THIN FILM THERMOELECTRIC DEVICES HAVING FAVORABLE CRYSTAL TILT
    1.
    发明申请
    THIN FILM THERMOELECTRIC DEVICES HAVING FAVORABLE CRYSTAL TILT 有权
    薄膜热电器件,具有优异的水晶倾斜

    公开(公告)号:US20140124010A1

    公开(公告)日:2014-05-08

    申请号:US13833651

    申请日:2013-03-15

    IPC分类号: H01L35/04 H01L35/34

    CPC分类号: H01L35/04 H01L35/32 H01L35/34

    摘要: A method of fabricating a thermoelectric device includes providing a substrate having a plurality of inclined growth surfaces protruding from a surface thereof. Respective thermoelectric material layers are grown on the inclined growth surfaces, and the respective thermoelectric material layers coalesce to collectively define a continuous thermoelectric film. A surface of the thermoelectric film opposite the surface of the substrate may be substantially planar, and a crystallographic orientation of the thermoelectric film may be tilted at an angle of about 45 degrees or less relative to a direction along a thickness thereof. Related devices and fabrication methods are also discussed.

    摘要翻译: 一种制造热电装置的方法包括提供具有从其表面突出的多个倾斜生长表面的基板。 相应的热电材料层生长在倾斜的生长表面上,并且各个热电材料层聚结以共同限定连续的热电膜。 与基板的表面相对的热电膜的表面可以是基本上平面的,并且热电膜的结晶取向可以相对于沿其厚度的方向以大约45度或更小的角度倾斜。 还讨论了相关设备和制造方法。

    Thin film thermoelectric devices having favorable crystal tilt
    2.
    发明授权
    Thin film thermoelectric devices having favorable crystal tilt 有权
    具有良好晶体倾斜的薄膜热电元件

    公开(公告)号:US09190592B2

    公开(公告)日:2015-11-17

    申请号:US13833651

    申请日:2013-03-15

    IPC分类号: H01L35/34 H01L35/04 H01L35/32

    CPC分类号: H01L35/04 H01L35/32 H01L35/34

    摘要: A method of fabricating a thermoelectric device includes providing a substrate having a plurality of inclined growth surfaces protruding from a surface thereof. Respective thermoelectric material layers are grown on the inclined growth surfaces, and the respective thermoelectric material layers coalesce to collectively define a continuous thermoelectric film. A surface of the thermoelectric film opposite the surface of the substrate may be substantially planar, and a crystallographic orientation of the thermoelectric film may be tilted at an angle of about 45 degrees or less relative to a direction along a thickness thereof. Related devices and fabrication methods are also discussed.

    摘要翻译: 一种制造热电装置的方法包括提供具有从其表面突出的多个倾斜生长表面的基板。 相应的热电材料层生长在倾斜的生长表面上,并且各个热电材料层聚结以共同限定连续的热电膜。 与基板的表面相对的热电膜的表面可以是基本上平面的,并且热电膜的结晶取向可以相对于沿其厚度的方向以大约45度或更小的角度倾斜。 还讨论了相关设备和制造方法。