Sputtering apparatus
    1.
    发明授权
    Sputtering apparatus 有权
    溅射装置

    公开(公告)号:US08147664B2

    公开(公告)日:2012-04-03

    申请号:US12787506

    申请日:2010-05-26

    IPC分类号: C23C14/34

    摘要: A sputtering apparatus includes a target holder which is placed in a vacuum vessel and can hold a target configured to deposit a film on a substrate, a substrate holder which can mount the substrate, a first shield member which is disposed in a vicinity of the substrate holder, and configured to form a closed state in which the substrate holder and the target holder are shielded from each other, or an open state in which the substrate holder and the target holder are opened to each other, a first opening/closing driving unit adapted to open/close the first shield member to enter the open state or the closed state, a second shield member, having an annular-shaped, disposed on the surface of the substrate holder and an outer peripheral portion of the substrate, and a driving unit adapted to move the substrate holder in order to bring the substrate holder, on which the second shield member is disposed, close to the first shield member in the closed state. The first shield member has at least one annular-shaped, first protruding portion formed on it to extend in the direction of the second shield member. The second shield member has at least one annular-shaped, second protruding portion formed on it to extend in the direction of the first shield member. The first protruding portion and the second protruding portion fit together in a non-contact state at the position up to which the driving unit brings the substrate holder close to the first shield member.

    摘要翻译: 溅射装置包括放置在真空容器中的靶保持器,并且可以将被配置为在基板上沉积膜的靶材,能够安装基板的基板保持器,设置在基板附近的第一屏蔽部件 并且构造成形成其中基板保持器和目标保持器彼此被屏蔽的关闭状态或其中基板保持器和目标保持器彼此打开的打开状态;第一打开/关闭驱动单元 适于打开/关闭第一屏蔽构件以进入打开状态或关闭状态,具有环形的第二屏蔽构件,设置在基板保持器的表面和基板的外周部分上,驱动 适于移动衬底保持器的单元,以便使处于关闭状态的第二屏蔽构件所设置的衬底保持器靠近第一屏蔽构件。 第一屏蔽构件具有形成在其上的至少一个环形的第一突出部分,以在第二屏蔽构件的方向上延伸。 第二屏蔽构件具有形成在其上的至少一个环形的第二突出部分,以在第一屏蔽构件的方向上延伸。 第一突出部分和第二突出部分在驱动单元使基板保持器靠近第一屏蔽构件的位置处以非接触状态配合在一起。

    SPUTTERING APPARATUS
    2.
    发明申请
    SPUTTERING APPARATUS 有权
    溅射装置

    公开(公告)号:US20100243438A1

    公开(公告)日:2010-09-30

    申请号:US12787506

    申请日:2010-05-26

    IPC分类号: C23C14/34

    摘要: A sputtering apparatus includes a target holder which is placed in a vacuum vessel and can hold a target configured to deposit a film on a substrate, a substrate holder which can mount the substrate, a first shield member which is disposed in a vicinity of the substrate holder, and configured to form a closed state in which the substrate holder and the target holder are shielded from each other, or an open state in which the substrate holder and the target holder are opened to each other, a first opening/closing driving unit adapted to open/close the first shield member to enter the open state or the closed state, a second shield member, having an annular-shaped, disposed on the surface of the substrate holder and an outer peripheral portion of the substrate, and a driving unit adapted to move the substrate holder in order to bring the substrate holder, on which the second shield member is disposed, close to the first shield member in the closed state. The first shield member has at least one annular-shaped, first protruding portion formed on it to extend in the direction of the second shield member. The second shield member has at least one annular-shaped, second protruding portion formed on it to extend in the direction of the first shield member. The first protruding portion and the second protruding portion fit together in a non-contact state at the position up to which the driving unit brings the substrate holder close to the first shield member.

    摘要翻译: 溅射装置包括放置在真空容器中的靶保持器,并且可以将被配置为在基板上沉积膜的靶材,能够安装基板的基板保持器,设置在基板附近的第一屏蔽部件 并且构造成形成其中基板保持器和目标保持器彼此屏蔽的关闭状态或其中基板保持器和目标保持器彼此打开的打开状态;第一打开/关闭驱动单元 适于打开/关闭第一屏蔽构件以进入打开状态或关闭状态,具有环形的第二屏蔽构件,设置在基板保持器的表面和基板的外周部分上,驱动 适于移动衬底保持器的单元,以便使处于关闭状态的第二屏蔽构件所设置的衬底保持器靠近第一屏蔽构件。 第一屏蔽构件具有形成在其上的至少一个环形的第一突出部分,以在第二屏蔽构件的方向上延伸。 第二屏蔽构件具有形成在其上的至少一个环形的第二突出部分,以在第一屏蔽构件的方向上延伸。 第一突出部分和第二突出部分在驱动单元使基板保持器靠近第一屏蔽构件的位置处以非接触状态配合在一起。

    Vehicle steering apparatus
    3.
    发明授权
    Vehicle steering apparatus 有权
    车辆转向装置

    公开(公告)号:US07962262B2

    公开(公告)日:2011-06-14

    申请号:US11758429

    申请日:2007-06-05

    IPC分类号: B62D6/00

    CPC分类号: B62D5/008 B62D6/002

    摘要: A first computing section stores a plurality of types of variable transmission ratio characteristics prescribed in correspondence with different modes in the form of maps. With reference to one of the maps corresponding to a selected one of the modes, the first computing section computes a first command angle by which the variable transmission ratio characteristics prescribed by the map are brought about. In this manner, variable gear ratio control is carried out. After a subsequent mode has been selected, the first computing section does not switch the maps which are referred to in the variable gear ratio control if the steering wheel turning angle θs is greater than or equal to a predetermined threshold value α.

    摘要翻译: 第一计算部分以地图的形式存储与不同模式对应地规定的多种类型的可变传动比特性。 参考对应于所选模式之一的映射之一,第一计算部分计算出由地图规定的可变传输比特性所引起的第一命令角度。 以这种方式,进行可变齿轮比控制。 在选择了后续模式之后,如果方向盘转向角度θ大于或等于预定阈值α,则第一计算部分不切换在可变齿轮比控制中参考的图。

    Conversion adapter
    4.
    发明授权
    Conversion adapter 失效
    转换适配器

    公开(公告)号:US4894630A

    公开(公告)日:1990-01-16

    申请号:US275747

    申请日:1988-11-23

    IPC分类号: H01R13/719 H05K9/00 H03H7/01

    CPC分类号: H01R13/719 H05K9/0066

    摘要: A conversion adapter including noise filters for eliminating high frequency noise yet having a simple wiring arrangement. The conversion adapter of the invention has two connectors supported on an adapter frame body and spaced opposite to each other and at a different configuration with respect to each other, a small-sized printed circuit board disposed between the two connectors, a plurality of 3-terminal noise filters arrayed in a row on the central portion of the printed board, and board-in connectors for connecting wires led from the connectors to both sides of the noise filters arranged on the circuit board. Assembly is greatly simplified since the wires from the connectors may be connected to the terminals of the board-in connectors prior to final assembly.

    Projection Type Display Apparatus
    5.
    发明申请
    Projection Type Display Apparatus 有权
    投影型显示装置

    公开(公告)号:US20110051098A1

    公开(公告)日:2011-03-03

    申请号:US12814323

    申请日:2010-06-11

    IPC分类号: G03B21/16

    CPC分类号: G03B21/16

    摘要: A projection type display apparatus in accordance with the present invention is provided with a lamp unit including a light source, a cooling fan cooling the light source, and a cooling wind guide tube guiding a cooling wind generated by the cooling fan to the lamp unit, and the cooling wind guide tube is structured such as to have a movable type rectification plate which is movable by its own weight, and cools the light source without being affected by an installed direction of the projection type display apparatus.

    摘要翻译: 根据本发明的投影型显示装置设置有灯单元,其包括光源,冷却光源的冷却风扇和将冷却风扇产生的冷却风引导到灯单元的冷却导风管, 并且冷却导风管的结构为具有能够通过其自重移动的可移动式整流板,并且冷却光源而不受投影型显示装置的安装方向的影响。

    SPUTTERING APPARATUS
    7.
    发明申请
    SPUTTERING APPARATUS 审中-公开
    溅射装置

    公开(公告)号:US20090166195A1

    公开(公告)日:2009-07-02

    申请号:US12338141

    申请日:2008-12-18

    IPC分类号: C23C14/34

    摘要: A sputtering apparatus to form a film on a substrate includes an electrode arranged in a vacuum chamber and having a placing surface to place a target on it, a stationary portion provided on the peripheral portion of the placing surface, a shutter mechanism to shield in the vacuum chamber the target placed on the placing surface, and a moving mechanism which sets in the vacuum chamber the shutter mechanism at a predetermined position. Of the stationary portion and the movable portion of the shutter mechanism, one is provided with a recess and the other one is provided with a projection. When the moving mechanism sets the shutter mechanism at a position close to the stationary portion, the projection is inserted in the recess.

    摘要翻译: 用于在基板上形成膜的溅射装置包括布置在真空室中并具有放置目标的放置表面的电极,设置在放置表面的周边部分上的固定部分,挡板 将目标物置于放置表面上的真空室,以及将真空室内的快门机构设置在预定位置的移动机构。 在活门机构的固定部分和可动部分中,设置有凹部,另一个设置有突起。 当移动机构将快门机构设置在靠近静止部分的位置时,突起插入凹部中。

    Hydraulic power steering unit
    8.
    发明申请

    公开(公告)号:US20060243518A1

    公开(公告)日:2006-11-02

    申请号:US11412937

    申请日:2006-04-28

    IPC分类号: B62D5/08

    CPC分类号: B62D5/065 B62D6/02

    摘要: A hydraulic power steering unit has an assist force generating unit that uses oil to generate assist force for steering by a steering device, a variable flow oil pump unit that supplies oil to the assist force generating unit, and a controller that controls the oil pump unit. The controller has a command flow setting device that sets a command flow rate Qc of the oil supplied from the oil pump unit to the assist force generating unit in accordance with a vehicle quantity of state such as a vehicle speed, steering angle or the like. The controller also has a flow correcting device that corrects the command flow rate Qc in accordance with the speed of the oil pump unit.

    Variable gear ratio hydraulic power steering device
    9.
    发明授权
    Variable gear ratio hydraulic power steering device 有权
    可变齿轮比液压动力转向装置

    公开(公告)号:US07306070B2

    公开(公告)日:2007-12-11

    申请号:US11097301

    申请日:2005-04-04

    IPC分类号: B62D5/30

    摘要: A variable gear ratio hydraulic power steering device 1 is provided with a variable ratio transmission mechanism 7 for varying the rotation transmission ratio between the rotational angle of a steering handle 31 and the rotational angle of a pinion shaft 33 and a flow volume control valve 40 for controlling the discharge flow volume of an oil pump 10 which circulates operating fluid. The variable ratio transmission mechanism 7 has a lock mechanism 75. A valve controlling controller 50 for controlling the flow volume control valve 40 switches main and secondary flow volume control maps for controlling the flow volume control valve 40, in dependence on the operational state of the lock mechanism 75. Thus, a failsafe function for the variable ratio transmission mechanism 7 is given to the variable gear ratio hydraulic power steering device 1.

    摘要翻译: 可变齿轮比液压动力转向装置1设置有变速传动机构7,用于改变转向手柄31的旋转角度与小齿轮轴33的旋转角度与流量控制阀40之间的旋转传动比,用于 控制使工作流体循环的油泵10的排出流量。 变速传动机构7具有锁定机构75。 用于控制流量控制阀40的阀控制控制器50根据锁定机构75的操作状态来切换用于控制流量控制阀40的主流量和二次流量控制图。 因此,可变速比变速机构7的故障保护功能被赋予变速比液压动力转向装置1。

    Spindle motor
    10.
    发明授权
    Spindle motor 失效
    主轴电机

    公开(公告)号:US06274958B1

    公开(公告)日:2001-08-14

    申请号:US09283695

    申请日:1999-04-01

    IPC分类号: H02K516

    CPC分类号: F16C33/74 H02K5/1675

    摘要: A spindle motor comprising: a stator portion which includes a stator board which is fixedly disposed, a plain bearing which is secured onto the stator board, and a wound coil disposed around the plain bearing; a rotor portion which includes a rotating shaft which is rotatably supported by the plain bearing, a rotor yoke which is integrally fixed to the rotating shaft, and a rotor magnet provided to the rotor yoke; and a plate which is provided on at least one end face of the plain bearing and adapted to prevent leakage of lubricating oil to the outside due to rotation of the rotor portion.

    摘要翻译: 一种主轴电动机,包括:定子部分,其包括固定设置的定子板,固定在所述定子板上的滑动轴承和围绕所述滑动轴承设置的绕线圈; 转子部,其包括由滑动轴承可旋转地支撑的旋转轴,与所述旋转轴一体地固定的转子轭和设置在所述转子轭上的转子磁体; 以及设置在滑动轴承的至少一个端面上并适于防止由于转子部分的旋转而使润滑油泄漏到外部的板。