Flow-rate detecting device for heat-sensitive type flow sensor

    公开(公告)号:US06644113B2

    公开(公告)日:2003-11-11

    申请号:US09983081

    申请日:2001-10-23

    IPC分类号: G01F168

    CPC分类号: G01F1/6845

    摘要: A flow-rate detecting device for a heat-sensitive type flow sensor having high reliability. The device includes a planar substrate having first and second through-holes formed therein in juxtaposition with each other, an insulative supporting film formed over one major surface of the substrate so as to cover the through-holes, a fluid temperature measuring resistor formed by a heat-sensitive resistor film deposited at a location of the first through-hole on the supporting film oppositely to the substrate, a heat generating resistor formed of a heat-sensitive resistance film deposited at a location of the second through-hole on the supporting film oppositely to the substrate, an insulative protection film deposited so as to cover the fluid temperature measuring resistor and the heat generating resistor, and a reinforcing film provided for the fluid temperature measuring resistor. The reinforcing film is not provided for the heat generating resistor. Flow rate or alternatively flow speed of a fluid is measured by taking advantage of phenomenon of heat transfer to the fluid from the heat generating resistor.

    Thermal sensor
    2.
    发明授权

    公开(公告)号:US06762672B2

    公开(公告)日:2004-07-13

    申请号:US10700637

    申请日:2003-11-05

    IPC分类号: H01C304

    CPC分类号: G01K1/16

    摘要: A supporting film is formed over an entire front surface of a base material, a heating resistor composed of a platinum film having a predetermined pattern is formed on the supporting film, and a protecting film is formed over an entire surface of the supporting film so as to cover the heating resistor. A heating structure having a diaphragm construction is constructed by forming a cavity under a region where the heating resistor is formed by removing a portion of the base material so as to extend to the supporting film from the rear surface side of the base material. The supporting film and the protecting film are each constituted by a silicon nitride film having an index of refraction of less than 2.25.

    Heat-sensitive type flow rate detecting element and holder therefor
    3.
    发明授权
    Heat-sensitive type flow rate detecting element and holder therefor 有权
    热敏型流量检测元件及其支架

    公开(公告)号:US06615655B1

    公开(公告)日:2003-09-09

    申请号:US10031148

    申请日:2002-01-17

    IPC分类号: G01F168

    CPC分类号: G01F1/692 G01F1/6845

    摘要: A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.

    摘要翻译: 流量检测元件,其测量各种流体的流量,特别是内燃机的进气。 流量检测元件具有在平坦基板的一个表面上包括支撑膜和保护膜的薄膜层,具有图案并位于支撑膜和保护膜之间的加热电阻部分和比较电阻部分热敏电阻器。 平面基板具有在其平坦基板的厚度方向上贯通平板状基板的面向加热电阻部和比较电阻部的凹部。 流体流动通道与面向比较电阻部分的凹部连通,以使流体流入凹部。 可以使用根据比较电阻部报告的流体温度的加热电阻部分精确地测量流体的流速或速度。

    Thermosensitive flow rate detecting element and method for the manufacture thereof
    4.
    发明授权
    Thermosensitive flow rate detecting element and method for the manufacture thereof 有权
    热敏流量检测元件及其制造方法

    公开(公告)号:US06845662B2

    公开(公告)日:2005-01-25

    申请号:US10378919

    申请日:2003-03-05

    CPC分类号: G01F1/6845

    摘要: A dummy pattern is constituted by frame-shaped first patterns formed on a flat substrate so as to surround a resistance heater and a fluid temperature resistance thermometer, and frame-shaped second patterns formed on inner perimeter sides of the first patterns, edge portions of first and second diaphragm portions being positioned between the first patterns and the second patterns.

    摘要翻译: 虚设图形由形成在平坦基板上的框状的第一图案构成,以围绕电阻加热器和流体温度电阻温度计,以及形成在第一图案的内周侧上的框状的第二图案,第一图案的边缘部分 并且第二隔膜部分位于第一图案和第二图案之间。

    Optical disk having an SiO.sub.2 coating
    6.
    发明授权
    Optical disk having an SiO.sub.2 coating 失效
    具有SiO 2涂层的光盘

    公开(公告)号:US5450380A

    公开(公告)日:1995-09-12

    申请号:US10502

    申请日:1993-01-28

    IPC分类号: G11B7/24

    CPC分类号: G11B7/24053

    摘要: An optical disk adapted to resist moisture absorption, warping and static charge is disclosed. The disk includes an SiO.sub.2 film coating over at least a portion of a disk substrate. Additionally, an optical disk having a magnetic film protected by a fluorocarbon polymer is disclosed. Either of such disks can be used individually or, alternatively, they can be used in a laminated structure having two disks laminated in a face-to-face relationship. The laminated structure can be covered with SiO.sub.2 film.

    摘要翻译: 公开了一种适于抵抗吸湿,翘曲和静电的光盘。 盘包括至少部分盘基底上的SiO 2膜涂层。 另外,公开了具有被氟碳聚合物保护的磁性膜的光盘。 这些盘中的任何一个可以单独使用,或者可选地,它们可以用于具有以面对面关系层叠的两个盘的层压结构。 层压结构可以用SiO2膜覆盖。

    Flow sensor
    7.
    发明授权
    Flow sensor 有权
    流量传感器

    公开(公告)号:US06470742B1

    公开(公告)日:2002-10-29

    申请号:US09359636

    申请日:1999-07-26

    IPC分类号: G01F168

    CPC分类号: G01P5/10

    摘要: To obtain a flow sensor having excellent responsibility, sensitivity and reliability and high flow detection accuracy by suppressing the deformation of a diaphragm, first additional patterns are formed on a side opposite to connection patterns of a heating element so that thin film patterns formed on the diaphragm become almost symmetrical, thereby suppressing the deformation of the diaphragm caused by internal stress between a base film or protective film and a platinum film forming the thin film patterns and the differences of mechanical or thermal properties therebetween.

    摘要翻译: 为了通过抑制隔膜的变形来获得具有优异责任感,灵敏度和可靠性以及高流量检测精度的流量传感器,在与加热元件的连接图案相对的一侧上形成第一附加图案,使得形成在隔膜上的薄膜图案 变得几乎对称,从而抑制由基膜或保护膜与形成薄膜图案的铂膜之间的内部应力引起的隔膜的变形以及它们之间的机械或热性能的差异。

    Process for preparing a highly pure silicone ladder polymer
    8.
    发明授权
    Process for preparing a highly pure silicone ladder polymer 有权
    制备高纯硅树脂聚合物的方法

    公开(公告)号:US06399733B1

    公开(公告)日:2002-06-04

    申请号:US09686063

    申请日:2000-10-11

    IPC分类号: C08G7706

    CPC分类号: C08G77/04 C08G77/06 C08G77/34

    摘要: A process for preparing a highly pure silicone ladder polymer of the general formula (1): wherein R1 and R2 represent F, H, a lower alkyl group, an alkenyl group, an aryl group, a lower fluorinated alkyl group, a fluorinated alkenyl group or a fluorinated aryl group; R3, R4, R5 and R6 each represents H, a lower alkyl group or a lower fluorinated alkyl group; and n represents an integer of 5 to 10000, which comprises: (a) a step of obtaining a prepolymer in which at least one organosilane compound is dissolved in an organic solvent and hydrolyzed with ultrapure water; (b) a step of washing the obtained prepolymer with ultrapure water; and, (c) a step of dissolving the washed prepolymer in an organic solvent and heating without a catalyst.

    摘要翻译: 制备通式(1)的高纯硅树脂聚合物的方法:其中R1和R2表示F,H,低级烷基,烯基,芳基,低级氟化烷基,氟化烯基 或氟化芳基; R3,R4,R5和R6各自表示H,低级烷基或低级氟化烷基; n表示5〜10000的整数,其包括:(a)获得其中至少一种有机硅烷化合物溶解在有机溶剂中并用超纯水水解的预聚物的步骤;(b) 超纯水预聚物; 和(c)将洗过的预聚物溶解在有机溶剂中并加热而不用催化剂的步骤。

    Rotation sensor
    9.
    发明授权
    Rotation sensor 有权
    旋转传感器

    公开(公告)号:US06323644B1

    公开(公告)日:2001-11-27

    申请号:US09422973

    申请日:1999-10-22

    IPC分类号: G01R730

    CPC分类号: B82Y25/00 G01R33/093

    摘要: The present invention improves the sensitivity and expands the temperature range of operation of a magnetic detection device used in conjunction with rotary shafts such as those found in automobiles. A magnetic detection element consists of a giant magnetoresistance element and an integrated circuit for performing a predetermined operational processing based on the variation of magnetic field detected by the giant magnetoresistance element, and the magnetic detection element is operated in the magnetic field in the range of exceeding the magnetic field for maximizing the resistance value of the giant magnetoresistance element and below the field obtained by multiplying the saturation magnetic field of the giant magnetoresistance element by 0.8.

    摘要翻译: 本发明提高了灵敏度,并且扩大了与诸如在汽车中发现的旋转轴一起使用的磁检测装置的操作温度范围。 磁检测元件由巨磁阻元件和集成电路组成,用于基于由巨磁电阻元件检测到的磁场的变化执行预定的操作处理,并且磁检测元件在超出范围内的磁场中操作 用于使巨磁电阻元件的电阻值最大化并且低于通过将巨磁电阻元件的饱和磁场乘以0.8而获得的场的磁场。