公开(公告)号：US6054181A

公开(公告)日：2000-04-25

申请号：US692286

申请日：1996-08-05

申请人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

发明人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

IPC分类号： H01L21/00 ,  H01L21/677 ,  B05D3/12

CPC分类号： H01L21/67265 ,  H01L21/67173 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S134/902 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/141

摘要： A method of subjecting a plurality of wafers to coating and beating treatments where a first boat is placed on a stage arranged in an interface section. The first boat is capable of containing the wafers stacked at intervals in a vertical direction. The stage is capable of moving in a horizontal direction, and has a plurality of positions for respectively placing a plurality of boats. The wafers are conveyed from a supply section to a coating section, and are subjected to a coating treatment one by one. The wafers, which have undergone the coating treatment, are conveyed to the interface section. The wafers, which have undergone the coating treatment, are loaded into the first boat placed on the stage, in the interface section. The first boat containing the wafers, which have undergone the coating treatment, is located at a transfer position by moving the stage. The first boat, located at a transfer position by moving the stage. The first boat, located at the transfer position, is conveyed from the stage into a heating section, and the wafers, which have undergone the coating treatment, are subjected to a heating treatment simultaneously and all together.

摘要翻译： 一种将多个晶片进行涂覆和打浆处理的方法，其中第一个船被放置在布置在界面部分中的台上。 第一艘船能够容纳沿垂直方向间隔堆叠的晶片。 舞台能够沿水平方向移动，并且具有用于分别放置多个船的多个位置。 将晶片从供给部输送到涂布部，并逐个进行涂布处理。 已经经过涂覆处理的晶片被输送到界面部分。 已经进行了涂覆处理的晶片被装载到接口部分中放置在载物台上的第一个舟皿中。 包含经过涂覆处理的晶片的第一艘船通过移动台架位于转移位置。 第一艘船，通过移动舞台位于转移位置。 位于转移位置的第一个船从载物台输送到加热部分，并且经过涂覆处理的晶片同时进行加热处理。

公开(公告)号：US5565034A

公开(公告)日：1996-10-15

申请号：US331083

申请日：1994-10-28

申请人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

发明人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

IPC分类号： H01L21/00 ,  H01L21/677 ,  B05C5/00

CPC分类号： H01L21/67265 ,  H01L21/67173 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S134/902 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/141

摘要： A substrate processing apparatus according to this invention includes an interface section having a first transfer member for transferring an object from a coating process section for applying a process solution to the object in accordance with a single sheet process to an object holding member, and a moving member for detachably supplying a plurality of object holding member and simultaneously moving the plurality of object holding member, and a heat-treatment section having a second transfer member for transferring the object placed on the object holding member to a heat-treatment section for heat-treating the plurality of objects, which have undergone the coating process, in accordance with a batch process.

摘要翻译： 根据本发明的基板处理装置包括接口部分，其具有第一传送部件，用于从涂覆处理部分传送物体，用于根据单个片材处理将物体施加到物体上，并将物体保持部件移动 用于可拆卸地供给多个物体保持部件并同时移动多个物体保持部件的部件，以及具有用于将放置在物体保持部件上的物体转印到热处理部的热转印部件的热处理部， 根据分批处理对经过涂覆处理的多个物体进行处理。

公开(公告)号：US5725664A

公开(公告)日：1998-03-10

申请号：US692436

申请日：1996-08-05

申请人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

发明人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

IPC分类号： H01L21/00 ,  H01L21/677 ,  B05C5/00

CPC分类号： H01L21/67265 ,  H01L21/67173 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S134/902 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/141

摘要： An apparatus for subjecting a plurality of wafers to coating and heating treatments, including a coating section for subjecting the wafers to a coating treatment one by one, a heating section for subjecting wafers which have undergone the coating treatment to a heating treatment all together, and an interface section arranged between the coating section and the heating section. The wafers are heat-treated in the heat treatment section while the wafers are stacked at intervals in a vertical direction in a boat. The wafers which have undergone the coating treatment are loaded into the boat by a conveying member in the interface section. The conveying member and the boat are surrounded by a surrounding space formed by a casing at the interface section. A circulation line is combined with an air supply and exhaust system, for circulating air in the surrounding space. A dehumidifier is arranged on the circulation line for dehumidifying air in the circulation line to provide localized dehumidification of the surrounding space formed by the casing.

摘要翻译： 一种用于对多个晶片进行涂覆和加热处理的设备，包括用于对晶片进行一次涂覆处理的涂布部分，将经过涂覆处理的晶片全部进行加热处理的加热部分一起进行加热处理;以及 布置在涂覆部分和加热部分之间的界面部分。 在热处理部分中对晶片进行热处理，同时晶片在船上沿垂直方向间隔堆叠。 已经经过涂覆处理的晶片通过接口部分中的传送部件装载到船中。 输送构件和舟皿由在界面部分处由壳体形成的周围空间包围。 循环管线与供气和排气系统结合，用于在周围空间循环空气。 在循环管线上设置除湿器，用于对循环管线中的空气进行除湿，以提供由壳体形成的周围空间的局部除湿。

公开(公告)号：US5518542A

公开(公告)日：1996-05-21

申请号：US336213

申请日：1994-11-04

申请人： Hiroyuki Matsukawa ,  Akira Yonemizu ,  Michiaki Matsushita ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hidetami Yaegashi ,  Takahide Fukuda

发明人： Hiroyuki Matsukawa ,  Akira Yonemizu ,  Michiaki Matsushita ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hidetami Yaegashi ,  Takahide Fukuda

IPC分类号： H01L21/304 ,  B08B1/04 ,  B08B3/04 ,  B08B3/12 ,  H01L21/00 ,  H01L21/311 ,  H01L21/677 ,  B05C1/00

CPC分类号： H01L21/67173 ,  B08B1/007 ,  B08B1/04 ,  B08B3/04 ,  B08B3/12 ,  H01L21/31116 ,  H01L21/67028 ,  H01L21/67046 ,  H01L21/67051 ,  H01L21/6715 ,  H01L21/67178 ,  B08B2203/0288 ,  Y10S134/902 ,  Y10S414/136 ,  Y10S414/141

摘要： There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.

摘要翻译： 提供了一种双面基板清洁装置，包括用于装载/卸载其中存储有待处理物体的载体的承载站，用于传送从承载站取出的物体的传送机构，至少一个清洁机构，布置 沿着传送机构传送物体的传送路径，用于清洁物体，以及沿着传送路径布置的用于反转物体的物体反转机构。

公开(公告)号：US5964954A

公开(公告)日：1999-10-12

申请号：US890996

申请日：1997-07-10

申请人： Hiroyuki Matsukawa ,  Akira Yonemizu ,  Michiaki Matsushita ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hidetami Yaegashi ,  Takahide Fukuda

发明人： Hiroyuki Matsukawa ,  Akira Yonemizu ,  Michiaki Matsushita ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hidetami Yaegashi ,  Takahide Fukuda

IPC分类号： H01L21/304 ,  B08B1/04 ,  B08B3/04 ,  B08B3/12 ,  H01L21/00 ,  H01L21/311 ,  H01L21/677 ,  B08B7/00 ,  B08B7/04

CPC分类号： H01L21/67173 ,  B08B1/007 ,  B08B1/04 ,  B08B3/04 ,  B08B3/12 ,  H01L21/31116 ,  H01L21/67028 ,  H01L21/67046 ,  H01L21/67051 ,  H01L21/6715 ,  H01L21/67178 ,  B08B2203/0288 ,  Y10S134/902 ,  Y10S414/136 ,  Y10S414/141

摘要： There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.

摘要翻译： 提供了一种双面基板清洁装置，包括用于装载/卸载其中存储有待处理物体的载体的承载站，用于传送从载体台取出的物体的传送机构，至少一个清洁机构， 沿着传送机构传送物体的传送路径，用于清洁物体，以及沿着传送路径布置的用于反转物体的物体反转机构。

公开(公告)号：US5686143A

公开(公告)日：1997-11-11

申请号：US597536

申请日：1996-02-02

申请人： Hiroyuki Matsukawa ,  Akira Yonemizu ,  Michiaki Matsushita ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hidetami Yaegashi ,  Takahide Fukuda

发明人： Hiroyuki Matsukawa ,  Akira Yonemizu ,  Michiaki Matsushita ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hidetami Yaegashi ,  Takahide Fukuda

IPC分类号： H01L21/304 ,  B08B1/04 ,  B08B3/04 ,  B08B3/12 ,  H01L21/00 ,  H01L21/311 ,  H01L21/677 ,  B05D3/00

CPC分类号： H01L21/67173 ,  B08B1/007 ,  B08B1/04 ,  B08B3/04 ,  B08B3/12 ,  H01L21/31116 ,  H01L21/67028 ,  H01L21/67046 ,  H01L21/67051 ,  H01L21/6715 ,  H01L21/67178 ,  B08B2203/0288 ,  Y10S134/902 ,  Y10S414/136 ,  Y10S414/141

摘要： There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.

摘要翻译： 提供了一种双面基板清洁装置，包括用于装载/卸载其中存储有待处理物体的载体的承载站，用于传送从承载站取出的物体的传送机构，至少一个清洁机构，布置 沿着传送机构传送物体的传送路径，用于清洁物体，以及沿着传送路径布置的用于反转物体的物体反转机构。

公开(公告)号：US5486856A

公开(公告)日：1996-01-23

申请号：US277624

申请日：1994-07-20

申请人： Nobuo Katsuma ,  Satoshi Ueda ,  Hiroyuki Matsukawa

发明人： Nobuo Katsuma ,  Satoshi Ueda ,  Hiroyuki Matsukawa

IPC分类号： B41J2/32 ,  B41J2/325 ,  B41J11/42 ,  B41M5/28 ,  B41M5/34

CPC分类号： B41J2/32

摘要： A recording sheet, to be printed in a color thermal printer, includes a support and thermosensitive coloring layers of yellow, magenta and cyan formed thereon, the three coloring layers arranged from an obverse toward a reverse of the recording sheet. The recording sheet is rotated to pass under a thermal head. The rotation subjects the three coloring layers sequentially to thermal recording. With a sensor, 1st irradiance of a yellow fixing lamp is measured, as well as 2nd irradiance of a magenta fixing lamp. A target irradiance is determined from the 1st irradiance. A duty factor of a drive signal is redetermined from the 1st irradiance and the target irradiance, to actuate the yellow fixing lamp at the target irradiance. A 1st speed is previously adapted to the yellow coloring layer. The yellow fixing lamp is maintained at the target irradiance. The recording sheet is rotated at the 1st speed, for the recording to the yellow coloring layer. A 2nd speed is determined from the 1st irradiance. The recording sheet is rotated at the 2nd speed, for supplementary fixation of the yellow coloring layer with the yellow fixing lamp. A 3rd speed is previously adapted to the magenta coloring layer. The recording sheet is rotated at the 3rd speed with the 2nd irradiance maintained, for the recording to the magenta coloring layer. A 4th speed is determined from the 2nd irradiance. The recording sheet is rotated at the 4th speed, for supplementary fixation of the magenta coloring layer with the magenta fixing lamp.

摘要翻译： 要印刷在彩色热敏打印机中的记录片材包括形成在其上的黄色，品红色和青色的支撑体和热敏着色层，三个着色层从记录片材的正面朝向背面布置。 记录纸被旋转以通过热敏头。 旋转使三个着色层依次进行热记录。 使用传感器，测量黄色固定灯的第一辐照度以及品红色固定灯的第二辐照度。 目标辐照度由第一辐照度确定。 驱动信号的占空因数从第一辐照度和目标辐照度重新确定，以目标辐照度驱动黄色固定灯。 先前的速度适应于黄色着色层。 黄色固定灯保持在目标辐照度。 记录纸以第一速度旋转，用于记录到黄色着色层。 第二速度由第一辐照度确定。 记录纸以第二速度旋转，用于黄色着色层与黄色固定灯的补充固定。 以前适用于品红色层的3速。 记录纸以第三速度旋转，保持第二辐照度，用于记录到品红色着色层。 第四速度由第二辐照度确定。 记录纸以第四速度旋转，用于用品红色固定灯辅助固定品红色着色层。

公开(公告)号：US07063589B2

公开(公告)日：2006-06-20

申请号：US10413118

申请日：2003-04-14

申请人： Hiroyuki Matsukawa ,  Tatsuya Hocho ,  Jintei Choh

发明人： Hiroyuki Matsukawa ,  Tatsuya Hocho ,  Jintei Choh

IPC分类号： A63H1/06

CPC分类号： A63H30/04 ,  A63H1/04

摘要： A remote control toy top, which is capable of remotely controlling performance characteristics of a toy top spinning on a stadium and freely changing performance characteristics, is provided. The remote control toy top is composed of the toy top and a remote controller device for remotely controlling the performance characteristics of the toy top. The toy top is provided with a motor, and regular and reverse rotation of the motor is controlled by a control signal generated from the remote controller device, and a shaft body of the toy top is rotated in cooperation with a motor shaft of the motor.

公开(公告)号：US06746300B1

公开(公告)日：2004-06-08

申请号：US10428715

申请日：2003-05-03

申请人： Hiroyuki Matsukawa

发明人： Hiroyuki Matsukawa

IPC分类号： A63H100

CPC分类号： A63H1/06

摘要： A toy top includes a toy body having a main spring power device therein, the main spring power device being rotatively linked with a revolving shaft provided on a center of a bottom surface of the toy body. The main spring power device includes latch means for maintaining a winding-up position when a main spring is wound up and a button for releasing the latch means so as to release a revolving force of the main spring. The toy body is provided with a press mechanism for pressing the button according to a rise or a reduction in a centrifugal force during the revolution of the toy body.

摘要翻译： 玩具顶部包括其中具有主弹簧动力装置的玩具主体，主弹簧动力装置与设置在玩具本体的底面中心的旋转轴旋转地连接。 主弹簧动力装置包括用于当主弹簧被卷绕时保持卷绕位置的闩锁装置和用于释放闩锁装置的按钮以释放主弹簧的旋转力。 玩具本体设置有按钮机构，该按压机构根据玩具主体的旋转期间的离心力的升高或减小而按压按钮。

公开(公告)号：US06739939B2

公开(公告)日：2004-05-25

申请号：US10136724

申请日：2002-04-30

申请人： Hiroyuki Matsukawa

发明人： Hiroyuki Matsukawa

IPC分类号： A63H100

CPC分类号： A63F3/00895 ,  A63F7/0088 ,  A63F9/16 ,  A63F2003/00274 ,  A63F2003/00343 ,  A63F2007/301 ,  A63F2007/3637 ,  A63F2007/4056 ,  A63F2007/4068 ,  A63H1/04 ,  A63H33/26

摘要： A toy top game unit is provided, the unit comprising a toy top, driving means for rotating said toy top, a game board for receiving said toy top thereon, means for interacting the toy top and the game with each other, and for imparting a change to an operational mode of the toy top on said game board. The interacting means include first magnet means arranged on the toy top and second magnet means arranged on the game board.

摘要翻译： 提供了一种玩具顶级游戏单元，该单元包括玩具顶部，用于旋转玩具顶部的驱动装置，用于接收所述玩具顶部的游戏板，用于将玩具顶部和游戏相互作用的装置， 改变为所述游戏板上的玩具顶部的操作模式。相互作用装置包括布置在玩具顶部的第一磁体装置和布置在游戏板上的第二磁体装置。