PRESSURE SENSING ELEMENT HAVING AN INSULATING LAYER WITH AN INCREASED HEIGHT FROM THE SUBSTRATE TOWARDS THE OPENING
    2.
    发明申请
    PRESSURE SENSING ELEMENT HAVING AN INSULATING LAYER WITH AN INCREASED HEIGHT FROM THE SUBSTRATE TOWARDS THE OPENING 有权
    具有从基板增加的高度的绝缘层的压力传感元件开启

    公开(公告)号:US20160363491A1

    公开(公告)日:2016-12-15

    申请号:US14769290

    申请日:2015-01-14

    Abstract: A pressure sensing element (100) includes a support substrate (11); a sensor electrode (12) supported by the support substrate (11); a pressure sensing film (14) functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (12); and an insulating layer (13) which keeps the sensor electrode (12) and the pressure sensing film (14) apart from each other by a predetermined distance A, and has formed therein an opening (20) in which the sensor electrode (12) is exposed to the pressure sensing film (14), the insulating layer (13) having an aperture wall (13b) which partitions the opening (20), and an aperture end (top aperture end (13a)) faced to the pressure sensing film (14), and the insulating layer (13) being increased in height, measured from the support substrate (11), continuously towards the opening (20).

    Abstract translation: 压力传感元件(100)包括支撑衬底(11); 由所述支撑基板(11)支撑的传感器电极(12); 功能化为导电的压力感测膜(14)至少在其一部分面对传感器电极(12); 以及保持传感器电极(12)和压力感测膜(14)彼此分开预定距离A的绝缘层(13),并且在其中形成有传感器电极(12)的开口(20) 暴露于压力感测膜(14),绝缘层(13)具有分隔开口(20)的孔壁(13b)和面对压力感测膜的孔端(顶孔端部13a) (14),并且所述绝缘层(13)从所述支撑基板(11)测量的高度朝向所述开口(20)连续地增加。

    PRESSURE SENSING ELEMENT AND PRESSURE SENSOR
    3.
    发明申请
    PRESSURE SENSING ELEMENT AND PRESSURE SENSOR 审中-公开
    压力传感元件和压力传感器

    公开(公告)号:US20160327441A1

    公开(公告)日:2016-11-10

    申请号:US14904782

    申请日:2014-12-24

    Abstract: Provided is a pressure sensing element configured to be flexible, and capable of demonstrating a stable electrical reliability over a long period; and, a pressure sensor having such pressure sensing element. A pressure sensing element (100) has an electro-conductive pressure sensing film (14), a sensor electrode (12) provided at a position faced to the pressure sensing film (14), and an insulating layer (13) which creates a predetermined distance “A” between the pressure sensing film (14) and the sensor electrode (12) so as to keep them apart from each other, the pressure sensing film (14) being a resin film containing carbon particles (140); and, a pressure sensor (200) has the pressure sensing element (100), and a detection unit (210) which is electrically connected with the pressure sensing element (100) so as to detect contact resistance between the pressure sensing film (14) and the sensor electrode (12).

    Abstract translation: 提供了一种压力感测元件,其被配置为柔性的并且能够在长时间内表现出稳定的电可靠性; 以及具有这种压力传感元件的压力传感器。 压力感测元件(100)具有导电压力感测膜(14),设置在面对压力感测膜(14)的位置处的传感器电极(12)和形成预定的 所述压力感测膜(14)与所述传感器电极(12)之间的距离“A”保持彼此分离,所述压力感测膜(14)是含有碳颗粒(140)的树脂膜; 并且压力传感器(200)具有压力传感元件(100)和与压力检测元件(100)电连接以便检测压力感测膜(14)之间的接触电阻的检测单元(210) 和传感器电极(12)。

    Pressure sensor capable of suppressing dispersion in the initial load of pressure

    公开(公告)号:US10359326B2

    公开(公告)日:2019-07-23

    申请号:US15222166

    申请日:2016-07-28

    Abstract: This invention provides a pressure sensitive element capable of suppressing dispersion in the initial load for pressure sensing among the sensor electrodes or among the pressure sensors. The pressure sensitive element has a support substrate, a sensor electrode, a pressure sensing film and an insulating layer. The pressure sensing film is arranged opposing to the sensor electrode. The insulating layer has an opening and is provided between the support substrate and the pressure sensing film. At least a part of an opening edge of the opening is fallen on the sensor electrode. An exposed part as a part of the sensor electrode is exposed inside the opening, while leaving a buried part as the other part of the sensor electrode buried under the insulating layer.

    Pressure sensing element and pressure sensor

    公开(公告)号:US10048141B2

    公开(公告)日:2018-08-14

    申请号:US14904782

    申请日:2014-12-24

    Abstract: Provided is a pressure sensing element configured to be flexible, and capable of demonstrating a stable electrical reliability over a long period; and, a pressure sensor having such pressure sensing element. A pressure sensing element (100) has an electro-conductive pressure sensing film (14), a sensor electrode (12) provided at a position faced to the pressure sensing film (14), and an insulating layer (13) which creates a predetermined distance “A” between the pressure sensing film (14) and the sensor electrode (12) so as to keep them apart from each other, the pressure sensing film (14) being a resin film containing carbon particles (140); and, a pressure sensor (200) has the pressure sensing element (100), and a detection unit (210) which is electrically connected with the pressure sensing element (100) so as to detect contact resistance between the pressure sensing film (14) and the sensor electrode (12).

    PRESSURE SENSITIVE ELEMENT AND PRESSURE SENSOR

    公开(公告)号:US20170089778A1

    公开(公告)日:2017-03-30

    申请号:US15222166

    申请日:2016-07-28

    CPC classification number: G01L5/0038 G01L1/205

    Abstract: A pressure sensitive element has a support substrate, a sensor electrode, a pressure sensing film and an insulating layer; the pressure sensing film being arranged opposing to the sensor electrode; the insulating layer having an opening, and being provided between the support substrate and the pressure sensing film; at least a part of an opening edge of the opening being fallen on the sensor electrode; an exposed part as a part of the sensor electrode being exposed inside the opening, leaving a buried part as the other part of the sensor electrode buried under the insulating layer.

    Pressure sensing element having an insulating layer with an increased height from the substrate towards the opening
    8.
    发明授权
    Pressure sensing element having an insulating layer with an increased height from the substrate towards the opening 有权
    压力感测元件具有绝缘层,其具有从基板朝向开口的高度增加

    公开(公告)号:US09574955B2

    公开(公告)日:2017-02-21

    申请号:US14769290

    申请日:2015-01-14

    Abstract: A pressure sensing element (100) includes a support substrate (11); a sensor electrode (12) supported by the support substrate (11); a pressure sensing film (14) functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (12); and an insulating layer (13) which keeps the sensor electrode (12) and the pressure sensing film (14) apart from each other by a predetermined distance A, and has formed therein an opening (20) in which the sensor electrode (12) is exposed to the pressure sensing film (14), the insulating layer (13) having an aperture wall (13b) which partitions the opening (20), and an aperture end (top aperture end (13a)) faced to the pressure sensing film (14), and the insulating layer (13) being increased in height, measured from the support substrate (11), continuously towards the opening (20).

    Abstract translation: 压力传感元件(100)包括支撑衬底(11); 由所述支撑基板(11)支撑的传感器电极(12); 功能化为导电的压力感测膜(14)至少在其一部分面对传感器电极(12); 以及保持传感器电极(12)和压力感测膜(14)彼此分开预定距离A的绝缘层(13),并且在其中形成有传感器电极(12)的开口(20) 暴露于压力感测膜(14),绝缘层(13)具有分隔开口(20)的孔壁(13b)和面对压力感测膜的孔端(顶孔端部13a) (14),并且所述绝缘层(13)从所述支撑基板(11)测量的高度朝向所述开口(20)连续地增加。

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