摘要:
There is disclosed a piezoelectric/electrostrictive film device which has a flexural displacement and durability equal to or more than those of a related-art piezoelectric/electrostrictive film device and which has a remarkably high resonance frequency and which is superior in high-speed response. The piezoelectric/electrostrictive film device comprises: a substrate formed of ceramic; and a piezoelectric/electrostrictive operation portion including a lower electrode, piezoelectric/electrostrictive layer, and upper electrode which are successively stacked on the substrate and including a projecting end of the piezoelectric/electrostrictive layer with which an upper surface of the lower electrode and a lower surface of the upper electrode are coated, and a projecting portion of the piezoelectric/electrostrictive layer is a coupling member constituted of a hybrid material in which inorganic particles are scattered in a matrix of a polymer compound, and is coupled to the substrate.
摘要:
A method is provided for manufacturing a piezoelectric/electrostrictive film device including a ceramic substrate and a piezoelectric/electrostrictive operation portion including a lower electrode, a piezoelectric/electrostrictive layer, and upper electrode stacked on the substrate. The piezoelectric/electrostrictive layer is formed to extend beyond at least one of electrodes to form projected portions at its ends. The method includes the steps of forming the piezoelectric/electrostrictive layer so that ends of the piezoelectric/electrostrictive layer are projected to extend beyond ends of at least one electrode, applying a coating liquid in a sufficient amount so that the coating liquid permeates through a gap between at least the projected end portion of the piezoelectric/electrostrictive layer and the substrate, and so as to coat a predetermined portion of the at least one electrode, and drying the applied coating liquid to form a coupling member to couple the projected end portions of the piezoelectric/electrostrictive layer to the substrate.
摘要:
A drive device includes ceramic pumps which alternately pressurize and depressurize fluid within a fluid chamber on opposite sides of a movable body, to thereby move the movable body within the flow chamber. The flow chamber is connected via micro flow passages to an internal-pressure buffering chamber, which accommodates a compressible gas. When the pressure of the fluid is increased and decreased at high speed by the ceramic pumps, the micro flow passages exhibit a high passage resistance, so that the pressure within the channel does not escape to the internal-pressure buffering chamber, and the movable body moves freely. When the pressure of the fluid increases slowly due to the expansion of the fluid, the micro flow passages exhibit a low passage resistance, so that the fluid is led to the internal-pressure buffering chamber, and the pressure increase of the fluid is suppressed.
摘要:
A piezoelectric/electrostrictive film device is provided, including a ceramic substrate, and a piezoelectric/electrostrictive actuator including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode that are sequentially layered on the substrate. The piezoelectric/electrostrictive layer covers an upper surface of the lower electrode and a lower surface of the upper electrode and protrudes over edges thereof. The protruded portions of the piezoelectric/electrostrictive layer are coupled to the substrate via a coupling member.
摘要:
A reactor RT1 comprises a flow passage forming member (10) having been formed by laminating a plurality of ceramic plates (11 to 13) and firing the resultant laminate and, provided inside the flow passage (R1) of the member, a porous body (20) having a three dimensional net-like structure and carrying a catalytic material. In the reactor, when a fluid before reaction flows through the flow passage (R1), the fluid inevitably passes through the inside of the porous body (20). Accordingly, the flow is contacted frequently with the catalytic material, and thus a reaction by the catalytic material with good efficiency is occurred, which allows the use of the reactor (RT1) having a smaller size.
摘要:
An aluminum nitride sintered body is characterized by having a g-value of an unpaired electron in a spectrum of an electron spin resonance being not less than 2.0010. The aluminum nitride sintered body is produced by sintering a raw material composed of powdery aluminum nitride at a temperature of not less than 1730.degree. C. to not more than 1920.degree. under a pressure of not less than 80 kg/cm.sup.2.
摘要翻译:氮化铝烧结体的特征在于在电子自旋共振谱中具有不成对电子的g值不小于2.0010。 氮化铝烧结体通过在不低于80kg / cm 2的压力下在不低于1730℃至不超过1920℃的温度下烧结由氮化铝粉末组成的原料来制备。
摘要:
A metal phosphate composite having a composition represented by the formula M1xM21-x(HwPyOz) (wherein M1 represents at least one element selected from the group consisting of tin, titanium, zirconium, silicon, and germanium, M2 represents an element having a valence of 3, and x, w, y, and z satisfy the following relationship, 0.5≦x
摘要翻译:具有由式M1xM21-x(HwPyOz)表示的组成的金属磷酸盐复合物(其中M1表示选自锡,钛,锆,硅和锗中的至少一种元素,M2表示价数为 3,x,w,y和z满足以下关系:0.5&nlE; x <1,0,0≤n1E; w,2
摘要:
A method of manufacturing a sintered body is provided. A molding powder, a gel-forming material powder and a solvent are mixed at a temperature not higher than a dissolving point of the gel-forming material. A treatment of pulverizing agglomerates containing the molding powder, gel-forming material powder and solvent absorbed in the gel-forming material powder is carried out. The mixture is then heated to a temperature not lower than the dissolving point thereby forming a sol. The sol is then cooled to a temperature not higher than the gel point, thereby forming a molding material. The molding material is used for producing a sintering body.
摘要:
An aluminum nitride sintered body has characteristics such that an amount of total metal elements other than aluminum is smaller than 100 ppm, and a volume resistivity at room temperature is greater than 1.0.times.10.sup.9 .OMEGA..multidot.cm and is smaller than 1.0.times.10.sup.13 .OMEGA..multidot.cm. A metal including member has such a construction that a metal member is embedded in the aluminum nitride sintered body mentioned above. An electrostatic chuck is made by the metal including member mentioned above. In the metal including member mentioned above in which the metal member is embedded in the aluminum nitride sintered body mentioned above, a volume resistivity thereof can be controlled without adding a low resistance material in aluminum nitride.
摘要:
A micro reactor comprising: a first substrate comprising a predetermined number each of micro channels, reactors connected to micro channels at respective connection points, injection ports for feeding/receiving a sample solution, and discharge ports for recovering a sample solution after reaction from respective reactors; and a second substrate in which at least one micro pump is disposed so as to be faced to the injection ports and the discharge ports, the at least one micro pump being provided with a substrate including a cavity made of a ceramic in the inner surface thereof; a piezoelectric/electrostrictive operation section formed on the outer surface of the substrate, and at least two connection ports for feeding/receiving a sample solution in the cavity; and the micro reactor being formed integrally by laminating the first substrate and the second substrate.