Method for driving micro-oscillating element having comb-teeth electrodes
    1.
    发明授权
    Method for driving micro-oscillating element having comb-teeth electrodes 有权
    驱动具有梳齿电极的微振动元件的方法

    公开(公告)号:US07701155B2

    公开(公告)日:2010-04-20

    申请号:US12453099

    申请日:2009-04-29

    IPC分类号: H02N1/00 G02B26/08 G02B26/10

    CPC分类号: H02N1/008

    摘要: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

    摘要翻译: 微振荡元件包括可移动主体部分,第一框架和第二框架,以及第一连接部分,其连接可移动主体部分和第一框架,并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分,其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。

    Micro oscillating element
    5.
    发明申请
    Micro oscillating element 有权
    微振荡元件

    公开(公告)号:US20100231087A1

    公开(公告)日:2010-09-16

    申请号:US12659975

    申请日:2010-03-26

    IPC分类号: H02N11/00

    CPC分类号: H02N1/008 G02B26/0841

    摘要: A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.

    摘要翻译: 微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。 振荡部包括可动功能部,臂部和第一梳齿电极。 臂部分从功能部分延伸。 第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。 微振荡元件还包括第二梳齿电极,与第一梳齿电极配合,用于使振动部分围绕由扭转接合部分限定的摆动轴线摆动。 第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

    Micro-oscillation element having two rotational axes that are non-orthogonal to each other
    7.
    发明授权
    Micro-oscillation element having two rotational axes that are non-orthogonal to each other 失效
    微振动元件具有彼此不正交的两个旋转轴

    公开(公告)号:US07161274B2

    公开(公告)日:2007-01-09

    申请号:US10790762

    申请日:2004-03-03

    IPC分类号: H02N1/00 G02B26/08

    CPC分类号: H02N1/008

    摘要: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

    摘要翻译: 微振荡元件包括可移动主体部分,第一框架和第二框架,以及第一连接部分,其连接可移动主体部分和第一框架,并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分,其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。

    Micro oscillating element
    8.
    发明申请
    Micro oscillating element 审中-公开
    微振荡元件

    公开(公告)号:US20060119216A1

    公开(公告)日:2006-06-08

    申请号:US11271959

    申请日:2005-11-14

    IPC分类号: G02B26/08 G02B26/00 H02N1/00

    CPC分类号: H02N1/008 G02B26/0841

    摘要: A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.

    摘要翻译: 微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。 振荡部包括可动功能部,臂部和第一梳齿电极。 臂部分从功能部分延伸。 第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。 微振荡元件还包括与第一梳齿电极配合的第二梳齿电极,用于使振动部分围绕由扭转接合部分限定的摆动轴线振荡。 第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。