-
公开(公告)号：US20110142382A1
公开(公告)日：2011-06-16
申请号：US13034770
申请日：2011-02-25
申请人： Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
发明人： Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
CPC分类号： C22C19/051 , B32B15/01 , C22C19/00 , Y10T428/12625 , Y10T428/12931 , Y10T428/12937 , Y10T428/12944 , Y10T428/12951 , Y10T428/24025 , Y10T428/30
摘要： A method of forming a gate valve for use in a high vacuum environment of an electron gun by machining a core of non-magnetic nickel-chromium-molybdenum-iron-tungsten-silicon-carbon alloy that is weldable with nickel alloys and has a tensile strength of about 750 megapascals, machining a cladding of nickel-iron, welding the core to the cladding to form the gate valve, and machining the gate valve so as to remove any dimensional differences at an interface between the core and the cladding. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic alloy, good vacuum performance, and tight mechanical tolerance control. Also, because the alloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.
摘要翻译： 一种形成用于电子枪的高真空环境中的闸阀的方法，该方法是通过加工可与镍合金焊接的非磁性镍铬钼铁 - 钨 - 硅 - 碳合金芯，并且具有拉伸强度 强度为约750兆帕，加工镍铁包层，将芯焊接到包层以形成闸阀，并加工闸阀，以消除芯和包层之间的界面处的任何尺寸差异。 以这种方式，由于通过加工而不是部件组装来控制最终机械公差，因此获得极高的对准精度。 最后一部分提供了由镍合金壳提供的场屏蔽，由非磁性合金提供的低杂散场，良好的真空性能和严格的机械公差控制。 此外，由于与不锈钢和钛相比，该合金具有低氧化速度的优点，所以由于诸如电子束轰击的条件，存在较少的污染物积聚。
-
公开(公告)号：US08092927B2
公开(公告)日：2012-01-10
申请号：US13034770
申请日：2011-02-25
申请人： Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
发明人： Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
CPC分类号： C22C19/051 , B32B15/01 , C22C19/00 , Y10T428/12625 , Y10T428/12931 , Y10T428/12937 , Y10T428/12944 , Y10T428/12951 , Y10T428/24025 , Y10T428/30
摘要： A method of forming a gate valve for use in a high vacuum environment of an electron gun by machining a core of non-magnetic nickel-chromium-molybdenum-iron-tungsten-silicon-carbon alloy that is weldable with nickel alloys and has a tensile strength of about 750 megapascals, machining a cladding of nickel-iron, welding the core to the cladding to form the gate valve, and machining the gate valve so as to remove any dimensional differences at an interface between the core and the cladding. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic alloy, good vacuum performance, and tight mechanical tolerance control. Also, because the alloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.
摘要翻译： 一种形成用于电子枪的高真空环境中的闸阀的方法，该方法是通过加工可与镍合金焊接的非磁性镍铬钼铁 - 钨 - 硅 - 碳合金芯，并且具有拉伸强度 强度为约750兆帕，加工镍铁包层，将芯焊接到包层以形成闸阀，并加工闸阀，以消除芯和包层之间的界面处的任何尺寸差异。 以这种方式，由于通过加工而不是部件组装来控制最终机械公差，因此获得极高的对准精度。 最后一部分提供了由镍合金壳提供的场屏蔽，由非磁性合金提供的低杂散场，良好的真空性能和严格的机械公差控制。 此外，由于与不锈钢和钛相比，该合金具有低氧化速度的优点，所以由于诸如电子束轰击的条件，存在较少的污染物积聚。
-
公开(公告)号：US07919193B1
公开(公告)日：2011-04-05
申请号：US11877713
申请日：2007-10-24
申请人： Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
发明人： Mohammed Tahmassebpur , Salam Harb , Liqun Han , Marian Mankos
CPC分类号： C22C19/051 , B32B15/01 , C22C19/00 , Y10T428/12625 , Y10T428/12931 , Y10T428/12937 , Y10T428/12944 , Y10T428/12951 , Y10T428/24025 , Y10T428/30
摘要： A component for use in a high vacuum environment, the component including a core of non-magnetic Hastelloy with a cladding of nickel-iron covering the core at least in part. The component can be, for example, at least one of a gate valve for use in a high vacuum environment of an electron gun, a bearing, a slide way, a gate valve bearing, a rotary slide, a linear slide, an electron beam column, and electron beam chamber, and a vacuum chamber. In this manner, because the final mechanical tolerance is controlled by machining instead of part assembling, extremely high alignment accuracy is obtained. The final part provides field shielding as provided by the nickel alloy shell, low stray field provided by the non-magnetic Hastelloy, good vacuum performance, and tight mechanical tolerance control. Also, because Hastelloy has the advantage of a low oxidation rate in comparison to stainless steel and titanium, there is less contamination buildup due to conditions such as electron beam bombardment.
摘要翻译： 一种用于高真空环境的部件，该部件包括非磁性哈氏合金的核心，其中镍铁包层至少部分地覆盖芯部。 该部件可以是例如用于电子枪的高真空环境中的闸阀中的至少一个，轴承，滑动方式，闸阀轴承，旋转滑块，线性滑块，电子束 柱和电子束室，以及真空室。 以这种方式，由于通过加工而不是部件组装来控制最终机械公差，因此获得极高的对准精度。 最后部分提供了由镍合金壳提供的场屏蔽，由非磁性哈氏合金提供的低杂散场，良好的真空性能和严格的机械公差控制。 此外，由于与不锈钢和钛相比，哈氏合金具有低氧化速度的优点，因为诸如电子束轰击的条件，污染物积聚较少。
-
4.发明授权公开(公告)号：US08664594B1
公开(公告)日：2014-03-04
申请号：US13095574
申请日：2011-04-27
申请人： Xinrong Jiang , Liqun Han , Mohammed Tahmassebpur , Salam Harb , John D. Greene
发明人： Xinrong Jiang , Liqun Han , Mohammed Tahmassebpur , Salam Harb , John D. Greene
CPC分类号： H01J37/28 , G01N2223/418 , G01N2223/611 , H01J2237/004 , H01J2237/2817
摘要： The present disclosure provides an electron beam column with substantially improved resolution and/or throughput for inspecting manufactured substrates. The electron beam column comprises an electron gun, a scanner, an objective lens, and a detector. In accordance with one embodiment, the electron gun includes a gun lens having a flip-up pole piece configuration. In accordance with another embodiment, the scanner comprises a dual scanner having a pre-scanner and a main scanner, and the detector may be configured between the electron gun and the pre-scanner. In accordance with another embodiment, the electron beam column includes a continuously-variable aperture configured to select a beam current. Other embodiments relate to methods of using an electron beam column for automated inspection of manufactured substrates. In one embodiment, for example, an aperture size is adjusted to achieve a minimum spot size given a selected beam current and a column-condition domain being used.
摘要翻译： 本公开提供了一种电子束柱，其具有用于检查制造的基底的显着改善的分辨率和/或通过量。 电子束柱包括电子枪，扫描仪，物镜和检测器。 根据一个实施例，电子枪包括具有翻转极片构造的枪形透镜。 根据另一个实施例，扫描器包括具有预扫描器和主扫描器的双扫描器，并且检测器可以配置在电子枪和预扫描器之间。 根据另一实施例，电子束列包括被配置为选择束电流的连续可变孔径。 其他实施例涉及使用电子束柱来自动检查制造的基板的方法。 在一个实施例中，例如，在给定所选择的束电流和使用列条件域的情况下，调节孔径尺寸以实现最小斑点尺寸。
-
公开(公告)号：US08169768B1
公开(公告)日：2012-05-01
申请号：US12470169
申请日：2009-05-21
申请人： Mohammed Tahmassebpur , Salam Harb
发明人： Mohammed Tahmassebpur , Salam Harb
IPC分类号： H01T23/00
CPC分类号： H01L21/6833
摘要： An electrostatic chuck for retaining a substrate. The chuck has a clamping surface for receiving the substrate, where the clamping surface is formed of a hard polymeric material filled with carbon nanotubes. Electrodes are disposed beneath the clamping surface, for inducing localized electrostatic charges in the substrate and thereby retaining the substrate against the clamping surface. A base supports the clamping surface and the electrodes.
摘要翻译： 用于保持基板的静电卡盘。 卡盘具有用于接收基底的夹紧表面，其中夹紧表面由填充有碳纳米管的硬质聚合物材料形成。 电极设置在夹紧表面下方，用于在衬底中引起局部静电电荷，从而将衬底保持抵靠夹紧表面。 基座支撑夹紧表面和电极。
-
公开(公告)号：US08278623B2
公开(公告)日：2012-10-02
申请号：US13006999
申请日：2011-01-14
CPC分类号： H01J37/09 , H01J37/28 , H01J2237/0835
摘要： A novel technique is disclosed for varying a size of an aperture within a vacuum chamber. A drive mechanism within the vacuum chamber is used to adjust a partial horizontal overlap between at least two blades, wherein a perimeter of the aperture opening is defined by edges of said blades. In one embodiment, a variable aperture mechanism includes first and second blades attached to a first support, and third and fourth blades attached to a second support. The first blade is spaced vertically above the second blade on the first support; a second support, and the fourth blade is spaced vertically above the third blade on the second support. There is a partial horizontal overlap between the first and third blades and between the fourth and second blades, and the aperture opening has a perimeter defined by edges of the four blades. Other embodiments are also disclosed.
摘要翻译： 公开了一种用于改变真空室内孔径尺寸的新技术。 真空室内的驱动机构用于调节至少两个叶片之间的部分水平重叠，其中孔口的周边由所述叶片的边缘限定。 在一个实施例中，可变孔径机构包括附接到第一支撑件的第一和第二叶片，以及附接到第二支撑件的第三和第四叶片。 第一刀片在第一支撑件上的第二刀片上方垂直地间隔开; 第二支撑件，并且第四刀片在第二支撑件上的第三刀片上方垂直地间隔开。 在第一和第三叶片之间以及第四和第二叶片之间存在部分水平重叠，并且孔口具有由四个叶片的边缘限定的周长。 还公开了其他实施例。
-
公开(公告)号：USD372248S
公开(公告)日：1996-07-30
申请号：US37179
申请日：1995-04-06
-
公开(公告)号：US5617106A
公开(公告)日：1997-04-01
申请号：US425745
申请日：1995-04-20
CPC分类号： H01Q1/084 , H01Q1/242 , Y10S439/916
摘要： In a pivotable antenna assembly, a pivot rod is provided having an axial opening therein at a first end thereof and a radial opening extending to the axial opening. An antenna is provided, the antenna having an antenna element and a portion through which a portion of the pivot rod extends such that the axial opening of the pivot rod is inside the portion of the antenna. A coaxial cable having a first end is provided, the coaxial cable including a central conductor, a dielectric material around the conductor, a shielding material around the dielectric material, and a jacket around the dielectric material, the first end of the coaxial cable extending into the axial opening of the pivot rod, the shielding being attached to an interior wall of the pivot rod, and the conductor extending through the radial opening and being attached to the antenna element. A method for making a pivotable antenna assembly is also disclosed.
摘要翻译： 在可枢转的天线组件中，枢轴杆在其第一端处具有轴向开口，并且径向开口延伸到轴向开口。 提供天线，天线具有天线元件和枢转杆的一部分延伸的部分，使得枢转杆的轴向开口位于天线的部分内。 提供具有第一端的同轴电缆，所述同轴电缆包括中心导体，围绕导体的电介质材料，围绕电介质材料的屏蔽材料和围绕电介质材料的护套，同轴电缆的第一端延伸到 枢转杆的轴向开口，屏蔽件附接到枢转杆的内壁，并且导体延伸穿过径向开口并且附接到天线元件。 还公开了一种用于制造可枢转天线组件的方法。
-
公开(公告)号：US5748449A
公开(公告)日：1998-05-05
申请号：US425744
申请日：1995-04-20
CPC分类号： H05K9/0049 , H05K9/0018
摘要： An electrical enclosure for a circuit board includes a top part and a bottom part. Substantially rigid compression fingers extend downwardly from a top wall of the top part and are disposed inwardly from a top side wall of the top part. One or more shield springs extend upwardly from a bottom wall of the bottom part and are disposed inwardly from a bottom side wall of the bottom part. The top part and the bottom part are attachable and detachable such that the top and bottom shells define a chamber, the compression fingers and the shield springs contacting top and bottom surfaces of the circuit board, respectively, to thereby suspend the circuit board in the chamber. A coaxial cable grounding arrangement and an electrical connector shielding arrangement are also disclosed.
摘要翻译： 电路板的电气外壳包括顶部和底部。 基本刚性的压缩指状物从顶部的顶壁向下延伸并且从顶部的顶侧壁向内设置。 一个或多个屏蔽弹簧从底部的底壁向上延伸并且从底部的底侧壁向内设置。 顶部和底部是可附接和可拆卸的，使得顶部和底部壳体分别限定腔室，压缩指状物和屏蔽弹簧分别接触电路板的顶部和底部表面，从而将电路板悬挂在腔室中 。 还公开了同轴电缆接地装置和电连接器屏蔽装置。
-
公开(公告)号：USD367062S
公开(公告)日：1996-02-13
申请号：US37187
申请日：1995-04-06
-
-
-
-
-
-
-
-
-
搜索结果
11 条记录 (耗时 0.015 秒)