Programmable mask and method of fabricating biomolecule array using the same
    1.
    发明授权
    Programmable mask and method of fabricating biomolecule array using the same 失效
    可编程掩模和使用其制造生物分子阵列的方法

    公开(公告)号:US07948564B2

    公开(公告)日:2011-05-24

    申请号:US12213244

    申请日:2008-06-17

    IPC分类号: G02F1/1335

    摘要: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.

    摘要翻译: 本发明涉及用于制造生物分子阵列的光刻工艺中使用的可编程掩模,以及使用该可编程掩模制造生物分子阵列的方法,更具体地说,涉及一种可增加透射率对光屏蔽对比度的可编程掩模 通过将从外部平行曝光装置产生的平行紫外线(“UV”)光照射到某个单元并使用垂直取向的液晶面板或不具有间隔物的LC面板,对构成每个像素的液晶进行入射;以及方法 制造使用其的生物分子阵列。

    Programmable mask and method of fabricating biomolecule array using the same
    3.
    发明申请
    Programmable mask and method of fabricating biomolecule array using the same 失效
    可编程掩模和使用其制造生物分子阵列的方法

    公开(公告)号:US20080273128A1

    公开(公告)日:2008-11-06

    申请号:US12213244

    申请日:2008-06-17

    IPC分类号: G02F1/13

    摘要: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.

    摘要翻译: 本发明涉及用于制造生物分子阵列的光刻工艺中使用的可编程掩模,以及使用该可编程掩模制造生物分子阵列的方法,更具体地说,涉及一种可增加透射率对光屏蔽对比度的可编程掩模 通过将从外部平行曝光装置产生的平行紫外线(“UV”)光照射到某个单元并使用垂直取向的液晶面板或不具有间隔物的LC面板,对构成每个像素的液晶进行入射,以及方法 制造使用其的生物分子阵列。

    Personal portable content player with aroma function and method thereof
    4.
    发明申请
    Personal portable content player with aroma function and method thereof 审中-公开
    具有香味功能的个人便携式内容播放器及其方法

    公开(公告)号:US20070134196A1

    公开(公告)日:2007-06-14

    申请号:US11633173

    申请日:2006-12-04

    IPC分类号: A61L9/00 G11B17/04

    摘要: A personal portable content player with an aroma function and a content reproducing method thereof are provided. The personal portable content player includes a storage unit storing content, an aroma chip, which is inserted into a predetermined position of the personal portable content player and diffuses an aromatic material when the content is reproduced, an aromatic material number detector detecting the number of the aromatic material included in the content, and a control unit controlling the aroma chip to diffuse the aromatic material corresponding to the aromatic material number detected by the aromatic material number detector. Accordingly, it is possible to provide a personal portable content player with an aroma function and a content reproducing method thereof capable of providing an aroma function in addition to video and audio functions.

    摘要翻译: 提供具有香气功能和内容再现方法的个人便携式内容播放器。 个人便携式内容播放器包括存储内容的存储单元,插入个人便携式内容播放器的预定位置的香味芯片,并且在再现内容时扩散芳香材料;芳香族材料数量检测器, 包含在该含量中的芳香族物质,以及控制单元,其控制芳香片,使芳香族物质对应于由芳香族物质检测器检测到的芳香族物质数量扩散。 因此,可以提供具有香味功能的个人便携式内容播放器和能够提供视频和音频功能之外的香味功能的内容再现方法。

    Apparatus for controlling fluid-heating using polymer disk
    5.
    发明申请
    Apparatus for controlling fluid-heating using polymer disk 失效
    使用聚合物盘控制流体加热的装置

    公开(公告)号:US20060127070A1

    公开(公告)日:2006-06-15

    申请号:US11188911

    申请日:2005-07-25

    IPC分类号: F24H1/10

    CPC分类号: F24H1/162 B33Y80/00

    摘要: Provided is an apparatus for controlling fluid-heating using a polymer disk, which includes: a pump for discharging fluid at a uniform flow rate; a fluid-heating module including a polymer disk to convey the fluid discharged from the pump to allow a temperature of the fluid to periodically vary; and a controller for controlling the temperature of the fluid-heating module, whereby it is possible to be adapted to a fluid device for biochemical reaction such as DNA amplification, and simply used as a disposable device, which is low cost and readily manufactured in a multiple manner.

    摘要翻译: 提供了一种使用聚合物盘来控制流体加热的装置,其包括:用于以均匀流量排出流体的泵; 流体加热模块,包括聚合物盘,以输送从泵排出的流体,以允许流体的温度周期性地变化; 以及用于控制流体加热模块的温度的控制器,由此可以适用于用于诸如DNA扩增的生物化学反应的流体装置,并且简单地用作一次性装置,其成本低并且易于在 多种方式。

    Apparatus for controlling fluid-heating using polymer disk
    6.
    发明授权
    Apparatus for controlling fluid-heating using polymer disk 失效
    使用聚合物盘控制流体加热的装置

    公开(公告)号:US07398015B2

    公开(公告)日:2008-07-08

    申请号:US11188911

    申请日:2005-07-25

    IPC分类号: F24F1/10 C12M1/00

    CPC分类号: F24H1/162 B33Y80/00

    摘要: Provided is an apparatus for controlling fluid-heating using a polymer disk, which includes: a pump for discharging fluid at a uniform flow rate; a fluid-heating module including a polymer disk to convey the fluid discharged from the pump to allow a temperature of the fluid to periodically vary; and a controller for controlling the temperature of the fluid-heating module, whereby it is possible to be adapted to a fluid device for biochemical reaction such as DNA amplification, and simply used as a disposable device, which is low cost and readily manufactured in a multiple manner.

    摘要翻译: 提供了一种使用聚合物盘来控制流体加热的装置,其包括:用于以均匀流量排出流体的泵; 流体加热模块,包括聚合物盘,以输送从泵排出的流体,以允许流体的温度周期性地变化; 以及用于控制流体加热模块的温度的控制器,由此可以适用于用于诸如DNA扩增的生物化学反应的流体装置,并且简单地用作一次性装置,其成本低并且易于在 多种方式。

    Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array
    7.
    发明授权
    Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array 有权
    多步登陆微镜,制造相同和多步登陆微镜阵列的方法

    公开(公告)号:US06922270B2

    公开(公告)日:2005-07-26

    申请号:US10735669

    申请日:2003-12-16

    IPC分类号: B81B3/00 G02B26/08

    摘要: A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.

    摘要翻译: 公开了一种多步着陆微镜,其制造方法以及多台阶着陆微镜阵列。 多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧,用于将板彼此连接; 其中所述N个板由最外面的第一板,通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。 。 。 以及通过弹簧与第(N-1)板连接并位于(N-1)板中的第N板,其中当分别向N个板和沟槽施加电压时, 第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆,第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。 。 。 第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。 因此,通过在施加静电力的同时进行多级驱动,可以进行低压驱动,可以提高用于支撑反射镜的弹簧的弹力,从而可以提高光开关的可靠性。

    Micro piezoresistive pressure sensor and manufacturing method thereof
    8.
    发明授权
    Micro piezoresistive pressure sensor and manufacturing method thereof 有权
    微压阻式压力传感器及其制造方法

    公开(公告)号:US08261617B2

    公开(公告)日:2012-09-11

    申请号:US12745745

    申请日:2008-04-21

    IPC分类号: G01L9/06 B23P17/04

    摘要: A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.

    摘要翻译: 提供一种微型半导体型压力传感器及其制造方法。 微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现,通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层,形成膜 在形成空腔的氧化物层和衬底的上部上形成一层形成材料层,在膜形成材料层中形成多个蚀刻孔,通过多个蚀刻孔去除腔形成氧化物层,以形成埋入腔 在所述基板中,在所述膜形成材料层的上部形成膜增强层,以形成用于封闭所述空腔的膜,并且在所述膜的上部形成由压阻材料制成的敏感膜。

    Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer
    9.
    发明授权
    Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer 有权
    辐射热测量仪的电阻材料,使用该材料的红外探测器的测辐射热仪,以及制造测辐射热计的方法

    公开(公告)号:US08143579B2

    公开(公告)日:2012-03-27

    申请号:US12859466

    申请日:2010-08-19

    IPC分类号: G01J5/20

    CPC分类号: G01J5/04 G01J5/046

    摘要: A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.

    摘要翻译: 提供了用于测辐射热力计的电阻材料,用于使用该材料的红外探测器的测辐射热计,以及制造测辐射热计的方法。 在电阻材料中,选自氮(N),氧(O)和锗(Ge)中的至少一种元素包括在锑(Sb)中。 电阻材料具有优异的性能,例如高温电阻系数(TCR),低电阻率,低噪声常数,并且易于通过通常用于互补金属氧化物半导体(CMOS)工艺中的溅射在薄膜结构中形成, 因此它可以用作非制冷红外探测器的辐射热计的电阻器,从而为红外检测器提供出色的温度精度。

    VERTICAL ACCELERATION MEASURING APPARATUS
    10.
    发明申请
    VERTICAL ACCELERATION MEASURING APPARATUS 审中-公开
    垂直加速度测量装置

    公开(公告)号:US20090308160A1

    公开(公告)日:2009-12-17

    申请号:US12355644

    申请日:2009-01-16

    IPC分类号: G01P15/125

    CPC分类号: G01P15/125

    摘要: Provided is a vertical acceleration measuring apparatus including a substrate; a plumb that is separated from the substrate to operate; a plurality of movable electrode plates that are formed at an upper end of the plumb in a predetermined direction; a movable electrode plate supporting portion that is formed at the upper end of the plumb and supports the movable electrode plates; a fixed body that is formed at an upper end of the substrate; a fixed electrode plate supporting portion that is coupled to the fixed body adjacent to the upper end of the plumb; a plurality of fixed electrode plates that are supported by the fixed electrode plate supporting portion and arranged to face the movable electrode plates in parallel; and a connection spring that connects the fixed body and the movable electrode plate supporting portion.

    摘要翻译: 提供一种包括基板的垂直加速度测量装置; 与基板分离的铅垂操作; 多个可动电极板,其沿预定方向形成在铅垂的上端; 可动电极板支撑部分,其形成在铅垂的上端并支撑可动电极板; 形成在所述基板的上端的固定体; 固定电极板支撑部,其与所述固定体联接,所述固定体邻近所述铅垂的上端; 多个固定电极板,由固定电极板支撑部支撑并平行地面对可动电极板; 以及连接固定体和可动电极板支撑部的连接弹簧。