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1.发明授权公开(公告)号：US07701155B2
公开(公告)日：2010-04-20
申请号：US12453099
申请日：2009-04-29
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
CPC分类号： H02N1/008
摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
摘要翻译： 微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。
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公开(公告)号：US07262541B2
公开(公告)日：2007-08-28
申请号：US10791787
申请日：2004-03-04
申请人： Mi Xiaoyu , Satoshi Ueda , Hisao Okuda , Osamu Tsuboi , Hiromitsu Soneda , Norinao Kouma , Ippei Sawaki , Yoshitaka Nakamura
发明人： Mi Xiaoyu , Satoshi Ueda , Hisao Okuda , Osamu Tsuboi , Hiromitsu Soneda , Norinao Kouma , Ippei Sawaki , Yoshitaka Nakamura
CPC分类号： G02B26/0841
摘要： A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.
摘要翻译： 微振荡元件包括振荡部和框架。 振荡部分设有镜面，通过梯形的第一和第二弹簧与框架相连。 振荡部分位于第一弹簧和第二弹簧之间。 第一弹簧和第二弹簧中的每一个与振荡部的振动一起是可变形的。
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公开(公告)号：US20070041080A1
公开(公告)日：2007-02-22
申请号：US11589075
申请日：2006-10-30
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要： A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译： 微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。 移动部件，框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。
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公开(公告)号：US06969629B2
公开(公告)日：2005-11-29
申请号：US10791903
申请日：2004-03-04
申请人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
CPC分类号： B81C1/00626 , B81B2201/0235 , B81B2201/042 , B81B2203/0136 , B81B2203/04
摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.
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公开(公告)号：US07453182B2
公开(公告)日：2008-11-18
申请号：US11290489
申请日：2005-12-01
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
CPC分类号： G02B26/0841
摘要： A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.
摘要翻译： 从由第一导电层，第二导电层和布置在第一导电层和第二导电层之间的绝缘层构成的材料基板一体地形成微振荡元件。 该振动元件包括振动部，振动部支承框和扭转接合部。 振荡部包括可动功能部。 扭转接合部连接振动部和框架，并且还限定振动部的摆动动作的摆动轴。 可动功能部是形成在第一导电层中的部分，而框架是形成在第二导电层中的部分。
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公开(公告)号：US07324251B2
公开(公告)日：2008-01-29
申请号：US11101519
申请日：2005-04-08
申请人： Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人： Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
CPC分类号： G02B26/0841 , G02B26/085 , H02N1/008
摘要： The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
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公开(公告)号：US20070063614A1
公开(公告)日：2007-03-22
申请号：US11603006
申请日：2006-11-22
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
CPC分类号： H02N1/008
摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
摘要翻译： 微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。
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公开(公告)号：US07145712B2
公开(公告)日：2006-12-05
申请号：US10962445
申请日：2004-10-13
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要： A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
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公开(公告)号：US20050231787A1
公开(公告)日：2005-10-20
申请号：US10926053
申请日：2004-08-26
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
CPC分类号： G02B26/0841
摘要： A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.
摘要翻译： 微振荡元件包括框架，可动功能部件，驱动机构，从功能部件延伸到驱动机构的梁，以及用于将框架和梁彼此连接的扭转连接器。 连接器限定了功能部件绕其旋转的旋转轴线。 旋转轴线与梁的纵向方向交叉。 光束比旋转轴的纵向方向上的功能部分短。
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公开(公告)号：US20050046980A1
公开(公告)日：2005-03-03
申请号：US10962445
申请日：2004-10-13
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要： A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译： 微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。 移动部件，框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。
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