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公开(公告)号：US20100315704A1
公开(公告)日：2010-12-16
申请号：US12858577
申请日：2010-08-18
申请人： Motoshi Ono , Mitsuru Watanabe , Masabumi Ito
发明人： Motoshi Ono , Mitsuru Watanabe , Masabumi Ito
CPC分类号： G21K1/062 , B82Y10/00 , C03C23/0025 , G03F1/24 , G03F1/60 , G03F1/72 , G21K2201/067
摘要： The present invention is to provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL.The present invention relates to a method for smoothing the optical surface of an optical component for EUVL, comprising irradiating, with an excimer laser having a wavelength of 250 nm or less with a fluence of 0.5 to 2.0 J/cm2, the optical surface having a concave defect of an optical component for EUV lithography (EUVL), the optical component being made of a TiO2-containing silica glass material comprising SiO2 as a main component.
摘要翻译： 本发明提供一种用于平滑具有用于EUVL的光学部件的凹陷缺陷的光学表面的方法。 本发明涉及一种平滑EUVL用光学部件的光学面的方法，其特征在于，以0.5〜2.0J / cm 2的能量密度照射波长为250nm以下的准分子激光，所述光学面具有 用于EUV光刻（EUVL）的光学部件的凹陷缺陷，该光学部件由包含SiO 2作为主要成分的含TiO 2的二氧化硅玻璃材料制成。
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公开(公告)号：US08148037B2
公开(公告)日：2012-04-03
申请号：US12858577
申请日：2010-08-18
申请人： Motoshi Ono , Mitsuru Watanabe , Masabumi Ito
发明人： Motoshi Ono , Mitsuru Watanabe , Masabumi Ito
CPC分类号： G21K1/062 , B82Y10/00 , C03C23/0025 , G03F1/24 , G03F1/60 , G03F1/72 , G21K2201/067
摘要： The present invention is to provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL.The present invention relates to a method for smoothing the optical surface of an optical component for EUVL, comprising irradiating, with an excimer laser having a wavelength of 250 nm or less with a fluence of 0.5 to 2.0 J/cm2, the optical surface having a concave defect of an optical component for EUV lithography (EUVL), the optical component being made of a TiO2-containing silica glass material comprising SiO2 as a main component.
摘要翻译： 本发明提供一种用于平滑具有用于EUVL的光学部件的凹陷缺陷的光学表面的方法。 本发明涉及一种平滑EUVL用光学部件的光学面的方法，其特征在于，以0.5〜2.0J / cm 2的能量密度照射波长为250nm以下的准分子激光，所述光学面具有 用于EUV光刻（EUVL）的光学部件的凹陷缺陷，该光学部件由包含SiO 2作为主要成分的含TiO 2的二氧化硅玻璃材料制成。
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公开(公告)号：US08124302B2
公开(公告)日：2012-02-28
申请号：US12582847
申请日：2009-10-21
申请人： Motoshi Ono , Mitsuru Watanabe , Mika Yokoyama
发明人： Motoshi Ono , Mitsuru Watanabe , Mika Yokoyama
CPC分类号： B82Y40/00 , B82Y10/00 , C03C23/0025 , C03C2204/08 , G03F1/24 , G03F1/60 , G21K2201/067
摘要： The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiO2 and comprising SiO2 as a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 μm−1 or more, at a fluence of 0.3 to 1.5 J/cm2 in an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.
摘要翻译： 本发明提供了一种用于平滑EUVL的光学部件的光学表面的方法。 具体地说，本发明提供了一种用于EUVL的光学部件的光学部件的光学部件的光学部件的平滑化的方法，所述光学部件由含有TiO 2的二氧化硅玻璃材料制成，并且包含SiO 2作为主要成分，具有用于EUVL的光学部件具有振荡波长的激光 在水蒸汽分压为3.6mmHg以下的气氛中，以0.3〜1.5J / cm 2的流量计，吸收系数为0.01μm-1以上。
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公开(公告)号：US20100068632A1
公开(公告)日：2010-03-18
申请号：US12582847
申请日：2009-10-21
申请人： Motoshi ONO , Mitsuru Watanabe , Mika Yokoyama
发明人： Motoshi ONO , Mitsuru Watanabe , Mika Yokoyama
CPC分类号： B82Y40/00 , B82Y10/00 , C03C23/0025 , C03C2204/08 , G03F1/24 , G03F1/60 , G21K2201/067
摘要： The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiO2 and comprising SiO2 as a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 μm−1 or more, at a fluence of 0.3 to 1.5 J/cm2 in an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.
摘要翻译： 本发明提供了一种用于平滑EUVL的光学部件的光学表面的方法。 具体地说，本发明提供了一种用于EUVL的光学部件的光学部件的光学部件的光学部件的平滑化的方法，所述光学部件由含有TiO 2的二氧化硅玻璃材料制成，并且包含SiO 2作为主要成分，具有用于EUVL的光学部件具有振荡波长的激光 在水蒸汽分压为3.6mmHg以下的气氛中，以0.3〜1.5J / cm 2的流量计，吸收系数为0.01μm-1以上。
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5.发明授权Process and apparatus for producing glass member provided with sealing material layer and process for producing electronic device 失效具有密封材料层的玻璃构件的制造方法和装置以及电子装置的制造方法公开(公告)号：US08490434B2
公开(公告)日：2013-07-23
申请号：US13355127
申请日：2012-01-20
申请人： Mitsuru Watanabe , Motoshi Ono
发明人： Mitsuru Watanabe , Motoshi Ono
IPC分类号： C03C27/06 , C03B23/203
CPC分类号： H01J9/261 , C03C8/24 , C03C23/0025 , C03C27/10 , G02F1/1339 , G02F2001/133354 , H01J11/10 , H01J11/48
摘要： To provide a process for producing a glass member provided with a sealing material layer, capable of favorably forming a sealing material layer even in a case where the entire glass substrate cannot be heated.A sealing material paste prepared by mixing a sealing material containing a sealing glass and a laser absorbent with an organic binder is applied to a sealing region of a glass substrate 2 in the form of a frame. The frame-form coating layer 8 of the sealing material paste is selectively heated by irradiation with a laser light 9 along the coating layer 8 to fire the sealing material while the organic binder in the coating layer 8 is burnt out to form a sealing material layer 7. Using such a sealing material layer 7, a space between two glass substrates is sealed.
摘要翻译： 为了提供一种制造具有密封材料层的玻璃构件的方法，即使在整个玻璃基板不能被加热的情况下也能够有利地形成密封材料层。 通过将包含密封玻璃和激光吸收剂的密封材料与有机粘合剂混合而制备的密封材料浆料施加到玻璃基板2的框架形式的密封区域。 通过沿着涂层8照射激光9来选择性地加热密封材料浆料的框状涂层8，以便在涂覆层8中的有机粘合剂被烧尽时形成密封材料层 使用这样的密封材料层7，密封两个玻璃基板之间的空间。
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公开(公告)号：US07869329B2
公开(公告)日：2011-01-11
申请号：US12188846
申请日：2008-08-08
申请人： Mitsuru Watanabe , Akira Kunimoto
发明人： Mitsuru Watanabe , Akira Kunimoto
IPC分类号： G11B7/00
CPC分类号： G11B7/013 , G11B2007/0013
摘要： An optical information recording and reproducing apparatus is provided for recording and/or reproducing information on an optical disc including a recording layer in which information can be recorded at recording positions each located at a different distance from a surface of the optical disc. The optical information recording and reproducing apparatus includes: a light source; and an objective lens which can converge the light flux from the light source onto one of the recording positions at a predetermined depth in the recording layer for recording information on the optical disc. When information to be recorded is recorded on one of the recording positions at a predetermined depth in the recording layer, the optical information recording and reproducing apparatus records information about the predetermined depth on one of the plurality of recording positions at the predetermined depth, with the information to be recorded.
摘要翻译： 提供了一种用于在包括记录层的光盘上记录和/或再现信息的光学信息记录和再现装置，其中信息可以记录在与光盘表面不同的距离处的记录位置处。 光信息记录和再现装置包括：光源; 以及物镜，其能够将来自光源的光束会聚到用于在光盘上记录信息的记录层中预定深度的记录位置之一。 当要记录的信息被记录在记录层中预定深度的一个记录位置上时，光信息记录和再现装置在预定深度的多个记录位置之一上记录关于预定深度的信息， 要记录的信息
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公开(公告)号：US07469590B2
公开(公告)日：2008-12-30
申请号：US11870791
申请日：2007-10-11
申请人： Tetsuya Fukuda , Mitsuru Watanabe
发明人： Tetsuya Fukuda , Mitsuru Watanabe
IPC分类号： G01L9/12
CPC分类号： G01L9/0075
摘要： A pressure-sensor package mainly includes a pressure sensor, a support substrate, and a resin layer. The pressure sensor includes a glass substrate having a fixed electrode, and a silicon substrate having a diaphragm that is disposed apart from the fixed electrode by a predetermined distance. The support substrate is a silicon/glass composite substrate on which the pressure sensor is mounted such that the support substrate and the diaphragm face each other. The resin layer fixes the pressure sensor and the support substrate together. The pressure sensor is mounted on a mounting area of the support substrate with a joint member therebetween. Accordingly, even if a gap between the support substrate and the diaphragm has a size of about several micrometers, the pressure-sensor package is capable of performing pressure detection with high sensitivity.
摘要翻译： 压力传感器封装主要包括压力传感器，支撑基板和树脂层。 压力传感器包括具有固定电极的玻璃基板和具有与固定电极隔开预定距离的隔膜的硅基板。 支撑基板是硅/玻璃复合基板，其上安装有压力传感器，使得支撑基板和隔膜彼此面对。 树脂层将压力传感器和支撑基板固定在一起。 压力传感器安装在支撑基板的安装区域上，其间具有接头部件。 因此，即使支撑基板和隔膜之间的间隙具有约几微米的尺寸，压力传感器封装能够以高灵敏度执行压力检测。
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公开(公告)号：US20080078251A1
公开(公告)日：2008-04-03
申请号：US11865479
申请日：2007-10-01
IPC分类号： G01L7/00
CPC分类号： G01L19/0069 , G01L19/147 , H01L2224/48091 , H01L2924/16195 , H01L2924/00014
摘要： A package is mainly formed of a package body having a storage area for storing a pressure sensor, a capacity type pressure sensor stored in the storage area of the package body, a lid seals the package body in which the pressure sensor is stored, an adhesive agent for fixing the pressure sensor to the package body, and a bonding wire for electrically coupling a bonding pad of the pressure sensor and a conductive portion of the package body. An adhesive area of the package body and the pressure sensor is set to the area other than a projection area of the diaphragm of the pressure sensor on a mount bottom surface. This makes it possible to provide the package for the pressure sensor capable of detecting the pressure with high sensitivity although the gap between the substrate and the diaphragm has the value with the magnitude of several μms.
摘要翻译： 封装主要由具有用于存储压力传感器的存储区域的存储区域，存储在封装体的存储区域中的容量型压力传感器，密封保存有压力传感器的封装体的封装体，粘合剂 用于将压力传感器固定到封装主体的代理，以及用于将压力传感器的焊盘电耦接到封装体的导电部分的接合线。 包装体和压力传感器的粘合区域设置在除了压力传感器的隔膜的投影区域之外的区域在安装底面上。 这使得可以提供能够以高灵敏度检测压力的压力传感器的封装，尽管基板和隔膜之间的间隙具有几个数量级的值。
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公开(公告)号：US20050163339A1
公开(公告)日：2005-07-28
申请号：US11044571
申请日：2005-01-28
申请人： Mitsuru Watanabe , Satoshi Singu , Koei Uno
发明人： Mitsuru Watanabe , Satoshi Singu , Koei Uno
CPC分类号： G07D7/1205 , G07B2017/00709
摘要： An image inputting device is provided which is capable of making reliable and speedy detection of an indicia even for an nonstandard size postal matter. The postal matter, when having passed by a proximity detecting section, is radiated with ultraviolet light at specified timing from light radiating unit. When a postal matter is radiated with ultraviolet light, fluorescence is emitted from a phosphor formed on an indicia after being pumped. In the case where the indicia is an meter, when the meter passes by a fluorescence field of view, red fluorescence enters a fluorescence light receiving optical system along a fluorescence detecting optical axis. If the indicia is a postage stamp containing a substance that emits phosphorescence, when the postage stamp passes by a phosphorescence detecting field of view where no ultraviolet light is not emitted, green fluorescence enters a phosphorescence light receiving optical system along a phosphorescence detecting optical axis.
摘要翻译： 提供了一种图像输入装置，其能够即使对于非标准尺寸的邮政物品也能够对标记进行可靠和快速的检测。 当通过接近检测部分时，邮件物质以规定的时间从光照射单元以紫外线照射。 当用紫外线照射邮政物品时，在被泵送之后，从形成在标记上的荧光体发出荧光。 在标记是米的情况下，当仪表通过荧光视场时，红色荧光沿着荧光检测光轴进入荧光接收光学系统。 如果标记是包含发射磷光的物质的邮票，则当邮票通过不发射紫外光的磷光检测视野时，绿色荧光沿着磷光检测光轴进入磷光接收光学系统。
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公开(公告)号：US06690106B1
公开(公告)日：2004-02-10
申请号：US09959412
申请日：2001-10-26
IPC分类号： H01J2910
CPC分类号： H01J29/861 , H01J2229/8613 , H01J2229/862
摘要： A color cathode ray tube is constituted of a glass bulb which includes a panel portion having a faceplate portion with a phosphor screen on an inner surface thereof, a neck portion in which an electron gun is mounted, and a funnel portion which connects the panel portion and the neck portion. Assuming a thickness of a screen effective area of the faceplate portion along the tube axis direction as tc at a central section thereof, as tx at a peripheral section thereof along the major axis direction, and as td at a peripheral section thereof along the diagonal direction, the cathode ray tube has the relationship tc>td>tx.
摘要翻译： 彩色阴极射线管由玻璃灯泡组成，该玻璃灯泡包括具有在其内表面上具有荧光屏的面板部分的面板部分，其中安装有电子枪的颈部部分和将面板部分 和颈部。 假设面板部分的沿着管轴方向的屏幕有效面积的厚度在其中心部分为tc，在其沿着长轴方向的周边部分处的tx，以及沿其对角线方向的周边部分的td ，阴极射线管的关系为tc> td> tx。
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