公开(公告)号：US06611728B1

公开(公告)日：2003-08-26

申请号：US09389230

申请日：1999-09-03

申请人： Natsuyo Morioka ,  Hisafumi Iwata ,  Junko Konishi ,  Yoko Ikeda ,  Kazunori Nemoto ,  Makoto Ono ,  Yasuhiro Yoshitake

发明人： Natsuyo Morioka ,  Hisafumi Iwata ,  Junko Konishi ,  Yoko Ikeda ,  Kazunori Nemoto ,  Makoto Ono ,  Yasuhiro Yoshitake

IPC分类号： G06F1900

CPC分类号： G01N21/9501 ,  H01L22/12 ,  H01L22/20

摘要： An inspection system comprises an inspection machine for inspecting a work which is processed in one of the manufacturing processes of a manufacturing line and an analysis system for outputting an inspection history list obtained by making calculations from the inspected result. The inspection history list shows a matrix of first information as the inspection processes in which the work is inspected or the manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the works inspected by the inspection machine.

摘要翻译： 检查系统包括检查机器，用于检查在生产线的一个制造过程中处理的工件和用于输出通过从检查结果进行计算而获得的检查履历表的分析系统。 检查历史列表显示作为检查工作的检查过程的第一信息矩阵或与检查工作相关的检查过程对应的制造过程以及由检查机检查的工件的第二信息。

公开(公告)号：US08428336B2

公开(公告)日：2013-04-23

申请号：US11431709

申请日：2006-05-11

申请人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

发明人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

IPC分类号： G06K9/00

CPC分类号： G06F3/0486 ,  G06F2203/04803 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/30148

摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

摘要翻译： 一种用于对缺陷进行分类的方法，包括：通过对样品上的缺陷进行成像而获得的缺陷图像的特征量化计算; 通过使用关于计算的特征量的信息将缺陷图像分类成分类的类别; 在分类的类别的显示屏幕上的区域中显示分类的缺陷图像; 将分类类别的信息添加到所显示的缺陷图像; 将所述分类类别中的信息添加到所述其他类别中的所显示的缺陷图像，并且将所传送的缺陷图像显示在所述显示屏幕上定义为所述其他类别之一的区域中; 并更改关于该类别的信息。

公开(公告)号：US07068834B1

公开(公告)日：2006-06-27

申请号：US09452149

申请日：1999-12-01

申请人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

发明人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

IPC分类号： G06K9/00

CPC分类号： G06F3/0486 ,  G06F2203/04803 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/30148

摘要： The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image detection device, and a display having a screen with a first area for displaying a plurality of detected images stored in the storage and a plurality of second areas for classifying the detected images according to features of the detected images, whereby the plurality of detected images are moved on the screen from the first area to selected second areas to classify the plurality of detected images in the second areas.

摘要翻译： 本发明具有一种分析单元，包括用于产生工件的多个图像的图像检测装置，用于存储由图像检测装置产生的检测图像的存储器以及具有用于显示多个图像的第一区域的屏幕的显示器 检测存储在存储器中的图像和多个第二区域，用于根据检测到的图像的特征对检测到的图像进行分类，由此多个检测图像在屏幕上从第一区域移动到选定的第二区域，以对多个检测到的图像进行分类 图像在第二个区域。

公开(公告)号：US20060274932A1

公开(公告)日：2006-12-07

申请号：US11431709

申请日：2006-05-11

申请人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

发明人： Yoko Ikeda ,  Junko Konishi ,  Hisafumi Iwata ,  Yuji Takagi ,  Kenji Obara ,  Ryo Nakagaki ,  Seiji Isogai ,  Yasuhiko Ozawa

IPC分类号： G06K9/00 ,  G06K9/62 ,  G06K9/46

CPC分类号： G06F3/0486 ,  G06F2203/04803 ,  G06T7/0004 ,  G06T2200/24 ,  G06T2207/30148

摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

公开(公告)号：US20080226153A1

公开(公告)日：2008-09-18

申请号：US12039255

申请日：2008-02-28

申请人： Makoto ONO ,  Junko Konishi ,  Tomohiro Funakoshi

发明人： Makoto ONO ,  Junko Konishi ,  Tomohiro Funakoshi

IPC分类号： G06K9/00

CPC分类号： G06K9/6215 ,  G06K2209/19 ,  G06T7/0004 ,  G06T2207/30148

摘要： In order to allow to easily specify inspection recipe with which defects desired to be detected can be detected efficiently, a defect inspection apparatus performs defect inspection of a substrate in accordance with a plurality of inspection recipes and produces defect information associated with position of defect in the substrate and attribute data of the defect for each of the inspection recipes and a defect review apparatus produces review result information specifying a kind of defect selected from defects contained in the defect information. An analyzing apparatus obtains defect information and review result information and totalizes the number of defects having attribute data similar to attribute data possessed in defects corresponding to kind of defects to be analyzed for each inspection recipe.

摘要翻译： 为了能够容易地指定能够有效地检测出希望的缺陷的检查配方，缺陷检查装置根据多个检查配方进行基板的缺陷检查，并且生成与缺陷的位置有关的缺陷信息 每个检查配方的缺陷的基板和属性数据以及缺陷检查装置产生指定从缺陷信息中包含的缺陷中选择的缺陷的种类的检查结果信息。 分析装置获取缺陷信息并查看结果信息，并且将具有属性数据的缺陷的数量的总和与每个检查配方的要分析的缺陷的种类相对应的缺陷中具有的属性数据相似。

公开(公告)号：US20070021855A1

公开(公告)日：2007-01-25

申请号：US11483740

申请日：2006-07-11

申请人： Makoto Ono ,  Junko Konishi

发明人： Makoto Ono ,  Junko Konishi

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B23/024 ,  G05B2219/32196 ,  G05B2219/32206 ,  Y02P90/22 ,  Y02P90/86

摘要： Disclosed is a test data analyzing method and system for use in estimation of a defect cause of a product, such as, an integrated circuit, a liquid crystal display, an optical transceiver, a thin film magnetic head, etc., which is fabricated through plural processes. The estimation of a defect cause is achieved by selecting a wafer number to be analyzed, reading test data, reading fabrication line data, counting frequency of machine codes by wafers, grouping test data by machine codes or frequencies, comparing test data distributions between groups by machine codes, and comparing results between machine codes.

摘要翻译： 公开了一种用于估计产品的缺陷原因的测试数据分析方法和系统，例如集成电路，液晶显示器，光收发器，薄膜磁头等，其通过 多个过程。 缺陷原因的估计是通过选择要分析的晶片数量，读取测试数据，读取制造线数据，通过晶片对机器代码的计数频率，通过机器代码或频率分组测试数据来实现的，比较组之间的测试数据分布，通过 机器代码，并比较机器代码之间的结果。

公开(公告)号：US08892494B2

公开(公告)日：2014-11-18

申请号：US13376390

申请日：2010-07-08

申请人： Makoto Ono ,  Yohei Minekawa ,  Junko Konishi ,  Takehiro Hirai ,  Yuya Isomae

发明人： Makoto Ono ,  Yohei Minekawa ,  Junko Konishi ,  Takehiro Hirai ,  Yuya Isomae

IPC分类号： G06F15/18 ,  G06T7/00

CPC分类号： G06T7/001 ,  G06T2207/10056 ,  G06T2207/20076 ,  G06T2207/30148

摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).

摘要翻译： 公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。 用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据 分类为第一类组的缺陷的特征量。 并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。

公开(公告)号：US07424336B2

公开(公告)日：2008-09-09

申请号：US11483740

申请日：2006-07-11

申请人： Makoto Ono ,  Junko Konishi

发明人： Makoto Ono ,  Junko Konishi

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B23/024 ,  G05B2219/32196 ,  G05B2219/32206 ,  Y02P90/22 ,  Y02P90/86

摘要： Disclosed is a test data analyzing method and system for use in estimation of a defect cause of a product, such as, an integrated circuit, a liquid crystal display, an optical transceiver, a thin film magnetic head, etc., which is fabricated through plural processes. The estimation of a defect cause is achieved by selecting a wafer number to be analyzed, reading test data, reading fabrication line data, counting frequency of machine codes by wafers, grouping test data by machine codes or frequencies, comparing test data distributions between groups by machine codes, and comparing results between machine codes.

摘要翻译： 公开了一种用于估计产品的缺陷原因的测试数据分析方法和系统，例如集成电路，液晶显示器，光收发器，薄膜磁头等，其通过 多个过程。 缺陷原因的估计是通过选择要分析的晶片数量，读取测试数据，读取制造线数据，通过晶片对机器代码的计数频率，通过机器代码或频率分组测试数据来实现的，比较组之间的测试数据分布，通过 机器代码，并比较机器代码之间的结果。

公开(公告)号：US08290241B2

公开(公告)日：2012-10-16

申请号：US12039255

申请日：2008-02-28

申请人： Makoto Ono ,  Junko Konishi ,  Tomohiro Funakoshi

发明人： Makoto Ono ,  Junko Konishi ,  Tomohiro Funakoshi

IPC分类号： G06K9/00

CPC分类号： G06K9/6215 ,  G06K2209/19 ,  G06T7/0004 ,  G06T2207/30148

摘要： In order to allow to easily specify inspection recipe with which defects desired to be detected can be detected efficiently, a defect inspection apparatus performs defect inspection of a substrate in accordance with a plurality of inspection recipes and produces defect information associated with position of defect in the substrate and attribute data of the defect for each of the inspection recipes and a defect review apparatus produces review result information specifying a kind of defect selected from defects contained in the defect information. An analyzing apparatus obtains defect information and review result information and totalizes the number of defects having attribute data similar to attribute data possessed in defects corresponding to kind of defects to be analyzed for each inspection recipe.

摘要翻译： 为了能够容易地指定能够有效地检测出希望的缺陷的检查配方，缺陷检查装置根据多个检查配方进行基板的缺陷检查，并且生成与缺陷的位置有关的缺陷信息 每个检查配方的缺陷的基板和属性数据以及缺陷检查装置产生指定从缺陷信息中包含的缺陷中选择的缺陷的种类的检查结果信息。 分析装置获取缺陷信息并查看结果信息，并且将具有属性数据的缺陷的数量的总和与每个检查配方的要分析的缺陷的种类相对应的缺陷中具有的属性数据相似。

公开(公告)号：US20120117010A1

公开(公告)日：2012-05-10

申请号：US13376390

申请日：2010-07-08

申请人： Makoto Ono ,  Yohei Minekawa ,  Junko Konishi ,  Takehiro Hirai ,  Yuya Isomae

发明人： Makoto Ono ,  Yohei Minekawa ,  Junko Konishi ,  Takehiro Hirai ,  Yuya Isomae

IPC分类号： G06F15/18

CPC分类号： G06T7/001 ,  G06T2207/10056 ,  G06T2207/20076 ,  G06T2207/30148

摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).

摘要翻译： 公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。 用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据 分类为第一类组的缺陷的特征量。 并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。