公开(公告)号：US07362387B2

公开(公告)日：2008-04-22

申请号：US11299111

申请日：2005-12-08

申请人： Moon Youn Jung ,  Hae Sik Yang ,  Chi Hoon Jun ,  Yun Tae Kim ,  Young Shin Kim ,  Dong Ho Shin

发明人： Moon Youn Jung ,  Hae Sik Yang ,  Chi Hoon Jun ,  Yun Tae Kim ,  Young Shin Kim ,  Dong Ho Shin

IPC分类号： G02F1/13

CPC分类号： B01J19/0046 ,  B01J2219/00434 ,  B01J2219/00527 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00659 ,  B01J2219/00675 ,  B01J2219/00677 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y30/00 ,  C40B40/06 ,  C40B60/14 ,  G02F1/133528 ,  G02F1/13454 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/12 ,  G03F7/70291 ,  G03F7/7035 ,  H01L27/146

摘要： A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.

摘要翻译： 公开了用于制造生物分子阵列的光刻工艺中使用的可编程掩模和使用其的生物分子阵列的制造方法。 特别地，提供了根据施加到其上的电信号选择性地透射入射光的TFT-LCD型可编程掩模和使用其的制造生物分子阵列的方法。 紫外光被选择性地照射到样品基底上，使得可以制造具有高密度的生物分子阵列。

公开(公告)号：US07760274B2

公开(公告)日：2010-07-20

申请号：US11634408

申请日：2006-12-06

申请人： Moon Youn Jung ,  Dong Ho Shin ,  Se Ho Park ,  Hyeon Bong Pyo ,  Chi Hoon Jun

发明人： Moon Youn Jung ,  Dong Ho Shin ,  Se Ho Park ,  Hyeon Bong Pyo ,  Chi Hoon Jun

IPC分类号： G02F1/13

CPC分类号： G03F7/70291 ,  B01J19/0046 ,  B01J2219/00286 ,  B01J2219/00434 ,  B01J2219/00448 ,  B01J2219/00527 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/0072 ,  B01J2219/00722 ,  B82Y30/00 ,  G03F7/70275

摘要： Provided are a programmable mask for promptly fabricating a biomolecule or polymer array having high density, an apparatus for fabricating a biomolecule or polymer array including the mask, and a method of fabricating a biomolecule or polymer array using the programmable mask. The programmable mask for fabricating a biomolecule array or polymer array includes a first substrate including a black matrix having openings and first pixel electrodes; a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors; a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light; a first polarizing plate laminated on one side of the first substrate; a second polarizing plate laminated on one side of the second substrate; and a lens array layer laminated on one side of the second polarizing plate including lenses which correspond to the pixel regions.

摘要翻译： 提供了一种用于及时制造具有高密度的生物分子或聚合物阵列的可编程掩模，用于制造包括掩模的生物分子或聚合物阵列的装置，以及使用可编程掩模制造生物分子或聚合物阵列的方法。 用于制造生物分子阵列或聚合物阵列的可编程掩模包括包括具有开口的黑矩阵的第一基底和第一像素电极; 第二基板，包括用于根据施加的电信号切换对应于开口的像素区域的薄膜晶体管和连接到薄膜晶体管的漏极的第二像素电极; 介于所述第一基板和所述第二基板之间的液晶层，所述液晶层包括可根据所述薄膜晶体管的电信号而配置的液晶，以选择性地透射光; 层叠在第一基板的一侧的第一偏振片; 层叠在所述第二基板的一侧的第二偏振片; 以及层叠在第二偏振片的一侧上的透镜阵列层，其包括对应于像素区域的透镜。

公开(公告)号：US07038229B2

公开(公告)日：2006-05-02

申请号：US10721973

申请日：2003-11-24

申请人： Moon Youn Jung ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Moon Youn Jung ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： H01L47/00

CPC分类号： G09G3/3648

摘要： Provided are an electric switching device with improved reliability and improved speed characteristics and an electric circuit device having the electric switching device. In the electric switching device, a first area is formed on an insulating substrate, and a second area formed on the insulating substrate such as to be a predetermined apart from the first area. The first and second areas contract or expand depending on the intensity of a laser.

摘要翻译： 提供了具有改进的可靠性和改进的速度特性的电开关装置和具有电开关装置的电路装置。 在电开关装置中，第一区域形成在绝缘基板上，第二区域形成在绝缘基板上，以便与第一区域成预定的距离。 根据激光的强度，第一和第二区域收缩或扩大。

公开(公告)号：US06922270B2

公开(公告)日：2005-07-26

申请号：US10735669

申请日：2003-12-16

申请人： Moon Youn Jung ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Moon Youn Jung ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： B81B3/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B81B3/0062 ,  B81B2201/042 ,  Y10S359/904

摘要： A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.

摘要翻译： 公开了一种多步着陆微镜，其制造方法以及多台阶着陆微镜阵列。 多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧，用于将板彼此连接; 其中所述N个板由最外面的第一板，通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。 。 。 以及通过弹簧与第（N-1）板连接并位于（N-1）板中的第N板，其中当分别向N个板和沟槽施加电压时， 第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆，第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。 。 。 第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。 因此，通过在施加静电力的同时进行多级驱动，可以进行低压驱动，可以提高用于支撑反射镜的弹簧的弹力，从而可以提高光开关的可靠性。

公开(公告)号：US06896780B2

公开(公告)日：2005-05-24

申请号：US10020774

申请日：2001-12-11

申请人： Hae Sik Yang ,  Chi Hoon Jun ,  Chang Auck Choi ,  Youn Tae Kim

发明人： Hae Sik Yang ,  Chi Hoon Jun ,  Chang Auck Choi ,  Youn Tae Kim

IPC分类号： B81B7/04 ,  B01J19/00 ,  G01N27/403 ,  G01N27/28 ,  G01N27/327

CPC分类号： B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00822 ,  B01J2219/00853 ,  B01J2219/00873 ,  G01N27/403

摘要： The present invention relates to a microelectrode, a microelectrode array, and a method of manufacturing the microelectrode of which temperature can be controlled. The microelectrode comprises a sealed cavity formed in a silicon substrate for thermal isolation, a microheater formed on the sealed cavity, and an electrode heated indirectly by the microheater. According to the present invention, it is possible to manufacture with CMOS process the microelectrode and the microelectrode array which have excellent electric insulation and thermal isolation between a microheater and a silicon substrate, which has a small power consumption, which has high heating and cooling speed and which has no corrosion.

摘要翻译： 本发明涉及一种微电极，微电极阵列，以及可以控制温度的微电极的制造方法。 微电极包括形成在用于热隔离的硅衬底中的密封空腔，形成在密封空腔上的微加热器和由微加热器间接加热的电极。 根据本发明，可以通过CMOS工艺制造微电极和微电极阵列，其在微加热器和硅基板之间具有优异的电绝缘和热隔离，其功耗小，具有高的加热和冷却速度 没有腐蚀。

公开(公告)号：US20100279396A1

公开(公告)日：2010-11-04

申请号：US12746093

申请日：2008-06-27

申请人： Yo Han Choi ,  Kwang Hyo Chung ,  Dae Sik Lee ,  Sang Hee Kim ,  Min Suk Jeong ,  Chi Hoon Jun ,  Moon Youn Jung ,  Seon Hee Park

发明人： Yo Han Choi ,  Kwang Hyo Chung ,  Dae Sik Lee ,  Sang Hee Kim ,  Min Suk Jeong ,  Chi Hoon Jun ,  Moon Youn Jung ,  Seon Hee Park

IPC分类号： C12M3/00 ,  H05K3/00

CPC分类号： C12M23/20 ,  B01L3/5027 ,  B01L7/00 ,  C12M23/16 ,  C12M41/12 ,  Y10T29/49124

摘要： There is provided a cell culture technology for culturing an animal cell in a separate microstructure. The micro-scaled animal cell incubator includes a lower glass substrate having fine hot wires processed with a metal and formed in an upper surface thereof; a first PDMS film attached onto the lower glass substrate to form two or more liquid and solid storage spaces in a position corresponding to the fine hot wires of the lower glass substrate and gas flow channels coupled respectively to the liquid and solid storage spaces to allow generated gases to flow therethrough; a gas-permeable PDMS thin film attached onto the gas flow channels of the PDMS film to pass the generated gases therethrough; a second PDMS film attached onto the PDMS thin film and having a culture medium storage space for storing a culture medium; and an upper glass substrate attached onto the second PDMS film and having fine hot wires formed in a lower surface thereof, the fine hot wires being covered by the PDMS film. The micro-scaled animal cell incubator may be useful to control a temperature of a culture medium to a suitable temperature level, as well as to self-supply gases required for the animal cell culture in a microstructure.

摘要翻译： 提供了用于在单独的微结构中培养动物细胞的细胞培养技术。 微型动物细胞培养箱包括具有用金属加工并形成在其上表面的细微热丝的下玻璃基板; 附着在下玻璃基板上的第一PDMS膜，以形成两个或多个液体和固体存储空间，该液体和固体储存空间位于对应于分别与液体和固体储存空间相连的下玻璃基板和气流通道的细热线的位置，以允许产生 气体流过其中; 透气的PDMS薄膜，附着在PDMS薄膜的气流通道上，以使产生的气体通过; 附着在PDMS薄膜上并具有用于储存培养基的培养基储存空间的第二PDMS膜; 以及附着在第二PDMS膜上并具有形成在其下表面上的精细热丝的上玻璃基板，细的热丝被PDMS膜覆盖。 微量级动物细胞培养箱可用于将培养基的温度控制到合适的温度水平，以及自动供应在微结构中动物细胞培养所需的气体。

公开(公告)号：US07861575B2

公开(公告)日：2011-01-04

申请号：US12142695

申请日：2008-06-19

申请人： Chi Hoon Jun ,  Sang Choon Ko ,  Moon Youn Jung ,  Seon Hee Park

发明人： Chi Hoon Jun ,  Sang Choon Ko ,  Moon Youn Jung ,  Seon Hee Park

IPC分类号： G01N7/00 ,  G01N27/12

CPC分类号： G01N33/0027 ,  G01N27/128

摘要： A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.

摘要翻译： 公开了一种包括基板的微气体传感器; 在所述基板中形成的开放空腔; 形成在所述基板上的电极焊盘分离槽; 第一和第二电极焊盘，形成在所述衬底上并且由所述电极焊盘分离槽彼此电绝缘; 连接到第一电极焊盘并由悬挂在开放空腔上的桥结构构成的微加热器; 第一感测电极，其从所述第一电极焊盘延伸并悬挂在所述开放腔上; 第二感测电极，其从所述第一电极焊盘延伸并悬挂在所述开口腔上; 以及电气耦合到微加热器并填充第一和第二感测电极之间的间隙的气体感测膜。

公开(公告)号：US06951708B2

公开(公告)日：2005-10-04

申请号：US10704624

申请日：2003-11-12

申请人： Moon Youn Jung ,  Chi Hoon Jun

发明人： Moon Youn Jung ,  Chi Hoon Jun

IPC分类号： H01L21/027 ,  G03C7/00 ,  G03C7/20 ,  G03F7/00 ,  G03F7/16 ,  G03F7/20

CPC分类号： B81C1/00492 ,  G03F7/0035 ,  G03F7/161

摘要： The present invention relates to a method of forming a photosensitive film pattern. It provides a method of forming a photosensitive film pattern capable of performing a photolithography process by blocking an opening of a high aspect ratio trench with a DFR film, during forming a semiconductor element and an MEMS element. In addition, it is possible to prevent the photoresist from flowing into the trench when the liquid photoresist is deposited by a spin coating method to form the photosensitive film pattern for metal pattern to apply electric signal from outside to inside of trench.

摘要翻译： 本发明涉及形成感光膜图案的方法。 它提供了一种在形成半导体元件和MEMS元件期间形成能够通过用DFR膜阻挡高纵横比沟槽的开口来进行光刻工艺的感光膜图案的方法。 此外，当通过旋涂方法沉积液态光致抗蚀剂以形成用于金属图案的感光膜图案以从外部到沟槽内部施加电信号时，可以防止光致抗蚀剂流入沟槽。

公开(公告)号：US07116863B2

公开(公告)日：2006-10-03

申请号：US10819271

申请日：2004-04-07

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chang Auck Choi ,  Chi Hoon Jun ,  Yun Tae Kim

IPC分类号： G02B6/26

CPC分类号： G02B6/29358 ,  G02B6/29395

摘要： Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.

摘要翻译： 提供了微机电系统（MEMS）的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导，其光轴彼此对准，用于准直光纤​​或光波导前端的光的两个透镜，形成在基板上的两个或更多个反射镜，支持在 至少一个反射镜，其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上，所以制造工艺简单，可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的，因此可以通过低功耗来致动。 此外，由于不使用静电力来移动反射镜，所以不会发生反射镜之间的粘附现象，并且波长可以在宽范围内可调。 由于平面镜平行配置，因此容易进行光对准，线宽恒定，插入损耗低。

公开(公告)号：US07209608B2

公开(公告)日：2007-04-24

申请号：US10923838

申请日：2004-08-24

申请人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

发明人： Chang Kyu Kim ,  Myung Lae Lee ,  Chi Hoon Jun ,  Chang Auck Choi ,  Yun Tae Kim

IPC分类号： G02B6/28 ,  G02B6/36 ,  G02B27/00 ,  G02B1/10 ,  G02B5/28

CPC分类号： G02B26/001 ,  G02B2006/12109

摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.

摘要翻译： 提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。