

发明人： Michael Bazylenko

IPC分类号： H01L2100

CPC分类号： G02B6/132 ,  C23C16/402 ,  C23C16/5096 ,  C23C28/00

摘要： A method and apparatus for fabricating silica-based waveguide devices on a substrate using a low temperature PECVD process using a TEOS source material for depositing waveguide layers containing silica, the apparatus being arranged, in use, in a manner such that a liquid source material containing silicon is used during the PECVD.

摘要翻译： 一种用于使用TEOS源材料在基板上制造基于二氧化硅的波导器件的方法和装置，所述TEOS源材料用于沉积含有二氧化硅的波导层，所述装置在使用中以使得含有 在PECVD期间使用硅。

公开(公告)号：US06650816B2

公开(公告)日：2003-11-18

申请号：US09900438

申请日：2001-07-06

申请人： Michael Bazylenko ,  Geoffrey Lester Harding

发明人： Michael Bazylenko ,  Geoffrey Lester Harding

IPC分类号： G02B610

CPC分类号： C23C14/0089 ,  C23C14/0063 ,  C23C14/081 ,  G02B6/132 ,  H01S3/063 ,  H01S3/0637 ,  H01S3/1608 ,  H01S3/1631

摘要： The present invention provides a planar optical waveguide amplifier for amplifying optical communications signals when optically pumped by radiation of a pumping wavelength, the amplifier comprising: an optical buffer layer formed on a substantially planar substrate; an optically-transmissive metal-oxide-based waveguide core formed on the buffer layer, the core comprising aluminium oxide and a gain medium; and an optical cladding layer formed over the core. Preferably, the composition of the core predominantly comprises aluminium oxide and the gain medium comprises erbium and/or ytterbium. The waveguide core can be formed by reactively dc sputtering aluminium. The invention has the advantage of allowing higher erbium doping concentrations than is possible for silica-based amplifiers.

摘要翻译： 本发明提供了一种平面光波导放大器，用于当通过泵浦波长的辐射进行光泵浦时放大光通信信号，该放大器包括：形成在基本平坦的基板上的光学缓冲层; 形成在缓冲层上的光学透射的基于金属氧化物的波导芯，所述芯包括氧化铝和增益介质; 以及形成在芯上的光学包覆层。 优选地，芯的组成主要包含氧化铝，增益介质包括铒和/或镱。 波导芯可以通过反应式直流溅射铝形成。 本发明的优点在于允许比基于二氧化硅的放大器更高的铒掺杂浓度。

公开(公告)号：US06549688B2

公开(公告)日：2003-04-15

申请号：US09900612

申请日：2001-07-06

申请人： Michael Bazylenko

发明人： Michael Bazylenko

IPC分类号： G02B612

CPC分类号： G02B6/12019 ,  G02B6/1228 ,  G02B2006/121 ,  G02B2006/12104 ,  G02B2006/12152 ,  H01S3/063 ,  H01S3/0637 ,  H01S3/1631 ,  H01S3/171 ,  H01S5/0268

摘要： The present invention provides an integrated optical device comprising a metaloxide-based optical planar waveguide amplifier monolithically integrated on a common substrate with at least one additional planar waveguide selected from a group comprising: a planar waveguide signal-processing circuit arranged to process an optical communications signal; and a planar waveguide pump-signal coupling circuit arranged to couple or decouple a pump wavelength to or from the amplifier; wherein the amplifier has a metal-oxide-based core comprising an optically-transmissive metal oxide material doped with a gain medium and is arranged to amplify an optical communication signal when optically pumped with a source of pump radiation. The amplifier can have a core composed of aluminium oxide doped with erbium and/or ytterbium. The signal processing circuit may comprise a multiplexer, demultiplexer, channel gain equalizer, N×M optical switch matrix, an optical modulator, or an add-drop multiplexer. The pump-signal coupling circuit may comprise an asymmetric Mach-Zehnder interferometer.

摘要翻译： 本发明提供了一种集成光学器件，其包括单片集成在公共衬底上的基于金属氧化物的光学平面波导放大器，所述金属氧化物基光学平面波导放大器具有选自以下的至少一个附加平面波导的平面波导信号处理电路：平面波导信号处理电路， ; 以及平面波导泵浦信号耦合电路，被布置成将泵波长耦合到放大器或从放大器去耦; 其中所述放大器具有基于金属氧化物的芯，其包含掺杂有增益介质的光学透射性金属氧化物材料，并且被布置为当用泵浦辐射源光学泵浦时放大光通信信号。 该放大器可以具有由掺杂有铒和/或镱的氧化铝组成的芯。 信号处理电路可以包括多路复用器，解复用器，信道增益均衡器，NxM光开关矩阵，光调制器或分插复用器。 泵浦信号耦合电路可以包括不对称马赫 - 曾德尔干涉仪。

公开(公告)号：US07768650B2

公开(公告)日：2010-08-03

申请号：US10566482

申请日：2005-04-20

申请人： Michael Bazylenko

发明人： Michael Bazylenko

IPC分类号： G01B9/02 ,  C12M1/00 ,  C12M1/34 ,  C12M3/00

CPC分类号： G01N21/6454 ,  G01N21/253 ,  G01N21/648 ,  G01N21/7743 ,  G01N2021/7776 ,  G01N2021/7786 ,  Y10S977/701 ,  Y10S977/702 ,  Y10S977/707 ,  Y10S977/712

摘要： The present invention provides a biochip for testing biological substances comprising a plurality of binding sites, optical means for determining a specific binding event at each binding site, wherein the plurality of binding sites and the means for determining a specific binding event at each binding site are monolithically integrated into a single chip which is electrically powered and produces electrical signals in response to binding events at each binding site. The means for determining a specific binding event can include a micro-cavity light source formed in a semiconductor layer and a photodetector formed in the same semiconductor layer and further include a grating assisted vertical planar waveguide coupler for in-situ monitoring hybridization dynamics at each binding site via associated changes in refractive index. The invention further provides a method of manufacturing a biochip containing light sources, photodetectors, binding sites and optical means for determining a specific binding event at each binding site wherein said light sources, photodetectors, binding sites and optical means for determining a specific binding event at each binding site are produced by processing a single planar substrate in a sequence of deposition, photolithography and etching steps.

摘要翻译： 本发明提供一种用于测试包含多个结合位点的生物物质的生物芯片，用于确定每个结合位点处的特异性结合事件的光学方法，其中所述多个结合位点和用于确定每个结合位点处的特异性结合事件的方法是 单片集成到单个芯片中，该芯片被电力供电并且响应于每个结合位点处的结合事件而产生电信号。 用于确定特定结合事件的装置可以包括形成在半导体层中的微腔光源和形成在相同半导体层中的光电检测器，并且还包括用于在每个结合处原位监测杂交动力学的光栅辅助垂直平面波导耦合器 通过相关的折射率变化。 本发明还提供一种制造含有光源，光电检测器，结合位点和光学装置的生物芯片的方法，用于确定每个结合位点处的特异性结合事件，其中所述光源，光电检测器，结合位点和用于确定特异性结合事件的光学装置 通过以沉积，光刻和蚀刻步骤的顺序处理单个平面基板来产生每个结合位点。

公开(公告)号：US06528338B2

公开(公告)日：2003-03-04

申请号：US09915144

申请日：2001-07-25

申请人： Michael Bazylenko

发明人： Michael Bazylenko

IPC分类号： H01L2100

CPC分类号： C23C16/401 ,  C23C16/5096 ,  G02B6/105 ,  G02B6/132 ,  G02B6/136 ,  G02B2006/12116

摘要： The present invention provides a method of manufacturing a polarization-insensitive waveguide structure. The method comprises: depositing a buffer layer on a substrate; depositing a core layer on the buffer layer and etching the core layer so as to form a waveguide core; and depositing a silica-based cladding layer over the core by means of plasma-enhanced chemical vapor deposition (PECVD) in the absence of nitrogen or nitrogen-containing gases so as to complete the waveguide structure, wherein the cladding layer is deposited in a manner which substantially prevents polarization sensitivity in the waveguide structure. The cladding layer can be deposited with an intrinsic stress which cancels out any thermal stresses. The stress can be controlled by controlling the PECVD deposition conditions, such as power and ion bombardment.

摘要翻译： 本发明提供一种制造偏振不敏感波导结构的方法。 该方法包括：在衬底上沉积缓冲层; 在缓冲层上沉积芯层并蚀刻芯层以形成波导芯; 以及在不存在氮或含氮气体的情况下通过等离子体增强化学气相沉积（PECVD）在所述芯上沉积二氧化硅基包覆层以完成所述波导结构，其中所述包覆层以 这基本上防止了波导结构中的偏振灵敏度。 包层可以沉积具有消除任何热应力的固有应力。 可以通过控制PECVD沉积条件（如电源和离子轰击）来控制应力。

公开(公告)号：US06522799B1

公开(公告)日：2003-02-18

申请号：US09936684

申请日：2001-11-15

申请人： Michael Bazylenko ,  Mark Sceats

发明人： Michael Bazylenko ,  Mark Sceats

IPC分类号： G02B612

CPC分类号： G02F1/025 ,  G02B6/132 ,  G02B6/305 ,  G02B2006/12061 ,  G02B2006/12097 ,  G02B2006/12176 ,  G02B2006/12195 ,  G02F1/2257

摘要： A device for processing an optical signal, the device comprising a processing element monolithically integrated with a planar silica-based waveguide structure in which the optical signal propagates.

摘要翻译： 一种用于处理光信号的装置，该装置包括与其中光信号传播的平面二氧化硅基波导结构单片集成的处理元件。