公开(公告)号：US10315388B2

公开(公告)日：2019-06-11

申请号：US15308717

申请日：2015-05-29

申请人： NHK Spring Co., Ltd.

发明人： Satoshi Hirano ,  Jun Futakuchiya ,  Yasuaki Ishioka ,  Naoki Ito ,  Yohei Itami

IPC分类号： B32B15/04 ,  B32B38/00 ,  C23C4/02 ,  C23C24/04 ,  C23C28/00 ,  C23C4/11 ,  C23C4/123 ,  C23C28/02

摘要： A method of manufacturing a laminate in which a spray coating film made of a material different from a base material is laminated on the base material includes: a base material heating step of heating the base material; an intermediate layer forming step of forming, on a surface of the heated base material, an intermediate layer made of a material different from the base material and the spray coating film; and a spray coating film forming step of forming the spray coating film on a surface of the intermediate layer.

公开(公告)号：US10276410B2

公开(公告)日：2019-04-30

申请号：US13667512

申请日：2012-11-02

申请人： NHK SPRING CO., LTD.

发明人： Toshihiro Tachikawa ,  Junichi Miyahara ,  Kazuhiro Yonekura ,  Toshihiko Hanamachi ,  Go Takahara ,  Jun Futakuchiya ,  Daisuke Hashimoto

IPC分类号： H01L21/683 ,  H05B3/68 ,  H01L21/67 ,  H01L21/687

摘要： A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.

公开(公告)号：US20130134148A1

公开(公告)日：2013-05-30

申请号：US13667512

申请日：2012-11-02

申请人： NHK Spring Co., Ltd.

发明人： Toshihiro TACHIKAWA ,  Junichi Miyahara ,  Kazuhiro Yonekura ,  Toshihiko Hanamachi ,  Go Takahara ,  Jun Futakuchiya ,  Daisuke Hashimoto

IPC分类号： H01L21/683 ,  H05B3/68

CPC分类号： H01L21/67103 ,  H01L21/67109 ,  H01L21/68735 ,  H01L21/68785

摘要： A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.

公开(公告)号：US20170145552A1

公开(公告)日：2017-05-25

申请号：US15308717

申请日：2015-05-29

申请人： NHK Spring Co., Ltd.

发明人： Satoshi Hirano ,  Jun Futakuchiya ,  Yasuaki Ishioka ,  Naoki Ito ,  Yohei Itami

IPC分类号： C23C4/123 ,  C23C28/02 ,  B32B15/04 ,  C23C24/04

CPC分类号： C23C4/123 ,  B32B15/043 ,  B32B38/00 ,  B32B2255/06 ,  C23C4/02 ,  C23C4/11 ,  C23C24/04 ,  C23C28/02 ,  C23C28/321 ,  C23C28/345

摘要： A method of manufacturing a laminate in which a spray coating film made of a material different from a base material is laminated on the base material includes: a base material heating step of heating the base material; an intermediate layer forming step of forming, on a surface of the heated base material, an intermediate layer made of a material different from the base material and the spray coating film; and a spray coating film forming step of forming the spray coating film on a surface of the intermediate layer.