Piezoelectric/electrostrictive film device, and manufacturing method of the device
    1.
    发明授权
    Piezoelectric/electrostrictive film device, and manufacturing method of the device 失效
    压电/电致伸缩膜装置及其制造方法

    公开(公告)号:US07067961B2

    公开(公告)日:2006-06-27

    申请号:US10615545

    申请日:2003-07-08

    IPC分类号: H01L41/08

    摘要: There is disclosed a piezoelectric/electrostrictive film device which has a flexural displacement and durability equal to or more than those of a related-art piezoelectric/electrostrictive film device and which has a remarkably high resonance frequency and which is superior in high-speed response. The piezoelectric/electrostrictive film device comprises: a substrate formed of ceramic; and a piezoelectric/electrostrictive operation portion including a lower electrode, piezoelectric/electrostrictive layer, and upper electrode which are successively stacked on the substrate and including a projecting end of the piezoelectric/electrostrictive layer with which an upper surface of the lower electrode and a lower surface of the upper electrode are coated, and a projecting portion of the piezoelectric/electrostrictive layer is a coupling member constituted of a hybrid material in which inorganic particles are scattered in a matrix of a polymer compound, and is coupled to the substrate.

    摘要翻译: 公开了一种压电/电致伸缩膜装置,其具有等于或大于现有技术的压电/电致伸缩膜装置的弯曲位移和耐久性,并且具有非常高的谐振频率,并且在高速响应方面优异。 压电/电致伸缩膜装置包括:由陶瓷形成的基板; 以及包括下电极,压电/电致伸缩层和上电极的压电/电致伸缩操作部分,它们依次层叠在基板上,并且包括压电/电致伸缩层的突出端,下电极的上表面和下电极 上部电极的表面被涂覆,并且压电/电致伸缩层的突出部分是由无机颗粒在高分子化合物的基体中散射并耦合到基底的混合材料构成的耦合构件。

    Manufacturing method of piezoelectric/electrostrictive film type device
    2.
    发明授权
    Manufacturing method of piezoelectric/electrostrictive film type device 失效
    压电/电致伸缩薄膜型器件的制造方法

    公开(公告)号:US07267840B2

    公开(公告)日:2007-09-11

    申请号:US10630887

    申请日:2003-07-30

    IPC分类号: B05D5/12

    摘要: A method is provided for manufacturing a piezoelectric/electrostrictive film device including a ceramic substrate and a piezoelectric/electrostrictive operation portion including a lower electrode, a piezoelectric/electrostrictive layer, and upper electrode stacked on the substrate. The piezoelectric/electrostrictive layer is formed to extend beyond at least one of electrodes to form projected portions at its ends. The method includes the steps of forming the piezoelectric/electrostrictive layer so that ends of the piezoelectric/electrostrictive layer are projected to extend beyond ends of at least one electrode, applying a coating liquid in a sufficient amount so that the coating liquid permeates through a gap between at least the projected end portion of the piezoelectric/electrostrictive layer and the substrate, and so as to coat a predetermined portion of the at least one electrode, and drying the applied coating liquid to form a coupling member to couple the projected end portions of the piezoelectric/electrostrictive layer to the substrate.

    摘要翻译: 提供一种用于制造包括陶瓷基板和压电/电致伸缩操作部分的压电/电致伸缩膜装置的方法,该压电/电致伸缩操作部分包括堆叠在基板上的下电极,压电/电致伸缩层和上电极。 压电/电致伸缩层被形成为延伸超过至少一个电极以在其端部处形成突出部分。 该方法包括以下步骤:形成压电/电致伸缩层,使得压电/电致伸缩层的端部突出延伸超过至少一个电极的端部,施加足够量的涂覆液体,使得涂布液体渗透通过间隙 在压电/电致伸缩层的至少突出的端部与基板之间,并且涂覆至少一个电极的预定部分,并干燥所施加的涂覆液体以形成耦合部件,以将突出的端部 压电/电致伸缩层到基板。

    Drive device
    3.
    发明授权
    Drive device 失效
    驱动装置

    公开(公告)号:US06761028B2

    公开(公告)日:2004-07-13

    申请号:US10270041

    申请日:2002-10-11

    IPC分类号: F01B1100

    摘要: A drive device includes ceramic pumps which alternately pressurize and depressurize fluid within a fluid chamber on opposite sides of a movable body, to thereby move the movable body within the flow chamber. The flow chamber is connected via micro flow passages to an internal-pressure buffering chamber, which accommodates a compressible gas. When the pressure of the fluid is increased and decreased at high speed by the ceramic pumps, the micro flow passages exhibit a high passage resistance, so that the pressure within the channel does not escape to the internal-pressure buffering chamber, and the movable body moves freely. When the pressure of the fluid increases slowly due to the expansion of the fluid, the micro flow passages exhibit a low passage resistance, so that the fluid is led to the internal-pressure buffering chamber, and the pressure increase of the fluid is suppressed.

    摘要翻译: 驱动装置包括陶瓷泵,其在可移动体的相对侧上的流体室内交替地加压和减压流体,从而使可移动体在流动室内移动。 流动室通过微流通道连接到容纳可压缩气体的内部压力缓冲室。 当流体的压力通过陶瓷泵高速下降时,微流道表现出高通道阻力,使得通道内的压力不会逸出到内压缓冲室,而移动体 自由移动 当流体的压力由于流体的膨胀而缓慢增加时,微流体通道表现出低通道阻力,使得流体被引导到内压缓冲室,并且抑制了流体的压力增加。

    Piezoelectric/electrostrictive film device
    4.
    发明授权
    Piezoelectric/electrostrictive film device 失效
    压电/电致伸缩薄膜器件

    公开(公告)号:US07019438B2

    公开(公告)日:2006-03-28

    申请号:US10463163

    申请日:2003-06-17

    IPC分类号: H01L41/08

    摘要: A piezoelectric/electrostrictive film device is provided, including a ceramic substrate, and a piezoelectric/electrostrictive actuator including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode that are sequentially layered on the substrate. The piezoelectric/electrostrictive layer covers an upper surface of the lower electrode and a lower surface of the upper electrode and protrudes over edges thereof. The protruded portions of the piezoelectric/electrostrictive layer are coupled to the substrate via a coupling member.

    摘要翻译: 提供一种压电/电致伸缩膜装置,包括陶瓷基板,以及包括下电极,压电/电致伸缩层和上电极的压电/电致伸缩致动器,其顺序地层叠在基板上。 压电/电致伸缩层覆盖下电极的上表面和上电极的下表面并在其边缘上突出。 压电/电致伸缩层的突出部分经由耦合部件耦合到基板。

    Aluminum nitride sintered bodies
    6.
    发明授权
    Aluminum nitride sintered bodies 失效
    氮化铝烧结体

    公开(公告)号:US5728635A

    公开(公告)日:1998-03-17

    申请号:US691915

    申请日:1996-08-01

    IPC分类号: C04B35/581 H01L23/15

    摘要: An aluminum nitride sintered body is characterized by having a g-value of an unpaired electron in a spectrum of an electron spin resonance being not less than 2.0010. The aluminum nitride sintered body is produced by sintering a raw material composed of powdery aluminum nitride at a temperature of not less than 1730.degree. C. to not more than 1920.degree. under a pressure of not less than 80 kg/cm.sup.2.

    摘要翻译: 氮化铝烧结体的特征在于在电子自旋共振谱中具有不成对电子的g值不小于2.0010。 氮化铝烧结体通过在不低于80kg / cm 2的压力下在不低于1730℃至不超过1920℃的温度下烧结由氮化铝粉末组成的原料来制备。

    Micro reactor
    10.
    发明授权
    Micro reactor 失效
    微反应堆

    公开(公告)号:US07504070B2

    公开(公告)日:2009-03-17

    申请号:US10886258

    申请日:2004-07-06

    IPC分类号: B01L3/00

    摘要: A micro reactor comprising: a first substrate comprising a predetermined number each of micro channels, reactors connected to micro channels at respective connection points, injection ports for feeding/receiving a sample solution, and discharge ports for recovering a sample solution after reaction from respective reactors; and a second substrate in which at least one micro pump is disposed so as to be faced to the injection ports and the discharge ports, the at least one micro pump being provided with a substrate including a cavity made of a ceramic in the inner surface thereof; a piezoelectric/electrostrictive operation section formed on the outer surface of the substrate, and at least two connection ports for feeding/receiving a sample solution in the cavity; and the micro reactor being formed integrally by laminating the first substrate and the second substrate.

    摘要翻译: 一种微反应器,包括:包含预定数量的每个微通道的第一基板,在相应连接点处连接到微通道的反应器,用于进料/接收样品溶液的注入口和用于从各个反应器反应后回收样品溶液的排出口 ; 以及第二基板,其中至少一个微泵设置成面对所述喷射口和所述排出口,所述至少一个微型泵设置有在其内表面中包括由陶瓷制成的空腔的基板 ; 形成在所述基板的外表面上的压电/电致伸缩操作部,以及用于在所述空腔内供给/接收样品溶液的至少两个连接端口; 并且所述微反应器通过层叠所述第一基板和所述第二基板而一体地形成。