公开(公告)号：US09825213B2

公开(公告)日：2017-11-21

申请号：US13977915

申请日：2011-12-22

申请人： Mikio Shimada ,  Toshiaki Aiba ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Takayuki Watanabe

发明人： Mikio Shimada ,  Toshiaki Aiba ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Takayuki Watanabe

IPC分类号： H01L41/187 ,  H01L41/09 ,  H01L41/43 ,  B08B7/02 ,  B41J2/14 ,  H02N2/10 ,  H02N2/16

CPC分类号： H01L41/1871 ,  B08B7/028 ,  B41J2/14233 ,  H01L41/0973 ,  H01L41/43 ,  H02N2/106 ,  H02N2/163

摘要： A piezoelectric element having an improved piezoelectric constant is provided, and a liquid discharge head, an ultrasonic motor, and a dust removing device, each of which uses the above piezoelectric element, are also provided. A piezoelectric element at least includes a pair of electrodes and a piezoelectric material provided in contact with the pair of electrodes, the piezoelectric material is formed of an aggregate of crystal grains containing barium titanate as a primary component, and among the crystal grains of the aggregate, crystal grains at least in contact with the electrodes have dislocation layers in the grains. A liquid discharge head, an ultrasonic motor, and a dust removing device each use the above piezoelectric element.

公开(公告)号：US20140084750A1

公开(公告)日：2014-03-27

申请号：US13977915

申请日：2011-12-22

申请人： Mikio Shimada ,  Toshiaki Aiba ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Takayuki Watanabe

发明人： Mikio Shimada ,  Toshiaki Aiba ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Takayuki Watanabe

IPC分类号： H01L41/187

CPC分类号： H01L41/1871 ,  B08B7/028 ,  B41J2/14233 ,  H01L41/0973 ,  H01L41/43 ,  H02N2/106 ,  H02N2/163

摘要： A piezoelectric element having an improved piezoelectric constant is provided, and a liquid discharge head, an ultrasonic motor, and a dust removing device, each of which uses the above piezoelectric element, are also provided. A piezoelectric element at least includes a pair of electrodes and a piezoelectric material provided in contact with the pair of electrodes, the piezoelectric material is formed of an aggregate of crystal grains containing barium titanate as a primary component, and among the crystal grains of the aggregate, crystal grains at least in contact with the electrodes have dislocation layers in the grains. A liquid discharge head, an ultrasonic motor, and a dust removing device each use the above piezoelectric element.

摘要翻译： 提供了具有改善的压电常数的压电元件，并且还提供了使用上述压电元件的液体排出头，超声波马达和除尘装置。 压电元件至少包括一对电极和设置成与该对电极接触的压电材料，压电材料由含有钛酸钡作为主要成分的晶粒聚集体形成，并且在聚集体的晶粒中 至少与电极接触的晶粒在晶粒中具有位错层。 液体排出头，超声波马达和除尘装置均使用上述压电元件。

公开(公告)号：US20130241347A1

公开(公告)日：2013-09-19

申请号：US13989970

申请日：2011-12-15

申请人： Tatsuya Suzuki ,  Masami Tsukamoto ,  Mikio Shimada ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Makoto Kubota ,  Jumpei Hayashi

发明人： Tatsuya Suzuki ,  Masami Tsukamoto ,  Mikio Shimada ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Makoto Kubota ,  Jumpei Hayashi

IPC分类号： H01L41/187

CPC分类号： H01L41/43 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  B82Y30/00 ,  C04B35/4682 ,  C04B35/62655 ,  C04B35/62695 ,  C04B35/64 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3222 ,  C04B2235/3227 ,  C04B2235/3232 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3262 ,  C04B2235/3267 ,  C04B2235/3287 ,  C04B2235/3293 ,  C04B2235/3298 ,  C04B2235/3418 ,  C04B2235/441 ,  C04B2235/442 ,  C04B2235/443 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/6562 ,  C04B2235/6567 ,  C04B2235/761 ,  C04B2235/85 ,  H01L41/1871 ,  H02N2/106 ,  H02N2/163

摘要： Provided are a barium titanate-based piezoelectric ceramics having satisfactory piezoelectric performance and a satisfactory mechanical quality factor (Qm), and a piezoelectric element using the same. Specifically provided are a piezoelectric ceramics, including: crystal particles; and a grain boundary between the crystal particles, in which the crystal particles each include barium titanate having a perovskite-type structure and manganese at 0.04% by mass or more and 0.20% by mass or less in terms of a metal with respect to the barium titanate, and the grain boundary includes at least one compound selected from the group consisting of Ba4Ti12O27 and Ba6Ti17O40, and a piezoelectric element using the same.

摘要翻译： 提供一种具有令人满意的压电性能和令人满意的机械品质因数（Qm）的钛酸钡基压电陶瓷，以及使用它的压电元件。 具体提供的是压电陶瓷，包括：晶体颗粒; 晶体粒子各自包含钛酸钙，钛酸钙，钛，钛，钛，钛，钛，钛，钛，钛，钛， 钛酸盐，并且晶界包括至少一种选自Ba 4 Ti 12 O 27和Ba 6 Ti 17 O 40的化合物和使用其的压电元件。

公开(公告)号：US09231188B2

公开(公告)日：2016-01-05

申请号：US13989970

申请日：2011-12-15

申请人： Tatsuya Suzuki ,  Masami Tsukamoto ,  Mikio Shimada ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Makoto Kubota ,  Jumpei Hayashi

发明人： Tatsuya Suzuki ,  Masami Tsukamoto ,  Mikio Shimada ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Makoto Kubota ,  Jumpei Hayashi

IPC分类号： H01L41/187 ,  B41J2/16 ,  C04B35/468 ,  C04B35/626 ,  C04B35/64 ,  H01L41/43 ,  H02N2/10 ,  H02N2/16 ,  B82Y30/00

CPC分类号： H01L41/43 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  B82Y30/00 ,  C04B35/4682 ,  C04B35/62655 ,  C04B35/62695 ,  C04B35/64 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3222 ,  C04B2235/3227 ,  C04B2235/3232 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3262 ,  C04B2235/3267 ,  C04B2235/3287 ,  C04B2235/3293 ,  C04B2235/3298 ,  C04B2235/3418 ,  C04B2235/441 ,  C04B2235/442 ,  C04B2235/443 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/6562 ,  C04B2235/6567 ,  C04B2235/761 ,  C04B2235/85 ,  H01L41/1871 ,  H02N2/106 ,  H02N2/163

摘要： Provided are a barium titanate-based piezoelectric ceramics having satisfactory piezoelectric performance and a satisfactory mechanical quality factor (Qm), and a piezoelectric element using the same. Specifically provided are a piezoelectric ceramics, including: crystal particles; and a grain boundary between the crystal particles, in which the crystal particles each include barium titanate having a perovskite-type structure and manganese at 0.04% by mass or more and 0.20% by mass or less in terms of a metal with respect to the barium titanate, and the grain boundary includes at least one compound selected from the group consisting of Ba4Ti12O27 and Ba6Ti17O40, and a piezoelectric element using the same.

摘要翻译： 提供一种具有令人满意的压电性能和令人满意的机械品质因数（Qm）的钛酸钡基压电陶瓷，以及使用它的压电元件。 具体提供的是压电陶瓷，包括：晶体颗粒; 晶体粒子各自包含钛酸钙，钛酸钙，钛，钛，钛，钛，钛，钛，钛，钛，钛， 钛酸盐，并且晶界包括至少一种选自Ba 4 Ti 12 O 27和Ba 6 Ti 17 O 40的化合物和使用其的压电元件。

公开(公告)号：US09614140B2

公开(公告)日：2017-04-04

申请号：US13989756

申请日：2011-11-18

申请人： Takanori Matsuda ,  Hiroshi Saito ,  Tatsuo Furuta ,  Jumpei Hayashi ,  Takayuki Watanabe ,  Toshihiro Ifuku

发明人： Takanori Matsuda ,  Hiroshi Saito ,  Tatsuo Furuta ,  Jumpei Hayashi ,  Takayuki Watanabe ,  Toshihiro Ifuku

IPC分类号： H01L41/08 ,  H01L41/187 ,  B41J2/16 ,  C04B35/626 ,  B08B7/02 ,  H01L41/43 ,  H01L41/09 ,  H02N2/10 ,  H02N2/16

CPC分类号： C04B35/4682 ,  B08B7/02 ,  B08B7/028 ,  B41J2/14209 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  C04B35/62655 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3227 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3248 ,  C04B2235/3249 ,  C04B2235/3262 ,  C04B2235/3268 ,  C04B2235/3298 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/549 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/661 ,  C04B2235/77 ,  C04B2235/782 ,  C04B2235/786 ,  C04B2235/96 ,  H01L41/09 ,  H01L41/0973 ,  H01L41/1871 ,  H01L41/43 ,  H02N2/106 ,  H02N2/163 ,  H03H9/176

摘要： A barium titanate piezoelectric ceramic having good piezoelectric properties and mechanical strength and a piezoelectric element that includes the ceramic are provided. A method for making a piezoelectric ceramic includes forming a compact containing barium titanate particles, sintering the compact, and decreasing the temperature of the compact. The sintering includes (A) increasing the temperature of the compact to a temperature range of a shrinking process of the compact; (B) increasing the temperature of the compact to a temperature range of a liquid phase sintering process of the compact; (C) decreasing the temperature of the compact to the temperature range of the shrinking process of the compact; and (D) retaining the third temperature.

公开(公告)号：US20140009038A1

公开(公告)日：2014-01-09

申请号：US13989756

申请日：2011-11-18

申请人： Takanori Matsuda ,  Hiroshi Saito ,  Tatsuo Furuta ,  Jumpei Hayashi ,  Takayuki Watanabe ,  Toshihiro Ifuku

发明人： Takanori Matsuda ,  Hiroshi Saito ,  Tatsuo Furuta ,  Jumpei Hayashi ,  Takayuki Watanabe ,  Toshihiro Ifuku

IPC分类号： H01L41/187

CPC分类号： C04B35/4682 ,  B08B7/02 ,  B08B7/028 ,  B41J2/14209 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  C04B35/62655 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3227 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3248 ,  C04B2235/3249 ,  C04B2235/3262 ,  C04B2235/3268 ,  C04B2235/3298 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/549 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/661 ,  C04B2235/77 ,  C04B2235/782 ,  C04B2235/786 ,  C04B2235/96 ,  H01L41/09 ,  H01L41/0973 ,  H01L41/1871 ,  H01L41/43 ,  H02N2/106 ,  H02N2/163 ,  H03H9/176

摘要： A barium titanate piezoelectric ceramic having good piezoelectric properties and mechanical strength and a piezoelectric element that includes the ceramic are provided. A method for making a piezoelectric ceramic includes forming a compact composed of an oxide powder containing barium titanate particles, sintering the compact, and decreasing the temperature of the compact after the sintering. The sintering includes (A) increasing the temperature of the compact to a first temperature within a temperature range of a shrinking process of the compact; (B) increasing the temperature of the compact to a second temperature within a temperature range of a liquid phase sintering process of the compact after (A); (C) decreasing the temperature of the compact to a third temperature within the temperature range of the shrinking process of the compact after (B); and (D) retaining the third temperature after (C).

摘要翻译： 提供具有良好压电性能和机械强度的钛酸钡压电陶瓷和包括陶瓷的压电元件。 制造压电陶瓷的方法包括：形成由包含钛酸钡颗粒的氧化物粉末组成的压块，烧结该压块，以及降低烧结后的压块的温度。 烧结包括（A）将压坯的温度在压坯的收缩过程的温度范围内提高到第一温度; （B）在（A）之后的压块的液相烧结工艺的温度范围内将压坯的温度提高到第二温度; （C）在（B）之后的压坯的收缩过程的温度范围内将压坯的温度降低到第三温度; 和（D）在（C）之后保持第三温度。

公开(公告)号：US07998362B2

公开(公告)日：2011-08-16

申请号：US11463537

申请日：2006-08-09

申请人： Toshihiro Ifuku ,  Takanori Matsuda ,  Katsumi Aoki

发明人： Toshihiro Ifuku ,  Takanori Matsuda ,  Katsumi Aoki

IPC分类号： B41J2/45 ,  H01L41/187

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1646 ,  H01L41/1876 ,  H01L41/316

摘要： A main component of a piezoelectric substance is PZT which has a perovskite type structure expressed as Pb(ZrxTi1-x)O3, in which x expresses an element ratio Zr/(Zr+Ti) of Zr and Ti in the formula, an element ratio Pb/(Zr+Ti) of Pb, Zr and Ti of the piezoelectric substance is 1.05 or more, an element ratio Zr/(Zr+Ti) of Zr and Ti is 0.2 to 0.8 inclusive, and a Curie temperature Tc of the piezoelectric substance and a Curie temperature Tc0 in bulk at an element ratio of Zr and Ti of the piezoelectric substance satisfy a relation of Tc>Tc0+50° C.

摘要翻译： 压电体的主要成分是具有以Pb（Zr x Ti 1-x）O 3表示的钙钛矿型结构的PZT，其中x表示式中的Zr和Ti的元素比Zr /（Zr + Ti），元素比例 压电体的Pb，Zr，Ti的Pb /（Zr + Ti）为1.05以上，Zr和Ti的元素比Zr /（Zr + Ti）为0.2〜0.8，并且压电体的居里温度Tc 物质和居里温度Tc0在压电物质的Zr和Ti的元素比中满足Tc> Tc0 + 50℃的关系。

公开(公告)号：US07804231B2

公开(公告)日：2010-09-28

申请号：US11677267

申请日：2007-02-21

申请人： Toshihiro Ifuku ,  Katsumi Aoki ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kwan Kim ,  Hiroshi Nakaki ,  Rikyu Ikariyama

发明人： Toshihiro Ifuku ,  Katsumi Aoki ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kwan Kim ,  Hiroshi Nakaki ,  Rikyu Ikariyama

IPC分类号： H01L41/187

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

摘要： Provided are a piezoelectric film, a piezoelectric film element, a liquid discharge head using the piezoelectric film element, and a liquid discharge apparatus. A piezoelectric film element that can be suitably used for a discharge pressure-generating element of a liquid discharge head is obtained by using an epitaxial oxide film composed of a perovskite composite oxide constituted according to a general formula ABO3 as a piezoelectric film. The epitaxial oxide film has at least an A domain and a B domain having a crystal orientation deviation with respect to each other. The crystal orientation deviation between the A domain and the B domain is less than 2°.

摘要翻译： 提供一种压电膜，压电膜元件，使用该压电膜元件的液体排出头和液体排出装置。 通过使用由根据通式ABO3构成的钙钛矿复合氧化物构成的外延氧化膜作为压电膜，可以适用于液体排出头的排出压力产生元件的压电膜元件。 外延氧化膜具有至少A畴和具有相对于晶体取向偏离的B畴。 A域与B域之间的晶体取向偏差小于2°。

公开(公告)号：US20080012908A1

公开(公告)日：2008-01-17

申请号：US11769091

申请日：2007-06-27

申请人： KENICHI TAKEDA ,  Katsumi Aoki ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

发明人： KENICHI TAKEDA ,  Katsumi Aoki ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

IPC分类号： H01L41/187 ,  B41J2/045 ,  H01L41/24 ,  C01G23/00

CPC分类号： H01L41/1876 ,  H01L41/319 ,  Y10T29/42

摘要： A piezoelectric element comprises a piezoelectric body including a film made of an ABO3 perovskite oxide crystal epitaxially grown above a substrate, and a pair of electrode layers provided to the piezoelectric body, wherein the piezoelectric body has a porous region on a side opposite to a side of the substrate.

摘要翻译： 压电元件包括​​压电体，该压电体包括在基板上外延生长的由ABO 3钙钛矿氧化物晶体构成的膜和设置在压电体上的一对电极层，其中，压电体具有多孔 区域与衬底的一侧相对的一侧。

公开(公告)号：US07309950B1

公开(公告)日：2007-12-18

申请号：US11564643

申请日：2006-11-29

申请人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Satoshi Okamoto

发明人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Satoshi Okamoto

IPC分类号： H01L41/08

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  H01L41/0986 ,  H01L41/1875 ,  H01L41/316

摘要： A piezoelectric device includes a piezoelectric member and a pair of electrodes, and for piezoelectric constants d33 and d31 of the piezoelectric member, the following relational expression (I) is established: 0.1≦|d33/d31|≦1.8.   (I)

摘要翻译： 压电元件包括​​压电元件和一对电极，并且对于压电元件的压电常数d 33和d 31，建立如下关系式（I） ：<？in-line-formula description =“In-line Formulas”end =“lead”？> 0.1 <= | d> 33 31 。 （I）<？in-line-formula description =“In-line Formulas”end =“tail”？>