公开(公告)号：US20030072973A1

公开(公告)日：2003-04-17

申请号：US09177804

申请日：1998-10-23

Applicant: NGK INSULATORS, LTD.

Inventor： MASAO NISHIOKA ,  NAOTAKA KATOH ,  SHINJI KAWASAKI

IPC: B32B018/00

CPC classification number: C04B41/009 ,  C04B41/5059 ,  C04B41/87 ,  C04B2111/94 ,  C23C16/325 ,  Y02E60/321 ,  Y10T428/24479 ,  Y10T428/24942 ,  C04B41/4531 ,  C04B35/00 ,  C04B35/565

Abstract: This invention relates to a corrosion-resistant member comprising a ceramic substrate and a silicon carbide film formed through a chemical vapor deposition process and having a resistivity at room temperature of 20-500 nullnullcm, and a method of manufacturing the same as well as an heating apparatus using the same.

Abstract translation: 本发明涉及一种耐腐蚀构件，其包括陶瓷基板和通过化学气相沉积方法形成的碳化硅膜，并且在室温下的电阻率为20-500欧米加/厘米3，其制造方法以及 使用该加热装置的加热装置。